J-MEMS Editor-in-Chief and Editors
Please note that this page is under construction.
The first issue of IEEE/JMEMS appeared in March, 1992 and the Journal was published quarterly from 1992 to 2002 when it changed to a bimonthly format.
From 1992 to 1997, the JMEMS Editor-in-Chief was Dr. William Trimmer; from 1997 to 2012 Professor Richard S. Muller of the University of California, Berkeley was the Editor-in-Chief. Christofer Hierold, Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich, became the EIC in October of 2012.
The JMEMS Editorial Board plays a key role in assuring the archival quality of published papers. One of the Editorial Board members is responsible for the review process of each paper and that Editor is identified in a footnote on the first page of each accepted paper. Those members of the Editorial Board, who are designated as Senior Editor, are sometimes assigned the responsibilities of Editor-in-Chief for selected submitted papers to JMEMS.
J-MEMS Editorial Board
J-MEMS Editor-in-Chief
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Christofer Hierold
ETH Zurich
Micro and NanosystemsTannenstrasse 3
ZÃ CH-8092
SwitzerlandResearch Areas: Functional nanomaterials in MEMS and NEMS (e.g. carbon nanotube sensors, ultra low power sensors),
Polymer microsystems (e.g. magnetic polymers, biodegradable polymers),
Advanced MEMS (e.g. micro thermoelectric generators, large deflection actuators by polymer springs in MEMS), Fabrication technology (integration of functional nanomaterials on larger areas)
Professional Memberships: IEEE/EDS
Biography: Christofer Hierold has been Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich (ETH) since April 2002. Further, he is Executive Coordinator ETH Zurich of the Binnig and Rohrer Nanotechnology Center (BRNC) at Ruschlikon. Before he joined ETH Zurich in 2002 he was with Siemens AG, Corporate Research, and Infineon Technologies AG in Germany. In 1990 he graduated from Technical University Munich (TUM) with a Dr.-Ing. Degree in Engineering Sciences.
Christofer Hierold is Co-Chair of the Steering Committee of the EUROSENSORS conference, and a member of the Steering Committees of both MEMS and TRANSDUCERS. He served as General Co-Chair of MEMS 2009, and is Program Chair of TRANSDUCERS 2013. Professor Hierold is a member of the Swiss Academy of Engineering Sciences (SATW).
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J-MEMS Editors
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Narayana Aluru
Professor
University of Illinois at Urbana-Champaign3265 Beckman Institute, MC-251
Urbana, Illinois 61822
USAPhone 1:
217-333-1180Fax:
217-244-4333Email 1:
aluru@illinois.eduResearch Areas: Computational Methods, MEMS, NEMS, Micro and Nanofluidics
Professional Memberships: ASME, IEEE
Biography: N. R. Aluru received the B.E. degree with honors and distinction from the Birla Institute of Technology and Science (BITS), Pilani, India, in 1989, the M.S. degree from Rensselaer Polytechnic Institute, Troy, NY, in 1991, and the Ph.D. degree from Stanford University, Stanford, CA, in 1995. He is currently a Kritzer Professor in the Department of Mechanical Science and Engineering and Director of the Computational Science and Engineering Program at the University of Illinois at Urbana-Champaign (UIUC). He is also affiliated with the Beckman Institute for Advanced Science and Technology, the Department of Electrical and Computer Engineering and the Bioengineering Department at UIUC. He was a Postdoctoral Associate at the Massachusetts Institute of Technology (MIT), Cambridge, from 1995 to 1997. In 1998, he joined the University of Illinois at Urbana-Champaign (UIUC) as an Assistant Professor.
Dr. Aluru received the NSF CAREER award in 1999, the 2001 CMES Distinguished Young Author Award, the Xerox Award for Faculty Research in 2002, the ASME Gustus L. Larson Memorial Award in 2006, the USACM Gallagher Young Investigator Award in 2007, was named a Willett Faculty Scholar by the College of Engineering at UIUC for the period 2002-2008, and University Scholar in 2010.
