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J-MEMS Editor-in-Chief and Editors

The first issue of IEEE/JMEMS appeared in March, 1992 and the Journal was published quarterly from 1992 to 2002 when it changed to a bimonthly format.

From 1992 to 1997, the JMEMS Editor-in-Chief was Dr. William Trimmer; from 1997 to 2012 Professor Richard S. Muller of the University of California, Berkeley was the Editor-in-Chief.  Christofer Hierold, Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich, became the EIC in October of 2012.

The JMEMS Editorial Board plays a key role in assuring the archival quality of published papers. One of the Editorial Board members is responsible for the review process of each paper and that Editor is identified in a footnote on the first page of each accepted paper. Those members of the Editorial Board, who are designated as Senior Editor, are sometimes assigned the responsibilities of Editor-in-Chief for selected submitted papers to JMEMS.

J-MEMS Editorial Board

    • J-MEMS Editors

      • Dong-il (Dan) Cho
         - PhD
        Dong-il (Dan) Cho portrait
        Department of Electrical and Computer Engineering
        Seoul National University
        Building 133
        Room 408
        Gwanak-Ro 1
        Gwanak-Gu, SeoulKorea
        Phone 1:
        +82-2-880-6488

        Research Areas:
        MEMS/NEMS Fabrication Processes
        MEMS and Controls Applications to Biomedical and Robotics Technologies


        Professional Memberships: IEEE (EDS, RAS, IES), IFAC


        Biography: Dong-Il (Dan) Cho received the B. S. degree from the Carnegie Mellon University in 1980 and the M. S. and Ph. D. degrees from the Massachusetts Institute of Technology (MIT). In 1987, he joined the Mechanical and Aerospace Engineering Department at Princeton University as an Assistant Professor. Since 1993, he has been with the Department of Electrical and Computer Engineering at Seoul National University.


        His research interests are in MEMS and control technologies. He has served as the editor of IEEE/ASME Journal of MEMS since its first issue published in 1992, and was appointed as the Senior Editor of the journal in 2012. In addition, he served as the President of the MEMS Research Association of Korea from 2003 to 2007. In addition, he currently serves as the Vice-Chair of the Technical Board of IFAC (International Federation of Automatic Control). Professor Cho is a Senior Member of the National Academy of Engineering of Korea (NAEK).

      • Don DeVoe
        Don DeVoe portrait
        Professor
        University of Maryland
        3139 Glenn L Martin Hall
        College Park, MD 20742
        USA
        Phone 1:
        301-405-8125

        Fax:
        301-314-9477
        Email 1:
        ddev@umd.edu

        Research Areas: Microfluidic systems for bioanalysis; Piezoelectric MEMS


        Professional Memberships: IEEE, ACS


        Biography: Don L. DeVoe is a Professor of Mechanical Engineering at the University of Maryland, College Park. He received his Ph.D. degree in Mechanical Engineering in 1997 from the University of California, Berkeley, with a focus in piezoelectric microsystems. He is a recipient of the Presidential Early Career Award for Scientists and Engineers from the National Science Foundation for advances in microsystems technology, and is a Kavli Fellow of the National Academy of Sciences.

      • David Elata
        David Elata portrait
        Professor
        Technion - Israel Institute of Technology
        Haifa 32000
        Israel
        Phone 1:
        +972 4 829 3184

        Research Areas: Electrostatic micro-actuators: e.g. micromirrors and switches. Electrostatic resonators: e.g. electrostatic and electret transducers that are perfectly linear or that have a tailored nonlinear response. Modeling of micro-scale transducers: theoretical investigation and derivation of design rules for: electrostatic, piezoelectric, thermoelastic and electromagnetic transduction.


        Professional Memberships: IEEE


        Biography: David Elata is a Professor at the Faculty of Mechanical Engineering of the Technion - Israel Institute of Technology. He is the head of the MEMS laboratory and a member of the Technion Russell Berrie Nanotechnology Institute. He earned a D.Sc. from the Technion in 1993, and has previously worked in the fields of Computational Mechanics, Geophysics, and Continuum Mechanics. His current research interests are in modeling and design of micro actuators and development of test devices for material and structure characterization at the micro-scale.

