Previous award winners of the Robert Bosch Micro and Nano Electro Mechanical Systems Award
| 2023 | ||||
|
Stephen C. Terry John H. Jerman James B. Angell (late) |
Palo Alto, CA |
For pioneering contributions to MEMS by developing and commercializing the microfabricated gas chromatograph | ||
| 2022 | ||||
| Göran Stemme |
Royal Institute of Technology |
For pioneering contributions in MEMS sensors, particularly for medical applications, and sustained commitment to transferring MEMS to industry and society | ||
| 2021 | ||||
| Chang-Jin "CJ" Kim | Univ. of California, Los Angeles, CA | For pioneering surface-tension-based microelectromechanical systems (MEMS) that led to electrowetting digital microfluidics and superhydrophobic drag reduction | ||
| 2020 | ||||
| Ming C. Wu | University of California, Berkeley | For pioneering contributions in MEMS optical switches and optoelectronic tweezers | ||
| 2019 | ||||
| Hiroyuki Fujita | Advanced Research Lab of Canon Medical Systems Corp. | For pioneering contributions in microactuators, optical-MEMS, and bio-nano-MEMS and strong leadership in the science of MEMS | ||
| 2018 | ||||
| Pasqualina M. Sarro |
Delft University of Technology |
For pioneering contributions in novel materials, material integration and innovations in MEMS and strong commitment to education and technology transfer |
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| 2017 | ||||
| Clark Nguyen |
University of California, Berkeley |
For pioneering research on high-frequency MEMS vibrating systems and for extraordinary efforts in support of MEMS in industry, government, and teaching |
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| 2016 |
|
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|
Henry Baltes |
ETH Zurich, Zurich, Switzerland |
For contributions to the exploration and development of CMOS-MEMS, to production using IC foundries and MEMS post-processing, and for inspirational leadership in the worldwide MEMS community | ||
| 2015 | ||||
| Roger T. Howe |
Stanford University
Stanford, CA, USA
|
For sustained contributions to MEMS/NEMS over many years especially those enabling MEMS-based inertial-sensor applications | ||
| Yu-Chong Tai |
Caltech, Pasadena, CA, USA |
For pioneering contributions in materials, technologies, and design of MEMS/NEMS and groundbreaking achievements in the realization of biomedical parylene MEMS | ||