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Farrokh Ayazi
Professor
Georgia Institute of Technology85 Fifth Street NW
Suite 448
Atlanta, GA 30308
USAPhone 1:
404 894 9496Fax:
404 385 6650Email 1:
ayazi@gatech.eduResearch Areas: MEMS and NEMS, Microresonators, Inertial Sensors, Gyroscopes, Accelerometers, Interface IC Design for MEMS and Sensors
Professional Memberships: IEEE/EDS/SSCS
Biography: Farrokh Ayazi is a professor in the School of Electrical and Computer Engineering at the Georgia Institute of Technology, Atlanta, GA, and the director of the Georgia Tech Center for MEMS and Microsystems Technologies (CMMT). He received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. Dr. Ayazi is an editor for the IEEE Transactions on Electron Devices and the IEEE/ASME Journal of Microelectromechanical Systems. He is a 2004 recipient of the National Science Foundation CAREER Award and has received the Outstanding Junior Faculty Member Award and the Richard M. Bass/Eta Kappa Nu Outstanding Teacher Award from the School of ECE. The author of over 200 refereed technical and scientific articles, Dr. Ayazi and his students have received several best paper awards at International IEEE conferences including MEMS 2013, Transducers 2011, Sensors 2007 and Frequency Control Symposium 2010. In 2008, he co-founded and became the CTO of Qualtre, a spinout company of his research lab that develops gyroscopes and motion sensors for personal navigation systems. Dr. Ayazi is a fellow of IEEE.
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Karl F. Bohringer
John M. Fluke Distinguished Chair Professor of Engineering
University of WashingtonBox 352500
Seattle, WA 98195-2500
USAPhone 1:
206 221-5177Fax:
206 543-3842Email 1:
karl@ee.washington.eduResearch Areas: MEMS, microsystems technology, microassembly, biomedical microsystems
Professional Memberships: IEEE Fellow, American Society for Engineering Education (ASEE), International Society for Nanoscale Science, Computing and Engineering (ISNSCE), Gesellschaft fur Informatik
Karl F. Bohringer (S'94 - M'97 - SM'03 - F'11) received his Dipl.-Inform. degree from the University of Karlsruhe, Germany in 1990 and his M.S. / Ph.D. degrees in computer science from Cornell University, Ithaca, NY in 1993 / 1997. He was a Visiting Scholar at Stanford University in 1994-5 and a Postdoctoral Researcher at the University of California, Berkeley from 1996 to 1998. He joined the University of Washington in Seattle, WA in 1998, where he is Professor of Electrical Engineering and Bioengineering and currently holds the John M. Fluke Distinguished Chair of Engineering. He is also the Director of the University of Washington Microfabrication Facility. He held visiting faculty positions at the Universities of Tohoku, Tokyo, Kyoto (Japan), and Sao Paulo (Brazil). His research interests include microelectromechanical systems (MEMS), manipulation and assembly from macro to nano scales, microfluidic systems for the life sciences, and microrobotics. He has created, among others, multi-batch selfassembling systems, massively parallel microactuator arrays, and a walking microrobot.
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Dong-il (Dan) Cho- PhD
Department of Electrical and Computer Engineering
Seoul National UniversityBuilding 133
Room 408
Gwanak-Ro 1
Gwanak-Gu, SeoulKoreaPhone 1:
+82-2-880-6488Email 1:
dicho@snu.ac.krResearch Areas:
MEMS/NEMS Fabrication Processes
MEMS and Controls Applications to Biomedical and Robotics Technologies
Professional Memberships: IEEE (EDS, RAS, IES), IFAC
Biography: Dong-Il (Dan) Cho received the B. S. degree from the Carnegie Mellon University in 1980 and the M. S. and Ph. D. degrees from the Massachusetts Institute of Technology (MIT). In 1987, he joined the Mechanical and Aerospace Engineering Department at Princeton University as an Assistant Professor. Since 1993, he has been with the Department of Electrical and Computer Engineering at Seoul National University.
His research interests are in MEMS and control technologies. He has served as the editor of IEEE/ASME Journal of MEMS since its first issue published in 1992, and was appointed as the Senior Editor of the journal in 2012. In addition, he served as the President of the MEMS Research Association of Korea from 2003 to 2007. In addition, he currently serves as the Vice-Chair of the Technical Board of IFAC (International Federation of Automatic Control). Professor Cho is a Senior Member of the National Academy of Engineering of Korea (NAEK).