      • Hiroyuki Fujita
      • Reza Ghodssi
        Reza Ghodssi portrait
        Professor
        Department of Electrical and Computer Engineering and the Institute for Systems Research
        A.V. Williams Building
        Rm 2173
        College Park, MD 20742
        USA
        Phone 1:
        (301) 405-8158

        Fax:
        (301) 314-9920

        Research Areas: Integrated Micro, Nano and Bio Systems, Chemical and Biological Sensing, Small-scale Energy Storage, Harvesting and Conversion


        Professional Memberships: IEEE, MRS, AVS, ASEE, AAAS


        Biography: Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR), and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.


        Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano/bio devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. Dr. Ghodssi was chair of the NSF Workshop on Micro, Nano, Bio Systems in 2012 and the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009). He also served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011, and 2012 conferences. Dr. Ghodssi has over 95 refereed journal publications and is the co-editor of the "MEMS Materials and Processes Handbook" published in 2011.

      • Andrew Holmes
        Andrew Holmes portrait
        Professor
        Imperial College London, EEE Department
        Exhibiton Road
        London SW7 2AZ
        UK
        Phone 1:
        +44 20 7594 6239

        Fax:
        +44 20 7594 6308

        Research Areas:  Physical MEMS, energy harvesting, laser materials processing, wireless sensors


        Professional Memberships:  IEEE, IET


        Biography:  Andrew Holmes received the BA degree in natural sciences from Cambridge University in 1987, and the PhD degree in electrical engineering from Imperial College London in 1992. He is currently Professor of Micro-Electro-Mechanical Systems (MEMS) in the Department of Electrical and Electronic Engineering, Imperial College London. He has worked on a range of topics in optical signal processing, integrated optics and MEMS, and has published around 150 journal and conference papers in these areas. His current research interests include applications of laser processing in MEMS manufacturing, novel assembly technologies for MEMS and electronics, micro-power generation by energy harvesting, power conditioning electronics for energy harvesters and ultra-low power radio for wireless sensors. He is a co-founder and director of Microsaic Systems plc, an Imperial College spin-out company started in 2001 to exploit Imperial College MEMS research.

      • Roger Howe
        Roger Howe portrait
        William E. Ayer Professor
        Stanford University
        Paul G. Allen Building
        Room 114
        Stanford, CA 94305-4070
        USA
        Phone 1:
        1-650-723-8030

        Research Areas: N/MEMS fabrication technology and applications in resonators, actuators, inertial navigation, energy conversion, and biosensing.


        Professional Memberships: IEEE


        Biography: Roger T. Howe has been a Professor at Stanford University since 2005, after having held faculty positions at Berkeley, MIT, and CMU, where his group is researching N/MEMS applications in thermionic energy conversion and biomolecular sensing. In 2004, he co-founded Silicon Clocks, which was acquired by Silicon Laboratories in 2010. He served as Co-Chair of IEEE MEMS 1990 in Napa, California and as Technical Chair of Transducers 2003 in Boston, Massachusetts. He is an IEEE Fellow and a member of the U.S. National Academy of Engineering. Since 2011, he is the Director of the National Nanotechnology Infrastructure Network (NNIN).

      • Hongrui Jiang
        Hongrui Jiang portrait
        Vilas Distinguished Achievement Professor
        University of Wisconsin - Madison
        3440 Engineering Hall
        1415 Engineering Drive
        Madison, Wisconsin 53706
        USA
        Phone 1:
        1-608-265-9418

        Fax:
        1-608-262-1267

        Research Areas: Microfabrication technology, biological and chemical microsensors, microactuators, optical microelectromechanical systems, smart materials and micro-/nanostructures, lab on a chip, and biomimetics and bioinspiration.


