Robert Bosch Micro and Nano Electro Mechanical Systems Award

Robert Bosch MEMS & NEMS Award Committee

robert bosch

Robert Bosch (1861-1942)
Inventor, Entrepreneur, Founder of Robert Bosch GmbH


The Robert Bosch Micro and Nano Electro Mechanical Systems Award was established by the IEEE Electron Devices Society in 2014 to recognize and honor advances in the invention, design, and/or fabrication of micro- or nano- electromechanical systems and/or devices. The contributions to be honored by this award should be innovative and useful for practical applications.

This award is sponsored by the IEEE Electron Devices Society with financial support from Robert Bosch LLC. It is intended that the award will be presented annually to an individual or to as many as three individuals whose achievements and contributions are judged to meet the selection criteria for the award. The award will be presented at an IEEE conference of the winner's choice. It is not necessary for the recipient(s) to be a member(s) of IEEE.  This award cannot be given to a candidate for the same work for which an IEEE technical field award or IEEE medal was previously received.

The recipient will receive a US$10,000 honorarium (which includes up to $3,000 of travel expenses for international travel and $1,500 of travel expenses for domestic travel), a bronze medal, and a certificate. In the event that more than one awardee is selected, the cash honorarium will be equally divided among the recipients. Each recipient will receive a bronze medal and a certificate.

Nominations should be made using our online nomination form and submitted before midnight (EST) on October 2 to the EDS Executive Office. Letters of recommendation must be sent directly to according to the same schedule.

Congratulations to Clark Nguyen

2017 Robert Bosch Micro and Nano Electro Mechanical Systems Award Winner


Robert Bosch Micro and Nano Electro Mechanical Systems Award Winners
Clark Nguyen

University of California, Berkeley
Berkeley, CA, USA

For pioneering research on high-frequency MEMS vibrating systems and for extraordinary efforts in support of MEMS in industry, government, and teaching



Henry Baltes

Acceptance Speech

Presentation Photo

ETH Zurich, Zurich, Switzerland

For contributions to the exploration and development of CMOS-MEMS, to production using IC foundries and MEMS post-processing, and for inspirational leadership in the worldwide MEMS community
Roger T. Howe
Stanford University
Stanford, CA, USA
For sustained contributions to MEMS/NEMS over many years especially those enabling MEMS-based inertial-sensor applications
Yu-Chong Tai

Caltech, Pasadena, CA, USA

For pioneering contributions in materials, technologies, and design of MEMS/NEMS and groundbreaking achievements in the realization of biomedical parylene MEMS


Although the IEEE Electron Devices Society (EDS) is pleased to invite all individuals and groups in the OFAC embargoed countries to submit nominations for IEEE EDS Awards, the IEEE EDS cannot provide any award monies to members from such countries at this time.