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Don DeVoe
Professor
University of Maryland3139 Glenn L Martin Hall
College Park, MD 20742
USAPhone 1:
301-405-8125Fax:
301-314-9477Email 1:
ddev@umd.eduResearch Areas: Microfluidic systems for bioanalysis; Piezoelectric MEMS
Professional Memberships: IEEE, ACS
Biography: Don L. DeVoe is a Professor of Mechanical Engineering at the University of Maryland, College Park. He received his Ph.D. degree in Mechanical Engineering in 1997 from the University of California, Berkeley, with a focus in piezoelectric microsystems. He is a recipient of the Presidential Early Career Award for Scientists and Engineers from the National Science Foundation for advances in microsystems technology, and is a Kavli Fellow of the National Academy of Sciences.
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David Elata
Professor
Technion - Israel Institute of TechnologyHaifa 32000
IsraelPhone 1:
+972 4 829 3184Email 1:
elata@technion.ac.ilResearch Areas: Electrostatic micro-actuators: e.g. micromirrors and switches. Electrostatic resonators: e.g. electrostatic and electret transducers that are perfectly linear or that have a tailored nonlinear response. Modeling of micro-scale transducers: theoretical investigation and derivation of design rules for: electrostatic, piezoelectric, thermoelastic and electromagnetic transduction.
Professional Memberships: IEEE
Biography: David Elata is a Professor at the Faculty of Mechanical Engineering of the Technion - Israel Institute of Technology. He is the head of the MEMS laboratory and a member of the Technion Russell Berrie Nanotechnology Institute. He earned a D.Sc. from the Technion in 1993, and has previously worked in the fields of Computational Mechanics, Geophysics, and Continuum Mechanics. His current research interests are in modeling and design of micro actuators and development of test devices for material and structure characterization at the micro-scale.
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Reza Ghodssi
Professor
Department of Electrical and Computer Engineering and the Institute for Systems ResearchA.V. Williams Building
Rm 2173
College Park, MD 20742
USAPhone 1:
(301) 405-8158Fax:
(301) 314-9920Email 1:
ghodssi@umd.eduResearch Areas: Integrated Micro, Nano and Bio Systems, Chemical and Biological Sensing, Small-scale Energy Storage, Harvesting and Conversion
Professional Memberships: IEEE, MRS, AVS, ASEE, AAAS
Biography: Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR), and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.
Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano/bio devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. Dr. Ghodssi was chair of the NSF Workshop on Micro, Nano, Bio Systems in 2012 and the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009). He also served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011, and 2012 conferences. Dr. Ghodssi has over 95 refereed journal publications and is the co-editor of the "MEMS Materials and Processes Handbook" published in 2011.
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Roger Howe
William E. Ayer Professor
Stanford UniversityPaul G. Allen Building
Room 114
Stanford, CA 94305-4070
USAPhone 1:
1-650-723-8030Email 1:
rthowe@stanford.eduResearch Areas: N/MEMS fabrication technology and applications in resonators, actuators, inertial navigation, energy conversion, and biosensing.
Professional Memberships: IEEE
Biography: Roger T. Howe has been a Professor at Stanford University since 2005, after having held faculty positions at Berkeley, MIT, and CMU, where his group is researching N/MEMS applications in thermionic energy conversion and biomolecular sensing. In 2004, he co-founded Silicon Clocks, which was acquired by Silicon Laboratories in 2010. He served as Co-Chair of IEEE MEMS 1990 in Napa, California and as Technical Chair of Transducers 2003 in Boston, Massachusetts. He is an IEEE Fellow and a member of the U.S. National Academy of Engineering. Since 2011, he is the Director of the National Nanotechnology Infrastructure Network (NNIN).
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Hongrui Jiang
Vilas Distinguished Achievement Professor
University of Wisconsin - Madison3440 Engineering Hall
1415 Engineering Drive
Madison, Wisconsin 53706
USAPhone 1:
1-608-265-9418Fax:
1-608-262-1267Email 1:
hongrui@engr.wisc.eduResearch Areas: Microfabrication technology, biological and chemical microsensors, microactuators, optical microelectromechanical systems, smart materials and micro-/nanostructures, lab on a chip, and biomimetics and bioinspiration.