        Professional Memberships: IEEE, OSA


        Biography: Hongrui Jiang is the Vilas Distinguished Achievement Professor in the Department of Electrical and Computer Engineering at the University of Wisconsin - Madison. He is also a Faculty Affiliate in the Department of Biomedical Engineering, a Faculty Member of the Materials Science Program, and a Member of the McPherson Eye Research Institute at UW-Madison. He received the B.S. degree in physics from Peking University, Beijing, China, and the M.S. and Ph.D. degrees in electrical engineering in 1999 and 2001, respectively, from Cornell University, Ithaca, NY. From 2001 to 2002, he was a Postdoctoral Researcher with the Berkeley Sensor and Actuator Center, University of California at Berkeley. Dr. Jiang was the recipient of the National Science Foundation CAREER Award and the Defense Advanced Research Projects Agency Young Faculty Award in 2008, the H. I. Romnes Faculty Fellowship of the University of Wisconsin in 2011, the NIH Director's New Innovator Award in 2011, and the Vilas Associate Award of the University of Wisconsin in 2013. Dr. Jiang has published over 100 peer reviewed publications and holds 6 issued US patents.

      • Liwei Lin
        Liwei Lin portrait
        Professor
        UC Berkeley
        621E Sutardja Dai Hall
        Berkeley, CA 94720-1740
        USA
        Phone 1:
        510-643-5495

        Fax:
        510-643-5599

        Research Areas: MEMS (Microelectromechanical Systems); NEMS (Nanoelectromechanical Systems); Nanotechnology; design and manufacturing of microsensors and microactuators; development of micromachining processes by silicon surface/bulk micromachining; micro moulding process; mechanical issues in microelectromechanical systems (MEMS) including heat transfer, solid/fluid mechanics and dynamics


        Professional Memberships: IEEE, ASME


        Biography: Liwei Lin joined UC-Berkeley in 1999 and is now Professor at the Mechanical Engineering Department and co-Director at the Berkeley Sensor and Actuator Center.  He received his PhD degree in Mechanical Engineering from the University of California at Berkeley in 1993.  His research interests are in design, modeling and fabrication of micro/nano structures, micro/nano sensors and micro/nano actuators as well as mechanical issues in micro/nano systems including heat transfer, solid/fluid mechanics and dynamics.  Dr. Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation.  He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004~2005.  He is an ASME Fellow and has 15 issued US patents in the area of MEMS/NEMS.  He served as the general co-chair of the 24th international conference on Micro Electro Mechanical Systems.  Currently, he serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators -A Physical.

      • Roya Maboudian
        Roya Maboudian portrait
        Professor
        University of California at Berkeley
        Department of Chemical & Biomolecular Engineering
        Berkeley, CA 94720
        USA
        Phone 1:
        510-643-7957

        Fax:
        510-642-4778

        Research Areas: surface and materials science and engineering of micro-/nanosystems


        Professional Memberships: IEEE, MRS, APS, ECS, ACS, AICHE


        Biography: Roya Maboudian is professor of chemical engineering, associate director of the Center of Integrated Nanomechanical Systems (COINS), and faculty affiliate of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, DC; and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena.   Prof. Maboudian's research interest is in the surface and materials science and engineering of micro/nanosystems. The main research activities in her group currently include investigation of the tribological issues in micro/nanoelectromechanical systems; silicon carbide-based sensors for harsh environment applications; nanowire and graphene based sensors and energy technologies; development of electrochemical processes for low-cost thin-film photovoltaics; and biologically inspired materials design.  Prof. Maboudian has coauthored over 220 papers in peer-reviewed archival journals.  She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems, as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS, and as advisory board member to ACS Applied Materials and Interfaces.

      • Carlos Mastrangelo
      • Sabina Merlo
         - Professor
        Sabina Merlo portrait
        Dipartimento di Ingegneria Industriale e dell'Informazione
        University of Pavia
        Via Ferrata 1
        Pavia 27100
        Italy
        Phone 1:
        +390382985202

        Fax:
        +390382422583

        Research Areas: Optical MEMS, Optical methods for MEMS testing, Optical Biosensors, Optofluidics, Photonic crystals, Interferometry, Fiberoptic sensors and components


        Professional Memberships: IEEE/LEOS


        Biography: Sabina Merlo received the Ph.D. degree in Electronic Engineering in 1992 from University of Pavia, Italy, and the MSE in Bioengineering in 1989 from the University of Washington, Seattle, USA, with a Rotary Foundation Scholarship. Assistant Professor at University of Pavia since 1993, she is Associate Professor of Electronics within Dipartimento di Ingegneria Industriale e dell Informazione of the same University since 2001.


