Microelectromechanical Systems

Microelectromechanical Systems Committee Chair

Sumant Sood

Suss Microtec Inc.

E: ssood@ieee.org
E: sumant_sood@apple.com

Microelectromechanical Systems Committee Members

Roger Booth

Qualcomm

E: boothrog@yahoo.com

Ming-Huang Li

National Tsing Hua University

E: mhli@pme.nthu.edu.tw

Ruochen Lu

E: ruochen@utexas.edu

Ruochen Lu is an Assistant Professor in the Department of Electrical and Computer Engineering at The University of Texas at Austin.

He received the B.E. degree with honors in microelectronics from Tsinghua University, Beijing, China, in 2014, and the M.S. and Ph.D. degree in electrical engineering from the University of Illinois at Urbana-Champaign, Urbana, IL, USA, in 2017 and 2019, respectively.

His research primarily focuses on developing chip-scale acoustic components and microsystems for RF applications. His works aim to demonstrate reconfigurable and tunable RF functions using novel piezoelectric MEMS platforms, toward higher operating frequencies and more efficient transduction between the EM and acoustic domains. In addition, he works on ultrasonic transducers and multi-physics hybrid microsystems for signal processing, sensing, and computing applications.

Anjum Mehta

Intel Corporation

E: Anjum.mehta@intel.com

Muthu Packrisamy

E: m.packirisamy@concordia.ca

Rudra Pratap

Professor
Indian Institute of Science

E: pratap@cense.iisc.ernet.in

Website:
http://www.cense.iisc.ernet.in/people/faculty/RP.htm

Research Areas: Dynamic MEMS, e.g., inertial MEMS, Microphones, CMUTs, PMUTs, and resonators. Energy dissipation at micro and nano scales. Energy harvesting. Mechanobiology. Nonlinear dynamics

Professional Memberships: IEEE, ISSS

Biography: Dr Rudra Pratap is a Professor and the Chairperson of the Centre for Nano Science and Engineering (CeNSE), and an associate faculty of the Department of Mechanical Engineering at the Indian Institute of Science, Bangalore. He specializes in MEMS and NEMS design. His other research interests include nonlinear dynamics, mechano-biology, and computational mechanics. Professor Pratap holds a Ph.D. degree from Cornell University, USA, a Masters degree from the University of Arizona, USA, and a B. Tech. from the Indian Institute of Technology, Kharagpur, India. Prior to joining IISc in 1996, he taught at the Sibley School of Mechanical and Aerospace Engineering, Cornell University, for two and a half years. He was also an 'Invited Professor' at EPFL, Lausanne, Switzerland during 2004-2005. He has been at the Indian Institute of Science, Bangalore, India, since 1996. He is a member of the Vision Group on Nanotechnology of Karnataka State. He has served on the editorial board of various journals. He is also the Chairman of i2n Technolgies Pvt Ltd, a company that he co-founded in 2010 for making nanotech hardware products. Dr. Pratap is a Fellow of the National Academy of Engineering.

Debbie G. Senesky

Debbie G. Senesky - Sensor and Actuators; Compound Semiconductor Devices

University of Stanford, USA
EXtreme Environment Microsystems Lab (XLab)

IEEE Region 6 (Western USA)

E: dsenesky@stanford.edu

Debbie G. Senesky is an Assistant Professor at Stanford University in the Aeronautics and Astronautics Department and by courtesy, the Electrical Engineering Department. She received the B.S. degree (2001) in mechanical engineering from the University of Southern California. She received the M.S. degree (2004) and Ph.D. degree (2007) in mechanical engineering from the University of California, Berkeley. She has also held positions at GE Sensing (formerly known as NovaSensor), GE Global Research Center, and Hewlett Packard. She has served as a subcommittee member (2014, 2015) and the subcommittee chair (2016) of the Sensors, MEMS and BioMEMS (SMB) subcommittee of the IEEE International Electron Devices Meeting (IEDM). Her current research interests include the development of micro- and nano-scale sensors, wide bandgap electronics, and interface materials for operation within extreme harsh environments. She is a recipient of the NASA Early Faculty Career Award and Alfred P. Sloan Foundation Fellowship Award.

Osamu Tabata

Kyoto University of Advanced Science

IEEE Region 10 (Asia and Pacific)

E: tabata.osamu@kuas.ac.jp

Website:
https://www.kuas.ac.jp/en/faculty-of-engineering/

Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties

Professional Memberships: IEEE

Biography: Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981. In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. October 2019, he moved to Kyoto University of Advanced Science and he is serving as a Founding Dean of New Faculty of Engineering from April 2020. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.

Camilo Velez Cuervo

E: cvelezcu@ieee.org
E: cavelcu@gmail.com