Professional Memberships: IEEE, OSA
Biography: Hongrui Jiang is the Vilas Distinguished Achievement Professor in the Department of Electrical and Computer Engineering at the University of Wisconsin - Madison. He is also a Faculty Affiliate in the Department of Biomedical Engineering, a Faculty Member of the Materials Science Program, and a Member of the McPherson Eye Research Institute at UW-Madison. He received the B.S. degree in physics from Peking University, Beijing, China, and the M.S. and Ph.D. degrees in electrical engineering in 1999 and 2001, respectively, from Cornell University, Ithaca, NY. From 2001 to 2002, he was a Postdoctoral Researcher with the Berkeley Sensor and Actuator Center, University of California at Berkeley. Dr. Jiang was the recipient of the National Science Foundation CAREER Award and the Defense Advanced Research Projects Agency Young Faculty Award in 2008, the H. I. Romnes Faculty Fellowship of the University of Wisconsin in 2011, the NIH Director's New Innovator Award in 2011, and the Vilas Associate Award of the University of Wisconsin in 2013. Dr. Jiang has published over 100 peer reviewed publications and holds 6 issued US patents.
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Liwei Lin
Professor
UC Berkeley621E Sutardja Dai Hall
Berkeley, CA 94720-1740
USAPhone 1:
510-643-5495Fax:
510-643-5599Email 1:
lwlin@me.berkeley.eduResearch Areas: MEMS (Microelectromechanical Systems); NEMS (Nanoelectromechanical Systems); Nanotechnology; design and manufacturing of microsensors and microactuators; development of micromachining processes by silicon surface/bulk micromachining; micro moulding process; mechanical issues in microelectromechanical systems (MEMS) including heat transfer, solid/fluid mechanics and dynamics
Professional Memberships: IEEE, ASME
Biography: Liwei Lin joined UC-Berkeley in 1999 and is now Professor at the Mechanical Engineering Department and co-Director at the Berkeley Sensor and Actuator Center. He received his PhD degree in Mechanical Engineering from the University of California at Berkeley in 1993. His research interests are in design, modeling and fabrication of micro/nano structures, micro/nano sensors and micro/nano actuators as well as mechanical issues in micro/nano systems including heat transfer, solid/fluid mechanics and dynamics. Dr. Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation. He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004~2005. He is an ASME Fellow and has 15 issued US patents in the area of MEMS/NEMS. He served as the general co-chair of the 24th international conference on Micro Electro Mechanical Systems. Currently, he serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators -A Physical.
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Roya Maboudian
Professor
University of California at BerkeleyDepartment of Chemical & Biomolecular Engineering
Berkeley, CA 94720
USAPhone 1:
510-643-7957Fax:
510-642-4778Email 1:
maboudia@berkeley.eduResearch Areas: surface and materials science and engineering of micro-/nanosystems
Professional Memberships: IEEE, MRS, APS, ECS, ACS, AICHE
Biography: Roya Maboudian is professor of chemical engineering, associate director of the Center of Integrated Nanomechanical Systems (COINS), and faculty affiliate of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, DC; and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena. Prof. Maboudian's research interest is in the surface and materials science and engineering of micro/nanosystems. The main research activities in her group currently include investigation of the tribological issues in micro/nanoelectromechanical systems; silicon carbide-based sensors for harsh environment applications; nanowire and graphene based sensors and energy technologies; development of electrochemical processes for low-cost thin-film photovoltaics; and biologically inspired materials design. Prof. Maboudian has coauthored over 220 papers in peer-reviewed archival journals. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems, as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS, and as advisory board member to ACS Applied Materials and Interfaces.
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Sabina Merlo- Professor
Dipartimento di Ingegneria Industriale e dell'Informazione
University of PaviaVia Ferrata 1
Pavia 27100
ItalyPhone 1:
+390382985202Fax:
+390382422583Email 1:
merlo@ieee.orgResearch Areas: Optical MEMS, Optical methods for MEMS testing, Optical Biosensors, Optofluidics, Photonic crystals, Interferometry, Fiberoptic sensors and components
Professional Memberships: IEEE/LEOS
Biography: Sabina Merlo received the Ph.D. degree in Electronic Engineering in 1992 from University of Pavia, Italy, and the MSE in Bioengineering in 1989 from the University of Washington, Seattle, USA, with a Rotary Foundation Scholarship. Assistant Professor at University of Pavia since 1993, she is Associate Professor of Electronics within Dipartimento di Ingegneria Industriale e dell Informazione of the same University since 2001.