        She has carried on scientific researches in the field of optoelectronics, in collaboration with Italian and foreign Universities and companies, with regard to the study, design and characterization of new components and measuring systems, relative to telecom, biomedical and industrial applications. She has given innovative contributions in the following fields: Silicon micromachined devices, MEMS, Micromirrors, Photonic crystals for optofluidics and biosensing; Feedback interferometry; Fiber optic  sensors and components; Optical cryptography and chaotic phenomena in laser oscillators; Noise limits in optoelectronic systems. She has been involved, as team member or  project manager, in researches funded by EU (OCCULT and PICASSO), Italian Ministry of Education, private Foundations and companies. She is co-author of 4 patents and 100 journal/conference papers and book chapters.


        She is a Senior member of IEEE/LEOS and an associate editor of JMEMS, since 2006.
      • Clark Nguyen
        Clark Nguyen portrait
        Professor
        University of California at Berkeley
        574 Cory Hall
        Berkeley, CA 94611
        USA
        Phone 1:
        510-642-6251

        Research Areas: Integrated micromechanical signal processors and integrated sensors, merged circuit/micromechanical technologies, RF communications, integrated circuit design and technology, short- and long-term stability in micromechanical devices


        Professional Memberships: IEEE/EDS, IEEE/SSCS, IEEE/UFFC


        Biography: Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA. Prof. Nguyen is a Fellow of the IEEE and presently serves as the Vice President for Frequency Control in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society.

      • Gianluca Piazza
        Gianluca Piazza portrait
        Associate Professor
        Carnegie Mellon University
        5000 Forbes Avenue
        Pittsburgh, PA 15213
        USA
        Phone 1:
        412-268-7762

        Research Areas:  Piezoelectric MEMS and NEMS. MEMS Resonators, Oscillators and Filters. NEMS for information storage and processing. MEMS Resonant Sensors


        Professional Membership:  IEEE


        Biography:  Gianluca Piazza is an Associate Professor in the Department of Electrical and Computer Engineering at Carnegie Mellon University. He also holds a secondary appointment in Mechanical Engineering. Prior to joining CMU he was the Wilf Family Term Assistant Professor in the department of Electrical and Systems Engineering at the University of Pennsylvania.  His research interests focus on piezoelectric micro and nano electromechanicalsystems (M/NEMS) for RF wireless communication, chemical/biological detection, and all mechanical computing.  He also has a general interest in the areas of micro/nano fabrication techniques and integration of micro/nano devices with state-of-the-art electronics.  He received his Ph.D. degree from the University of California, Berkeley in 2005. He has more than 10 years of experience working with piezoelectric materials and devices.  He holds several patents in the field of micromechanical resonators some of which have been successfully acquired by industry. He received the IBM Young Faculty Award in 2006 and has won, with his students, the Best Paper Award at the IEEE Frequency Control Symposium in 2008, 2009, 2011 and 2013, and at the IEEE Ultrasonic Symposium in 2012.

      • Christian Rembe
         - Dr.
        Christian Rembe portrait
        ​Technical University of Clausthal
        Germany

        Research Areas: optical metrology, MEMS-testing, laser-Doppler vibrometry


        Professional Memberships: IEEE, SPIE, DPG, VDI


        Biography: Christian Rembe received the diploma in Physics from the University of Hanover, Hanover, Germany, in 1994. From 1994 to 1999, he was a scientific assistant at the University of Ulm, Ulm, Germany where he earned a doctor degree in Engineering. 1999 he joined the Berkeley Sensor & Actuator Center at the University of California, Berkeley as postdoctoral, research engineer with support of a Feodor-Lynen-Scholarship of the Alexander von Humboldt-Foundation and a UC Berkeley MacKay-Lecturer Fellowship. Since 2001 he is working as Manager Development Optics at Polytec GmbH, Waldbronn, Germany. His interests are optics, optical measurement techniques, microelectromechanical systems, and dynamic-system behavior. He is member of IEEE, SPIE, Verein Deutscher Ingenieure VDI, and the Deutsche Physikalische Gesellschaft DPG. He serves as an Editor of IEEE JMEMS since 2012 and is in the scientific committees of several international conferences in the field of optical measurement techniques. In 1999 he awarded one half of Research Award for Applied Sciences (Landesforschungspreis) of the state Baden-Württemberg, Germany.

