Farrokh Ayazi

Solid State Sensors and Actuators

Georgia Tech
School of ECE
85 Fifth St NW Suite 448 Atlanta GA 30308
Phone: +1 404 894 9496
   Fax: +1 404 385 6650

Farrokh Ayazi is a professor in the School of Electrical and Computer Engineering and a Director of the Center for MEMS and Microsystems Technology (CMMT) at the Georgia Institute of Technology, Atlanta, GA. He received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. His research interests are in the areas of integrated micro- and nano-electromechanical resonators, inertial sensors, interface IC design for MEMS and sensors, and microfabrication techniques.


Prof. Ayazi is a 2004 recipient of the NSF CAREER Award, the 2004 Richard M. Bass Outstanding Teacher Award (determined by the vote of the ECE senior class), the ECE Outstanding Junior Faculty Member Award, and the Georgia Tech College of Engineering Cutting Edge Research Award for 2001‚Äď2002. He is an editor for the IEEE/ASME Journal of Microelectromechanical Systems.¬† He was the chairman of the Display, Sensors and MEMS (DSM) sub-committee at the IEEE International Electron Devices Meeting (IEDM 2011). He served on the technical program committee of the IEEE International Solid State Circuits Conference (ISSCC) for six years (2004-2009). He and his students won the best paper awards at Transducers 2011, the IEEE International Frequency Control Symposium in 2010, and IEEE Sensors conference in 2007. He will be the general co-chair of the IEEE Micro-Electro-Mechanical-Systems (MEMS) conference in 2014.


Dr. Ayazi is the Co-Founder and Chief Technology Officer (CTO) of Qualtré Inc., a spin-out from his research Laboratory that commercializes multi-axis bulk-acoustic-wave (BAW) silicon gyroscopes and multi-degrees-of-freedom inertial sensors for personal navigation systems.