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Mark Law

Mark received his B.S. in Computer Engineering from Iowa State University in 1981, and his M.S. from Stanford in 1982.  He joined Hewlett Packard’s computer aided design group working on device and process simulation.  Stanford’s Professor Robert W. Dutton enticed him back to school with his dynamic TCAD group, where he completed his Ph.D. in 1988.  Mark joined the University of Florida as an assistant professor.  He rose to full professor, then ECE Chair, and now is an Associate Dean in the college of engineering.

As a graduate student at Stanford he and Conor Rafferty co-authored SUPREM-IV. With several commercial versions, this became the most widely used 2D process-modeling tool.  Florida’s SWAMP research group full of bright and energetic students, co-directed by Dr. Kevin Jones, developed FLOOPS and FLOODS, object oriented multi-dimensional tools for process and device modeling. The FLOOPS/FLOODS development effort won the 1993 Semiconductor Research Corporation Technical Excellence Award.  FLOOPS has been commercialized as Sentaurus-Process.

Dr. Law was named a National Science Foundation Presidential Faculty Fellow in 1992, Outstanding Young Alumni of Iowa State in 1994, College of Engineering Teacher of the Year in 1996-97, and a UF Research Fellow in 1998. He was named an IEEE Fellow in 1998 for his contributions to integrated circuit process modeling and simulation.  He won the 2006 SRC Aristotle Award for Outstanding Graduate Student Advising and an Iowa State Professional Achievement Award in 2007. He chaired the 1997 Simulation of Semiconductor Process and Devices Meeting, the 1999, 2002, and 2008 silicon front-end processing symposium of the Materials Research Society, the 2005 Ultra-Shallow Junctions workshop and the 2000 International Electron Devices Meeting.  (Being from Florida that election year, it was appropriate he couldn't count the attendees.)  Dr. Law has written over 200 papers in the area of process and device modeling and has advised 20 Ph.D. students. He has been involved in more than $18 million of funding during his career.