      • Antonio Ricco
         - Senior Editor
        Antonio Ricco portrait
        Chief Technologist, Small Spacecraft Payloads and Technologies
        NASA Ames Research Center, on leave from Stanford University
        P.O. Box 1
        Moffett Field, CA 94035
        USA
        Phone 1:
        +1 650 604 4276

        Research Areas: Integrated microsystems, fluidics, biomedical diagnostics, bio/chemical sensors


        Professional Memberships: American Chemical Society, Electrochemical Society, IEEE


        Biography: Tony Ricco received BS and PhD degrees in Chemistry from UC Berkeley (1980) and MIT (1984), respectively. In Sandia National Laboratories' Microsensor R&D Department (1984 - 1998), he developed chemical microsensors and integrated microsystems. He was guest professor at the University of Heidelberg (winter 1996/97). From 1999 - 2003, he was ACLARA BioSciences' Director of Microtechnologies and Materials, developing consumable plastic microfluidic systems for genetic analysis, high-throughput pharmaceutical discovery, proteomics, and pathogen detection. He directed Stanford's National Center for Space Biological Technologies from 2004 - 2007; since 2007, he has served as NASA Ames Research Center's Chief Technologist for Small Spacecraft Payloads and Technologies while on leave from Stanford University. Beginning in 2003, he has participated in the founding, development, and projects of the Biomedical Diagnostics Institute (Dublin City University) as Adjunct Professor. Dr. Ricco is co-author of over 350 presentations, 200 publications, and 15 patents. He is a Fellow of The Electrochemical Society, former president of its Sensor Division, and currently Vice President of the Transducer Research Foundation. He served on the Editorial Advisory Board of Analytical Chemistry and is an Associate Editor of Sensors & Actuators B: Chemical as well as the Journal of Translational Engineering in Health and Medicine.

      • Pasqualina Sarro
         - Prof. Dr.
        Pasqualina Sarro portrait
        Delft University of Technology
        Feldmanweg 17
        Delft 2628 CT
        The Netherlands
        Phone 1:
        0031152787708

        Fax:
        00312787369

        Research Areas:  
        - novel materials and structures for MEMS and NEMS to be applied in health, environmental applications, automotive and scientific instrumentation
        - 3D micro and nano-structuring; 3D integration schemes, including 3D interconnects


        Professional Membership:  IEEE/EDS


        Biography:  Lina Sarro is Professor of Microsystems Technology at the Delft University of Technology. Since 2009 she is also Head of the Microelectronics Department. She received the Laurea degree (cum laude) in solid-states physics from the University of Naples, Italy, in 1980. From 1981 to 1983, she was a post-doctoral fellow in the Photovoltaic Research Group of the Division of Engineering, Brown University, Rhode Island, U.S.A. In 1987, she received the Ph.D. degree in Electrical Engineering at the Delft University of Technology, the Netherlands. Since then, she has been with the Delft Institute of Microsystems and Nanoelectronics (DIMES), where she has been performing and supervising research in the field of integrated silicon sensors and MEMS technology. She has (co)-authored more than 500 publications. She is a member of the technical program committee and steering committee for several international conferences (IEEE MEMS, IEEE Sensors, Eurosensors, Transducers); Technical Program (co) chair for the IEEE Sensors 2002-2004 Conference General co-chair of IEEE MEMS 2009. Prof. Sarro is a member of the KNAW (Royal Netherlands Academy of Sciences) and an IEEE Fellow.


