Robert Bosch Micro and Nano Electro Mechanical Systems Award Committee

  • Robert Bosch Micro and Nano Electro Mechanical Systems Award Committee Chair

    • Richard S. Muller
       - Professor in the Graduate School, Professor Emeritus Elec. Engr. and Computer Sciences Dept.
      Richard S. Muller portrait
      University of California, Berkeley
      568 Cory Hall, MS 1770
      Berkeley, CA 94720-1770
      Muller Office:
      +1 510 643 0614

      Assistant Dalene Schwartz Corey:
      +1 510 643 6690

      +1 510 643 6637
      Muller Email:

      Assistant Email:
      Research Areas: Microdynamic systems, techniques, fabrication methods, and materials for MEMS and NEMS. Micro-optics and micro-optical systems

      Professional Memberships: Life Fellow IEEE, Secretary, Transducer Research Foundation, Liaison Officer—National Academy of Engineering and National Research Council

      Biography: Mechanical Engineer, Stevens Institute of Technology (1955), PhD Electrical Engineering and Physics, California Institute of Technology (1962), Professor in Electrical Engineering and Computer Sciences, University of California, Berkeley (1962–1994), Professor Emeritus and Professor in the Graduate School, Univ. of California, Berkeley (1994-present). Co-Founder (with R.M.White) Berkeley Sensor & Actuator Center (1986). Editor-in-Chief, IEEE/ASME Journal of MEMS (1997-2012). Elected to National Academy of Engineering (1994), IEEE Cledo Brunetti Award (1998 with R.T. Howe), IEEE/Wolfson Royal Society of Edinburgh James Clerk Maxwell Award (with R.M. White, 2013), IEEE MEMS Career Award (1997). Trustee, Stevens Institute of Technology (1995–2005). Fulbright Professor at TU Munich (1982-83), Alexander von Humboldt Professor at TU Berlin (1994-95). General Chair: IEEE MEMS Research Workshop (1988); General Chair: IEEE Transducer Research Conference (1991).
  • Robert Bosch Micro and Nano Electro Mechanical Systems Award Committee Members

    • Christofer Hierold
      Christofer Hierold portrait
      ETH Zurich
      Micro and Nanosystems
      Office: CLA G9/G7
      Tannenstrasse 3
      Zurich CH-8092
      Phone 1:
      +41 44 6323143

      +41 44 63 21462
      Email 1:

      J-MEMS Administrative Assistant:

      Research Areas: Functional nanomaterials in MEMS and NEMS (e.g. carbon nanotube sensors, ultra low power sensors), Polymer microsystems (e.g. magnetic polymers, biodegradable polymers), Advanced MEMS (e.g. micro thermoelectric generators, large deflection actuators by polymer springs in MEMS), Fabrication technology (integration of functional nanomaterials on larger areas)

      Professional Memberships: IEEE/EDS

      Biography: Christofer Hierold has been Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich (ETH) since April 2002. Further, he is Executive Coordinator ETH Zurich of the Binnig and Rohrer Nanotechnology Center (BRNC) at Ruschlikon. Before he joined ETH Zurich in 2002 he was with Siemens AG, Corporate Research, and Infineon Technologies AG in Germany. In 1990 he graduated from Technical University Munich (TUM) with a Dr.-Ing. Degree in Engineering Sciences.

      Christofer Hierold is Co-Chair of the Steering Committee of the EUROSENSORS conference, and a member of the Steering Committees of both MEMS and TRANSDUCERS. He served as General Co-Chair of MEMS 2009, and is Program Chair of TRANSDUCERS 2013. Professor Hierold is a member of the Swiss Academy of Engineering Sciences (SATW).