She has carried on scientific researches in the field of optoelectronics, in collaboration with Italian and foreign Universities and companies, with regard to the study, design and characterization of new components and measuring systems, relative to telecom, biomedical and industrial applications. She has given innovative contributions in the following fields: Silicon micromachined devices, MEMS, Micromirrors, Photonic crystals for optofluidics and biosensing; Feedback interferometry; Fiber optic sensors and components; Optical cryptography and chaotic phenomena in laser oscillators; Noise limits in optoelectronic systems. She has been involved, as team member or project manager, in researches funded by EU (OCCULT and PICASSO), Italian Ministry of Education, private Foundations and companies. She is co-author of 4 patents and 100 journal/conference papers and book chapters.
She is a Senior member of IEEE/LEOS and an associate editor of JMEMS, since 2006. -
Clark Nguyen
Professor
University of California at Berkeley574 Cory Hall
Berkeley, CA 94611
USAPhone 1:
510-642-6251Email 1:
ctnguyen@eecs.berkeley.eduResearch Areas: Integrated micromechanical signal processors and integrated sensors, merged circuit/micromechanical technologies, RF communications, integrated circuit design and technology, short- and long-term stability in micromechanical devices
Professional Memberships: IEEE/EDS, IEEE/SSCS, IEEE/UFFC
Biography: Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA. Prof. Nguyen is a Fellow of the IEEE and presently serves as the Vice President for Frequency Control in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society.
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Christian Rembe- Dr.

Research Areas: optical metrology, MEMS-testing, laser-Doppler vibrometry
Professional Memberships: IEEE, SPIE, DPG, VDI
Biography: Christian Rembe received the diploma in Physics from the University of Hanover, Hanover, Germany, in 1994. From 1994 to 1999, he was a scientific assistant at the University of Ulm, Ulm, Germany where he earned a doctor degree in Engineering. 1999 he joined the Berkeley Sensor & Actuator Center at the University of California, Berkeley as postdoctoral, research engineer with support of a Feodor-Lynen-Scholarship of the Alexander von Humboldt-Foundation and a UC Berkeley MacKay-Lecturer Fellowship. Since 2001 he is working as Manager Development Optics at Polytec GmbH, Waldbronn, Germany. His interests are optics, optical measurement techniques, microelectromechanical systems, and dynamic-system behavior. He is member of IEEE, SPIE, Verein Deutscher Ingenieure VDI, and the Deutsche Physikalische Gesellschaft DPG. He serves as an Editor of IEEE JMEMS since 2012 and is in the scientific committees of several international conferences in the field of optical measurement techniques. In 1999 he awarded one half of Research Award for Applied Sciences (Landesforschungspreis) of the state Baden-Württemberg, Germany.
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Antonio Ricco- Senior Editor
Chief Technologist, Small Spacecraft Payloads & Technologies
NASA Ames Research Center, on leave from Stanford UniversityP.O. Box 1
Moffett Field, CA 94035
USAPhone 1:
+1 650 604 4276Email 1:
ajricco@alum.mit.eduResearch Areas: Integrated microsystems, fluidics, biomedical diagnostics, bio/chemical sensors
Professional Memberships: American Chemical Society, Electrochemical Society, IEEE
Biography: Tony Ricco received BS and PhD degrees in Chemistry from UC Berkeley (1980) and MIT (1984), respectively. In Sandia National Laboratories' Microsensor R&D Department (1984 - 1998), he developed chemical microsensors and integrated microsystems. He was guest professor at the University of Heidelberg (winter 1996/97). From 1999 - 2003, he was ACLARA BioSciences' Director of Microtechnologies and Materials, developing consumable plastic microfluidic systems for genetic analysis, high-throughput pharmaceutical discovery, proteomics, and pathogen detection. He directed Stanford's National Center for Space Biological Technologies from 2004 - 2007; since 2007, he has served as NASA Ames Research Center's Chief Technologist for Small Spacecraft Payloads and Technologies while on leave from Stanford University. Beginning in 2003, he has participated in the founding, development, and projects of the Biomedical Diagnostics Institute (Dublin City University) as Adjunct Professor. Dr. Ricco is co-author of over 350 presentations, 200 publications, and 15 patents. He is a Fellow of The Electrochemical Society, former president of its Sensor Division, and currently Vice President of the Transducer Research Foundation. He served on the Editorial Advisory Board of Analytical Chemistry and is an Associate Editor of Sensors & Actuators B: Chemical as well as the Journal of Translational Engineering in Health and Medicine.