        Other Website: http://ectm.et.tudelft.nl

      • Ashwin Seshia
        Ashwin Seshia portrait
        Reader in Microsystems Technology
        University of Cambridge
        Nanoscience Centre
        11 JJ Thomson Avenue
        Cambridge CB3 0FF
        United Kingdom
        Phone 1:
        +44-1223-760333

        Fax:
        +44-1223-760309

        Professional Membership: IEEE 


        Biography: Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Science from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008.  During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Ashwin's research explores structural dynamics and physical acoustics at the MEMS-scale with specific contributions in the areas of sensors and sensor systems, transducers and interfaces, vibrational energy harvesting and micromechanical resonators and oscillators. He was appointed a Fellow of the ERA Foundation in 2008 and received the Royal Society Brian Mercer Feasibility Award in 2010. He serves as Editor for the IEEE/ASME Journal of Micro-Electro-Mechanical Systems and as Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

      • Olav Solgaard
        Olav Solgaard portrait
        Professor
        Stanford University
        342 Via Pueblo
        Stanford, CA 94305
        USA
        Phone 1:
        +1 650 224 7177

        Research Areas: Nanophotonics, fiber sensors, microscopy, nanofabrication 


        Professional Memberships: OSA, IEEE


        Biography: Olav Solgaard earned his Ph.D. degree from Stanford University in 1992. His doctoral dissertation: "Integrated Semiconductor Light Modulators for Fiber-optic and Display Applications" was the basis for the establishment of a Silicon Valley firm Silicon Light Machines (SLM), co-founded by Dr. Solgaard in 1994.  From 1992 to 1995 he carried out research on optical MEMS as a Postdoctoral Fellow at the University of California, Berkeley, and in 1995, he joined the Electrical Engineering faculty of the University of California, Davis.  His work at UC Davis led to the invention of the multi-wavelength, fiber-optical switch, which has been developed into commercial products by several companies.  In 1999 he joined Stanford University where he is now Professor of Electrical Engineering and the Director of the Edward L. Ginzton Laboratory.  Professor Solgaard's research interests include Optical MEMS, Photonic Crystals, Atomic Force Microscopy, and solar energy conversion.  He has authored more than 300 technical publications and holds 50 patents.  Professor Solgaard is a Fellow of the Optical Society of America, the Royal Norwegian Society of Sciences and Letters, and the Norwegian Academy of Technological Sciences.

      • Leland (Chip) Spangler
        Leland (Chip) Spangler portrait
        President
        Aspen Microsystems

        Research Areas: MEMS packaging and assembly, materials, testing


        Professional Memberships: IEEE


        Biography: Dr. Spangler received his Ph.D. in electrical engineering from The University of Michigan in 1988. He is currently President of Advanced Microsystems a company that provides engineering services for advanced microelectronic devices, with specialties in package and assembly technologies.


        Previously Chip was the President and CTO of Aspen Technologies, a microelectronic package and assembly service supplier. He was responsible for developing package solutions for extremely high-pixel count displays, DNA analysis products and MEMS telecom switch arrays, pressure and inertial sensors as well as a variety of other MEMS devices. Before this, Chip worked at Ford Microelectronics where he had responsibility for pressure sensors, and airbag and chassis accelerometers. His work lead directly to the production of the world's first plastic surface mount airbag accelerometer.  


        Dr. Spangler is the author of over 30 technical publications and has 10 patents. He is currently an editor for IEEE JMEMS and has helped organize Hilton Head, Transducers, SPIE, MEMS and other technical conferences.

      • Mark Spearing
        Mark Spearing portrait
        Professor
        University of Southampton
        Highfield
        Southampton, Hampshire SO17 1BJ
        United Kingdom
        Phone 1:
        +44 23 8059 9526

        Research Areas: Materials and processes for microsystems


        Professional Memberships: ASME, AIAA, MRS


        Biography: Prof. S. Mark Spearing is Pro Vice-Chancellor (International) at the University of Southampton, UK. His portfolio includes international relationships in research and education, internationalisation of the curriculum and the campus, and the recruitment of international students. Previously Professor Spearing was Head of School and Professor of Engineering Materials in the School of Engineering Sciences at the University of Southampton. From 1994-2004, he was a Professor of Aeronautics and Astronautics at the Massachusetts Institute of Technology. At MIT he was Head of the Materials and Structures Division and Director of the Technology Laboratory for Advanced Composites. His technical interests include structural composites and Microelectromechanical Systems. Spearing is a past chairman of the AIAA Materials Technical Committee, and he is an Associate Fellow of AIAA, a member of the American Society of Mechanical Engineers and of the Materials Research Society. In addition to his role as an editor of the ASME/IEEE Journal of Microelectromechanical Systems he was a deputy editor of Acta Materialia from 1996-2003 and is the European Editor of The Journal of Composite Materials. He has published over 170 technical publications, including 105 in refereed journals.

