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T-SM Editor-in-Chief and Editors

T-SM Editorial Board

  • T-SM Editor-in-Chief

    • Anthony Muscat
      Anthony Muscat portrait
      Professor
      University of Arizona
      1133 E. James Rogers Way
      Harshbarger Bldg., Room 134
      Tuscon, AZ 85721
      USA
      Phone 1:
      520-626-6580

      Fax:
      520-626-5397

      T-SM Subject Category: Environment Safety and Health


      Research Areas: thin film deposition, thin film etching, atomic layer deposition, III-V materials, semiconductor surface preparation and cleaning


      Professional Memberships: IEEE, AIChE, MRS, AAAS, ACS, ECS, APS, AVS


      Biography: Anthony J. Muscat received the B.S. degree (1983) from the University of California, Davis and the M.S. (1984) and Ph.D. (1993) degrees from Stanford University all in chemical engineering. He is currently a professor and chair of the Department of Chemical and Environmental Engineering at the University of Arizona in Tucson. His research interests are in the surface chemistry of electronic materials and the synthesis and self-assembly of II-VI quantum dots and metal nanoparticles. He works in the areas of atomic layer deposition, atomic layer etching, and surface preparation and cleaning for thin film growth. He is currently the Editor-in-Chief of the Transactions on Semiconductor Manufacturing. He is also serving as the Program Chair for the American Vacuum Society International Symposium in 2015.

  • T-SM Associate Editors

    • Hunter Brugge
       - Yield Enhancement
      Hunter Brugge portrait
      Sr. Director, LSI Engineering
      Samsung Austin Semiconductor
      US Office:
      (512) 672-1149

      US Mobile:
      (512) 507-0459

      Hunter B. Brugge received the Ph.D. degree in chemical engineering from Texas A&M University, College Station, TX, USA in 1989 and the B.S. degree in chemical engineering from the University of Virginia, Charlottesville, VA, USA in 1983. From 1989 to 2003 he was with VLSI Technology, San Antonio, TX, USA where he managed fab engineering, technology transfer, and the fab wafer size conversion after VLSI Technology was acquired by Philips Semiconductor. Since 2003, he has been with Samsung Austin Semiconductor, Austin, TX, USA working in various fab engineering roles including Thin Films, technology transfer, wafer fab startup, and most recently yield enhancement and metrology. He is currently Senior Director responsible for Defect Elimination, Defect Control, Metrology, and Wafer Test. He holds 9 U.S. patents.

    • Dongchan Kim
       - Advanced Processing
      Dongchan Kim portrait
      Advanced Processing
      Advanced Micro-Fabrication Equipment Inc Korea
      Osan City 18103
      South Korea
      Phone 1:
      +82 10 9198 7889

      Biography:  Dongchan Kim received the B.S. degree from Seoul National University, Seoul, South Korea, the M.S. and Ph.D. degrees majoring in physical chemistry from KAIST(Korea Advanced Institute of Science and Technology), Taejon, South Korea. After doing the post doctoral study in department of chemistry at University of North Carolina at Chapel Hill, NC, USA, he joined Samsung Electronics as a senior process engineer in 2000. Since then, he has spent his career working in various semiconductor fields - chemical vapor deposition, integration management and yield control, dry etching, and equipment development, etc. From 2006 to 2007, he was a Samsung assignee to IMEC, Leuven, Belgium. He is currently a Principal Engineer at Semiconductor R&D Center. He has about 25ea of publications and presentations. He was a keynote speaker for several symposiums such as APCPST 2012, DPS 2013, and ICMAP 2014. He also has about 50 patents worldwide as the 1st author or co-author.

    • Linda Milor
       - Yield Modeling & Analysis
      Linda Milor portrait
      Georgia Institue of Technology
      School of Electrical and Computer Engineering, Georgia Tech
      Atlanta, GA 30332
      USA
      Phone 1:
      404 894 4793

      Research Areas:  yield, reliability, and variation in semiconductor circuits


      Professional Memberships:  IEEE


      Biography:  Dr. Milor has worked in the fields of yield analysis, reliability, and testing since the mid-1980s. She has over 100 publications in these areas. She has a Ph.D. from U.C. Berkeley in Electrical Engineering. She is currently a Professor of Electrical and Computer Engineering at Georgia Tech. Prior to working at Georgia Tech, she has worked as a Product Engineering Manager at Advanced Micro Devices, where she was responsible for yield and wafer quality.