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Ashwin Seshia
Reader in Microsystems Technology
University of CambridgeNanoscience Centre
11 JJ Thomson Avenue
Cambridge CB3 0FF
United KingdomPhone 1:
+44-1223-760333Fax:
+44-1223-760309Email 1:
aas41@cam.ac.ukProfessional Membership: IEEE
Biography: Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Science from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008. During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Ashwin's research explores structural dynamics and physical acoustics at the MEMS-scale with specific contributions in the areas of sensors and sensor systems, transducers and interfaces, vibrational energy harvesting and micromechanical resonators and oscillators. He was appointed a Fellow of the ERA Foundation in 2008 and received the Royal Society Brian Mercer Feasibility Award in 2010. He serves as Editor for the IEEE/ASME Journal of Micro-Electro-Mechanical Systems and as Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
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Olav Solgaard
Professor
Stanford University342 Via Pueblo
Stanford, CA 94305
USAPhone 1:
+1 650 224 7177Email 1:
solgaard@stanford.eduResearch Areas: Nanophotonics, fiber sensors, microscopy, nanofabrication
Professional Memberships: OSA, IEEE
Biography: Olav Solgaard earned his Ph.D. degree from Stanford University in 1992. His doctoral dissertation: "Integrated Semiconductor Light Modulators for Fiber-optic and Display Applications" was the basis for the establishment of a Silicon Valley firm Silicon Light Machines (SLM), co-founded by Dr. Solgaard in 1994. From 1992 to 1995 he carried out research on optical MEMS as a Postdoctoral Fellow at the University of California, Berkeley, and in 1995, he joined the Electrical Engineering faculty of the University of California, Davis. His work at UC Davis led to the invention of the multi-wavelength, fiber-optical switch, which has been developed into commercial products by several companies. In 1999 he joined Stanford University where he is now Professor of Electrical Engineering and the Director of the Edward L. Ginzton Laboratory. Professor Solgaard's research interests include Optical MEMS, Photonic Crystals, Atomic Force Microscopy, and solar energy conversion. He has authored more than 300 technical publications and holds 50 patents. Professor Solgaard is a Fellow of the Optical Society of America, the Royal Norwegian Society of Sciences and Letters, and the Norwegian Academy of Technological Sciences.
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Leland "Chip" Spangler
President
Aspen MicrosystemsEmail 1:
chip@aspenmicrosystems.comResearch Areas: MEMS packaging and assembly, materials, testing
Professional Memberships: IEEE
Biography: Dr. Spangler received his Ph.D. in electrical engineering from The University of Michigan in 1988. He is currently President of Advanced Microsystems a company that provides engineering services for advanced microelectronic devices, with specialties in package and assembly technologies.
Previously Chip was the President and CTO of Aspen Technologies, a microelectronic package and assembly service supplier. He was responsible for developing package solutions for extremely high-pixel count displays, DNA analysis products and MEMS telecom switch arrays, pressure and inertial sensors as well as a variety of other MEMS devices. Before this, Chip worked at Ford Microelectronics where he had responsibility for pressure sensors, and airbag and chassis accelerometers. His work lead directly to the production of the world's first plastic surface mount airbag accelerometer.
Dr. Spangler is the author of over 30 technical publications and has 10 patents. He is currently an editor for IEEE JMEMS and has helped organize Hilton Head, Transducers, SPIE, MEMS and other technical conferences.