      • Göran Stemme
        Göran Stemme portrait
        Professor
        KTH Royal Institute of Technology, Micro and Nanosystems
        Osquldas vag 10
        Stockholm SE-100 44
        Sweden
        Phone 1:
        +46(0)87907787

        Research Areas: Micro and nano device and system technology including sensors, actuators, fabrication techniques, device integration, wafer-level packaging, microfluidics, micro-optics. Specific focus on biomedical applications.


        Professional Memberships: IEEE EDS


        Biography: Goran Stemme received his M.Sc. degree in electrical engineering in 1981 and the Ph. D. degree in solid state electronics in 1987, both from the Chalmers University of Technology, Gothenburg, Sweden. In 1981, he joined the Department of Solid State Electronics, Chalmers University of Technology. There, in 1990, he became an associate professor (docent) heading the silicon sensor research group. In 1991, he was appointed professor at The Royal Institute of Technology, Stockholm, where he is currently the head of the department of  Micro and Nanosystems at the School of Electrical Engineering. He is a member of the International Steering Committee of the Conference series TRANSDUCERS. Between 1995 and 2001 he was a member of the International Steering Committee of the Conference series IEEE Microelectromechanical Systems (MEMS) and he was General Co-Chair of that conference in 1998. Prof. Stemme is Senior Editor and member of the Steering Committee the IEEE/ASME "Journal of Microelectromechnical Systems".  Prof. Stemme is a member of the Royal Swedish Academy of Sciences (KVA) and he is an IEEE Fellow.

      • Osamu Tabata
        Osamu Tabata portrait
        Kyoto University
        Nano/Micro Engineering Lab
        Department of Microengineering
        Kyotodaigaku-Katsura C3
        Nishikyo-ku
        Kyoto 615-8540
        Japan
        Phone 1:
        +81-75-383-3690

        Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties


        Professional Memberships: IEEE


        Biography: Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981.  In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.

      • Xiaohong Wang
        Xiaohong Wang portrait
        Professor
        Tsinghua University
        1 Qinghua Yuan, Haidian
        Beijing 100084
        China
        Phone 1:
        86-10-62798432

        Fax:
        86-10-62771130

        Research Areas: Power MEMS, MEMS Integration technologies and Materials


        Professional Membership: IEEE


        Biography: Xiaohong Wang is a professor in Tsinghua National Laboratory for Information Science and Technology, Institute of Miroelectronics, Tsinghua University in China. She got her Ph. D degree in Department of Precision Instruments and Mechanology, Tsinghua University in 1998. As a visiting scholar, she did the research on electrode materials of micro SOFC in Professor Prinz Fritz's group, at Stanford University from Nov. 2005 to Oct. 2006. She also had a short visiting research experience in Hong Kong University of Science and Technology and UCLA, on micro fuel cells and nano- photodetector devices in 2001 and 2007, respectively. 


        Her research is on the fields of MEMS/NEMS design, fabrication, materials, assembly, and integration technologies, especially on PowerMEMS, like micro DMFC, micro suppercapacitors, and energy harvesters recently. She has served as a TPC member in many international conferences, like IEEE-MEMS, Transducers, IEEE-NEMS, APCOT, and PowerMEMS. She was the Secretary-General of Transducers2011 conference, and will be the General Co-chair of IEEE MEMS 2016. She has been a reviewer for several journals, including Elsevier Journal of Power Sources, Electrochemistry Communications, Sensors and Actuators A: Physical, IOP J. Micromech. Microeng., IET Micro & Nano Letters, and etc.