    • Chih-Ming Ho
       - Ben Rich - Lockheed Martin Professor
      Chih-Ming Ho portrait
      University of California, Los Angeles
      Mechanical and Aerospace Engineering Department
      Eng. IV, Rm 38-137J
      420 Westwood Plaza
      Los Angeles, CA 90095-1597
      Ho Office:

      Ms. Kelli Yang Assistant:
      310 825 9993

      Ho Email:

      Ms. Kelli Yang, Assistant:

      Research Areas: 1) Phenotypic Personalized Medicine, 2) Optimization of Combinatorial Medicine, 3) Control of Complex Systems, 4) Microdluidics, 5) Micro Bio Marker Sensors

      Professional Membership: AIMBE, IEEE, ASME, APS, AIAA

      Biography: Dr. Chih-Ming Ho received Ph.D. from The Johns Hopkins University and currently holds the Ben Rich-Lockheed Martin Chair Professor in UCLA School of Engineering. He was the Director of NASA supported Institute for Cell Mimetic Space Exploration (CMISE) and NIH supported Center for Cell Control (CCC). He served as UCLA Associate Vice Chancellor for Research from 2001 to 2005. His research interests are control of bio complex system, micro/nano fluidics, and turbulence. Dr. Ho now devotes virtually all his time advancing the phenotypic personalized medicine and optimization of combinatorial drugs. In 1997, Dr. Ho was inducted as a member of the National Academy of Engineering. In the next year, he was elected as an Academician of Academia Sinica. Dr. Ho holds ten honorary professorships. Dr. Ho was elected Fellow of American Institute for Medical and Bio Engineering, the American Physical Society as well as American Institute of Aeronautics and Astronautics. He received the Global Achievement Award from The Johns Hopkins University and Distinguished Alumnus Award from the National Taiwan University.

    • Kurt E. Petersen
       - Serial MEMS Entrepreneur, Mentor and Investor in Early Stage Start-Up Companies
      Kurt E. Petersen portrait
      Silicon Valley Band of Angels
      442 Vista Ridge Drive
      Milpitas, CA 95035
      Phone 1:
      (408) 406-5189

      Professional Membership: Life Fellow of IEEE

      Biography: Kurt Petersen received his BS degree cum laude in EE from UC Berkeley in 1970. In 1975, he received a PhD in EE from the Massachusetts Institute of Technology. Dr. Petersen established a micromachining research group at IBM from 1975 to 1982, during which he wrote the review paper “Silicon as a Mechanical Material,” published in the IEEE Proceedings (May 1982). This paper is still the most frequently referenced work in the field of micromachining and micro-electro-mechanical systems (MEMS). Since 1982, Dr. Petersen has co-founded six successful companies in MEMS technology, Transensory Devices Inc. in 1982, NovaSensor in 1985 (now owned by GE), Cepheid in 1996 (now a public company on NASDAQ: CPHD), SiTime in 2004 (still private), Profusa in 2008 (still private), and Verreon in 2009 (acquired by Qualcomm). In 2011, Dr. Petersen joined the Band of Angels in Silicon Valley. The Band is an angel investment group which mentors and invests in early stage, high-tech, start-up companies. Today, he spends most of his time helping and mentoring such companies. Dr. Petersen has published over 100 papers, and has been granted over 35 patents in the field of MEMS. In 2001 he was awarded the IEEE Simon Ramo Medal for his contributions to MEMS. Dr. Petersen is a member of the National Academy of Engineering and is a Fellow of the IEEE in recognition of his contributions to “the commercialization of MEMS technology”.

    • Osamu Tabata
      Osamu Tabata portrait
      Kyoto University
      Nano/Micro Engineering Lab
      Department of Microengineering
      Kyotodaigaku-Katsura C3
      Kyoto 615-8540
      Phone 1:

      Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties

      Professional Memberships: IEEE

      Biography: Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981.  In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.

    • Albert Z.H. Wang
       - Fellow
      Albert Z.H. Wang portrait
      University of California
      Dept. of Electrical and Computer Engineering
      Office: 417 EBU2, Lab: 227 EBU2
      Riverside, CA 92521
      Phone 1:
      +1 951 827 2555

      +1 951 827 2425

      Lecture Topics:

      1. ESD-RFIC co-design techniques.
      2. Mixed-mode ESD protection circuit simulation design methodology.
      3. Above-IC ESD protection by nano technology
      4. Field-programmable ESD protection by nano technology