Journal of Microelectromechanical Systems

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The Journal of Micrelectromechanical Systems (JMEMS) publishes original and significant contributions, describing advances in the field and relating to the theory, modeling, design, fabrication, assembly and packaging, performance characterization and reliability of microelectromechanical systems (MEMS). In general, JMEMS papers and letters contain experimental data.

All contributed and invited paper submissions to the IEEE JMEMS must be submitted using IEEE’s web-based ScholarOne Author Submission and Peer Review System.  Manuscripts submitted in any other way will be returned to the sender.

To submit manuscripts using ScholarOne please click here or login to ScholarOne using the box on the right.

Topics covered in JMEMS papers deal with micromechanics, microdynamical systems, RF MEMS, MEMS with functional interfaces to biosystems and to the environment, micro- and nanofabrication technologies (top-down and bottom-up), materials properties and functional materials for MEMS, phenomena pertinent to MEMS designs and performance, interface issues affecting mechanical, electrical, chemical, and biological factors associated with MEMS, tribology issues for small devices.

Typical MEMS devices have smaller than mm dimensions and they are characterized by engineering and control of lengths and movements that range typically from nanometers to micrometers.  JMEMS includes and welcomes topics in MEMS, which include aspects of nanotechnologies in functional design, materials integration and fabrication.

The Journal of Microelectromechanicalsystems (JMEMS) is published under the joint sponsorship of three societies of the IEEE, Electron Devices, Industrial Electronics, and Robotics and Automation Societies.