         

      • Man Wong
         - Senior Editor
        Man Wong portrait
        Professor
        The Hong Kong University of Science and Technology

        Research Areas: Fabrication technology and physical MEMS devices


        Professional Memberships: IEEE, SID


        Biography: Man Wong was born in Beijing, China. From 1979 to 1984, he studied at the Massachusetts Institute of Technology, USA, where he obtained his BS and MS degrees in Electrical Engineering. From 1985 to 1988, he was at the Center for Integrated Systems at Stanford University, USA, where he worked on tungsten-gate MOS technology and obtained his PhD degree, also in Electrical Engineering. From 1988 to 1992, he was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and development of integrated-circuit metallization systems and dry/vapor surface-conditioning processes. He is currently with the Department of Electronic and Computer Engineering at the Hong Kong University of Science and Technology, Hong Kong. His research interests include micro-fabrication technology, device structure and material; physics and technology of thin-film transistor; organic light-emitting diode display technology; modeling and implementation of integrated micro-systems; and thin-film solar cell device and process technology. He is a member of Tau Beta Pi, Eta Kappa Nu and Sigma Xi. He was appointed an Honorary Guest Professor of Nankai University, Tianjin, China, in 2003 and a Visiting Professor of Soochow University, Suzhou, China, in 2011.

      • J. Andrew Yeh
        J. Andrew Yeh portrait
        Professor
        National Tsing Hua Universtiy
        No. 101, Section 2, Kuang-Fu Road
        Hsinchu 30013
        Taiwan
        Phone 1:
        +886 3 5742912

        Fax:
        +886 3 5745454

        Research Areas: Optofluidics Microsystem, Breath Biosensors, Nanostructures in Bulk


        Professional Memberships: IEEE (1996 - present) / ASME (1995 - present)


        Biography: J. Andrew Yeh joined National Tsing Hua University in Taiwan in 2001 and is a Professor at the Institute of NanoEngineering and Microsystems (iNEMS). He also serves as the Director General in Instrument Technology Research Center (ITRC) located in Hsinchu Science Park, Taiwan.

        In 1992, he earned his B.S. degree in Mechanical Engineering from National Taiwan University, Taiwan, and Master degrees in Mechanical Engineering and in Electrical Engineering from Cornell University, USA, in 1996 and 1997, respectively. His Ph.D. degree in Electrical Engineering was received from Cornell University in 1999. He co-founded AIP Networks, Inc. in 2000. Dr. Yeh serves as an editorial board member of IEEE/ASME Journal of MicroElectroMechanical Systems (JMEMS) since 2010 and as the Chair of Taiwan Section at American Society of Mechanical Engineers (ASME Taiwan) since 2011. In March, 2013, he was elected to be the Chair of IEEE Instrument and Measurement Society, Taipei Chapter. He holds more than 70 patents and publishes over 70 journal papers. His current research interests include Optofluidics Microsystem, Breath Biosensors, and Nanostructures in Bulk.

      • John X.J. Zhang
        John X.J. Zhang portrait
        ​Thayer School of Engineering at Dartmouth

        Research Areas: Bio-inspired nanomaterials, MEMS lab-on-chip design, and advanced nanofabrication technologies for probing complex biological networks critical to human development and diseases such as cancer; and multi-scale modeling of fundamental force, flow, and energy processes in biological interactions.


        Professional Memberships: AAAS, APS, ASEE, BMES, IEEE, MRS, OSA


        Biography: Dr. Zhang is an Associate Professor at the University of Texas of Austin in the Department of Biomedical Engineering. His research focuses on exploring bio-inspired miniaturization technology and scale-dependent physical phenomena to develop new diagnostic devices and methods on probing complex cellular processes critical to disease development. His research and education accomplishment have been recognized by many prestigious awards, including the Wallace Coulter Foundation Early Career Award in Biomedical Engineering, NSF CAREER Award, and DARPA Young Faculty Award. Dr. Zhang was an invitee for the prestigious US National Academy of Engineering, Frontiers of Engineering program in 2011, and subsequently the NAE Frontiers of Engineering Education program in 2012. His group has published over 100 peer reviewed publications and filed more than 15 patents (3 patents received). He co-founded NanoLite Systems, Inc. for developing products designed to diagnose tissues and cell transformations at the point-of-care. His translational effort won the Medical Device Grant from National Instruments and was recognized as one of the MD+DI's (Medical Device and Diagnostic Industry) "40 Medtech Innovators Under 40."  Dr. Zhang received his Ph.D. from Stanford University, and was a Research Scientist at Massachusetts Institute of Technology before joining the faculty at UT Austin.

     

    Hiroyuki Fujita

    Carlos H. Mastrangelo