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Mark Spearing
Professor
University of SouthamptonHighfield
Southampton, Hampshire SO17 1BJ
United KingdomPhone 1:
+44 23 8059 9526Email 1:
spearing@soton.ac.ukResearch Areas: Materials and processes for microsystems
Professional Memberships: ASME, AIAA, MRS
Biography: Prof. S. Mark Spearing is Pro Vice-Chancellor (International) at the University of Southampton, UK. His portfolio includes international relationships in research and education, internationalisation of the curriculum and the campus, and the recruitment of international students. Previously Professor Spearing was Head of School and Professor of Engineering Materials in the School of Engineering Sciences at the University of Southampton. From 1994-2004, he was a Professor of Aeronautics and Astronautics at the Massachusetts Institute of Technology. At MIT he was Head of the Materials and Structures Division and Director of the Technology Laboratory for Advanced Composites. His technical interests include structural composites and Microelectromechanical Systems. Spearing is a past chairman of the AIAA Materials Technical Committee, and he is an Associate Fellow of AIAA, a member of the American Society of Mechanical Engineers and of the Materials Research Society. In addition to his role as an editor of the ASME/IEEE Journal of Microelectromechanical Systems he was a deputy editor of Acta Materialia from 1996-2003 and is the European Editor of The Journal of Composite Materials. He has published over 170 technical publications, including 105 in refereed journals.
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Göran Stemme
Professor
KTH Royal Institute of Technology, Micro and NanosystemsOsquldas vag 10
Stockholm SE-100 44
SwedenPhone 1:
+46(0)87907787Email 1:
stemme@ee.kth.seResearch Areas: Micro and nano device and system technology including sensors, actuators, fabrication techniques, device integration, wafer-level packaging, microfluidics, micro-optics. Specific focus on biomedical applications.
Professional Memberships: IEEE EDS
Biography: Goran Stemme received his M.Sc. degree in electrical engineering in 1981 and the Ph. D. degree in solid state electronics in 1987, both from the Chalmers University of Technology, Gothenburg, Sweden. In 1981, he joined the Department of Solid State Electronics, Chalmers University of Technology. There, in 1990, he became an associate professor (docent) heading the silicon sensor research group. In 1991, he was appointed professor at The Royal Institute of Technology, Stockholm, where he is currently the head of the department of Micro and Nanosystems at the School of Electrical Engineering. He is a member of the International Steering Committee of the Conference series TRANSDUCERS. Between 1995 and 2001 he was a member of the International Steering Committee of the Conference series IEEE Microelectromechanical Systems (MEMS) and he was General Co-Chair of that conference in 1998. Prof. Stemme is Senior Editor and member of the Steering Committee the IEEE/ASME "Journal of Microelectromechnical Systems". Prof. Stemme is a member of the Royal Swedish Academy of Sciences (KVA) and he is an IEEE Fellow.
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Osamu Tabata
Professor
Kyoto UniversityYoshida-Honmachi, Sakyo-ku
Kyoto 808-6501
JapanPhone 1:
+81-75-753-4704Fax:
+81-75-753-4704Email 1:
tabata@me.kyoto-u.ac.jpResearch Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties
Professional Memberships: IEEE
Biography: Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981. In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.
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Man Wong- Senior Editor
Professor
The Hong Kong University of Science and TechnologyEmail 1:
milc@ieee.orgResearch Areas: Fabrication technology and physical MEMS devices
Professional Memberships: IEEE, SID
Biography: Man Wong was born in Beijing, China. From 1979 to 1984, he studied at the Massachusetts Institute of Technology, USA, where he obtained his BS and MS degrees in Electrical Engineering. From 1985 to 1988, he was at the Center for Integrated Systems at Stanford University, USA, where he worked on tungsten-gate MOS technology and obtained his PhD degree, also in Electrical Engineering. From 1988 to 1992, he was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and development of integrated-circuit metallization systems and dry/vapor surface-conditioning processes. He is currently with the Department of Electronic and Computer Engineering at the Hong Kong University of Science and Technology, Hong Kong. His research interests include micro-fabrication technology, device structure and material; physics and technology of thin-film transistor; organic light-emitting diode display technology; modeling and implementation of integrated micro-systems; and thin-film solar cell device and process technology. He is a member of Tau Beta Pi, Eta Kappa Nu and Sigma Xi. He was appointed an Honorary Guest Professor of Nankai University, Tianjin, China, in 2003 and a Visiting Professor of Soochow University, Suzhou, China, in 2011.
