J-MEMS Table of Contents
- Table of contents
- Journal of Microelectromechanical Systems publication information
- SputteredAnodized as the Dielectric Layer for Electrowetting-on-Dielectric
- A Flexible Paper-Based Microdischarge Array Device for Maskless Patterning on Nonflat Surfaces
- Effect of Galvanic Corrosion-Induced Roughness on Sidewall Adhesion in Polycrystalline Silicon Microelectromechanical Systems
- Crystallographic Effects on Energy Dissipation in High- Silicon Bulk-Mode Resonators
- Oven-Based Thermally Tunable Aluminum Nitride Microresonators
- Electronic Detection Strategies for a MEMS-Based Biosensor
- Design, Simulation, and Characterization of a Bimorph Varifocal Micromirror and Its Application in an Optical Imaging System
- Electrical Admittance Spectroscopy for Piezoelectric MEMS
- Bias Contributions in a MEMS Tuning Fork Gyroscope
- Sub-Torr Chip-Scale Sputter-Ion Pump Based on a Penning Cell Array Architecture
- Parametric Excitation, Amplification, and Tuning of MEMS Folded-Beam Comb Drive Oscillator
- Radio-Controlled Microactuator Based on Shape-Memory-Alloy Spiral-Coil Inductor
- Photopatterning of Thiol-ene-Acrylate Copolymers
- NiCr MEMS Tactile Sensors Embedded in Polyimide Toward Smart Skin
- A Single-Mask Process for 3-D Microstructure Fabrication in PDMS
- Interdigitated 3-D Silicon Ring Microelectrodes for DEP-Based Particle Manipulation
- Electroosmotic Augmentation in Flexural Plate Wave Micropumps
- Stress Relaxation Mechanism With a Ring-Shaped Beam for a Piezoresistive Three-Axis Accelerometer
- A Tunable Miniaturized RF MEMS Resonator With Simultaneous High (500735) and Fast Response Speed
- Nanowire Embedded Hydrogen Peroxide Monopropellant MEMS Thruster
- Comparison of the Stress Distribution and Fatigue Behavior of 10- and 25- -Thick Deep-Reactive-Ion-Etched Si Kilohertz Resonators
- Optomechanical Cavity With a Buckled Mirror
- Nondestructive Inspection of Buried Channels and Cavities in Silicon
- A Microfabricated Propofol Trap for Breath-Based Anesthesia Depth Monitoring
- Design, Fabrication, and Characterization of a 240 240 MEMS Uncooled Infrared Focal Plane Array With 42- Pitch Pixels
- Modular Optoelectronic Microfluidic Backplane for Fluid Analysis Systems
- Electrochemical Micromachining on Porous Nickel for Arrays of Electrospray Ion Emitters
- Large Stroke Electrostatic Comb-Drive Actuators Enabled by a Novel Flexure Mechanism
- Fundamental and Experimental Conditions for the Realization of Traveling-Wave-Induced Aerodynamic Propulsive Forces by Piezoelectrically Deformed Plastic Substrates
- cfp2013 Bipolar/BiCMOS circuits and technology meeting
- IEEE International SOI-3D subthreshold microelectronics technology unified conference
- CAS-international semiconductor conference
- 2013 IEEE International Electron Device Meeting
Last Updated on 25 September 2012