(Charles) Kin P. Cheung



100 Bureau Dr
MS 8120
Gaithersburg MD 20899



Dr. Kin P. Cheung, obtained Ph.D. degree in physical chemistry from the New York University in 1983. From 83 to 85 he was a post doc at Bell Laboratories during which he pioneered Terahertz Spectroscopy. From 1985 to 2001 he was a member of technical staff in Bell Laboratories at Murray Hill. From 2001 to 2006, He was an associate professor at Rutgers University. He is currently a project leader at the National Institute of Standards & Technology, Semiconductor Electronics Division. Dr. Cheung published over 140 refereed journal and conference papers. He authored a book on plasma charging damage, a book chapter and edited three conference proceedings. He served in the committee of a number of international conferences and has given tutorial in 10 international conferences. His area of interest is VLSI technology and devices.