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J. Andrew Yeh
Professor
National Tsing Hua UniverstiyNo. 101, Section 2, Kuang-Fu Road
Hsinchu 30013
TaiwanPhone 1:
+886 3 5742912Fax:
+886 3 5745454Email 1:
jayeh@pme.nthu.edu.twResearch Areas: Optofluidics Microsystem, Breath Biosensors, Nanostructures in Bulk
Professional Memberships: IEEE (1996 - present) / ASME (1995 - present)
Biography: J. Andrew Yeh joined National Tsing Hua University in Taiwan in 2001 and is a Professor at the Institute of NanoEngineering and Microsystems (iNEMS). He also serves as the Director General in Instrument Technology Research Center (ITRC) located in Hsinchu Science Park, Taiwan.
In 1992, he earned his B.S. degree in Mechanical Engineering from National Taiwan University, Taiwan, and Master degrees in Mechanical Engineering and in Electrical Engineering from Cornell University, USA, in 1996 and 1997, respectively. His Ph.D. degree in Electrical Engineering was received from Cornell University in 1999. He co-founded AIP Networks, Inc. in 2000. Dr. Yeh serves as an editorial board member of IEEE/ASME Journal of MicroElectroMechanical Systems (JMEMS) since 2010 and as the Chair of Taiwan Section at American Society of Mechanical Engineers (ASME Taiwan) since 2011. In March, 2013, he was elected to be the Chair of IEEE Instrument and Measurement Society, Taipei Chapter. He holds more than 70 patents and publishes over 70 journal papers. His current research interests include Optofluidics Microsystem, Breath Biosensors, and Nanostructures in Bulk. -
Hans Zappe- Senior Editor
Gisela and Erwin Sick Professor of Micro-optics
Department of Microsystems Engineering, University of FreiburgGeorges-Kohler-Allee 102
Freiburg 79110
GermanyPhone 1:
+49 761 203 7560Fax:
+49 761 203 7562Email 1:
zappe@imtek.uni-freiburg.deResearch Areas: Optical microsystems, tunable micro-optics, medical micro-optics, printable micro-optics
Professional Memberships: IEEE Photonics Society, SPIE, OSA
Biography: Hans Zappe is the Gisela and Erwin Sick Professor of Micro-optics in the Department of Microsystems Engineering at the University of Freiburg, Germany. Born in France and raised in New York, he earned his Bachelor's and Master's degrees at MIT and his PhD from the University of California, Berkeley, all in Electrical Engineering. After pursuing research activities in electronics, integrated optics and semiconductor lasers at IBM, the Fraunhofer Institute for Applied Solid State Physics and the Centre Suisse d'Electronique et de Microtechnique, he joined the University of Freiburg in 2000, where he was Dean of Engineering from 2008 to 2010. His current research interests focus on tunable micro-optics, optical micro-systems for medical applications and printable micro-optics.
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John X.J. Zhang
Associate Professor
The University of Texas at AustinBME 5.202-O, 1 University Station
Austin, TX 78712
USAPhone 1:
5123515900Fax:
5122324275Email 1:
john.zhang@engr.utexas.eduResearch Areas: Bio-inspired nanomaterials, MEMS lab-on-chip design, and advanced nanofabrication technologies for probing complex biological networks critical to human development and diseases such as cancer; and multi-scale modeling of fundamental force, flow, and energy processes in biological interactions.
Professional Memberships: AAAS, APS, ASEE, BMES, IEEE, MRS, OSA
Biography: Dr. Zhang is an Associate Professor at the University of Texas of Austin in the Department of Biomedical Engineering. His research focuses on exploring bio-inspired miniaturization technology and scale-dependent physical phenomena to develop new diagnostic devices and methods on probing complex cellular processes critical to disease development. His research and education accomplishment have been recognized by many prestigious awards, including the Wallace Coulter Foundation Early Career Award in Biomedical Engineering, NSF CAREER Award, and DARPA Young Faculty Award. Dr. Zhang was an invitee for the prestigious US National Academy of Engineering, Frontiers of Engineering program in 2011, and subsequently the NAE Frontiers of Engineering Education program in 2012. His group has published over 100 peer reviewed publications and filed more than 15 patents (3 patents received). He co-founded NanoLite Systems, Inc. for developing products designed to diagnose tissues and cell transformations at the point-of-care. His translational effort won the Medical Device Grant from National Instruments and was recognized as one of the MD+DI's (Medical Device and Diagnostic Industry) "40 Medtech Innovators Under 40." Dr. Zhang received his Ph.D. from Stanford University, and was a Research Scientist at Massachusetts Institute of Technology before joining the faculty at UT Austin.
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