J-MEMS Editor-in-Chief and Editors

The first issue of IEEE/JMEMS appeared in March, 1992 and the Journal was published quarterly from 1992 to 2002 when it changed to a bimonthly format.

From 1992 to 1997, Dr. William Trimmer was the first Editor-in Chief (EiC) and was succeeded by Professor Richard S. Muller of the University of California, Berkeley from 1997 to 2012 and Professor Christofer Hierold of the Swiss Federal Institute of Technology in Zurich from 2012 to 2019. Gianluca Piazza, Professor at Carnegie Mellon University, became the EiC in March of 2019.

The JMEMS Editorial Board plays a key role in assuring the archival quality of published papers. One of the Editorial Board members is responsible for the review process of each paper and that Editor is identified in a footnote on the first page of each accepted paper. Those members of the Editorial Board, who are designated as Senior Editor, are sometimes assigned the responsibilities of Editor-in-Chief for selected submitted papers to JMEMS.

J-MEMS Editorial Board

  • J-MEMS Editor-in-Chief

    • Prof. Gianluca Piazza
       - Director of Claire and John Bertucci Nanotechnology Laboratory
      Prof. Gianluca Piazza portrait
      Carnegie Mellon University
      Department of Electrical and Computer Engineering
      Roberts Engineering Hall, Room 333
      Pittsburgh, PA 15213
      Phone 1:

      Gianluca Piazza is a Professor in the Department of Electrical and Computer Engineering at Carnegie Mellon University (CMU) and the Director of the Claire and John Bertucci Nanotechnology Laboratory (CMU Nanofab). He also holds a courtesy appointment in the Department of Mechanical Engineering. His research interests focus on piezoelectric micro and nanoelectromechanical systems (M/NEMS) for radio frequency communication, optomechanics, chemical/biological detection, and mechanical computing. He also has a general interest in the areas of micro/nano fabrication techniques and integration of micro/nano devices with state-of-the-art electronics and photonics. He has more than 10 years of experience working with piezoelectric materials and devices. He holds several patents in the field of micromechanical resonators some of which have been acquired or licensed by industry. He received the IBM Young Faculty Award in 2006 and has won, with his students, the Best Paper Award at various IEEE Frequency Control and Ultrasonic Symposia.

  • J-MEMS Editors

    • Chong H. Ahn
       - Professor
      Chong H. Ahn portrait
      University of Cincinnati
      814 Rhodes Hall
      Cincinnati, Ohio 45221-0030
      Phone 1:


      Research Areas:  
      - Microfluidics Devices and BioMEMS:  Polymer smart passive microfluidic devices and BioMEMS
      - Biosensors and Lab-on-a-ChipsIn vitro diagnostics (IVD) with immunosensors on polymer lab-on-a-chip platform
      - Point-of-Care (POC) Healthcare Systems:  POCT clinical diagnostics for smart patient care systems
      - Neurosurgical Monitoring Medical Devices: Monitoring traumatic brain injury (TBI) using smart microcatheter and lab-on-a-tube

      Professional Memberships: IEEE/EDS, ASME, IoP

      Biography:   Dr. Ahn is Mitchell P. Kartalia Chair Professor of Engineering in the Department of Electrical Engineering and Computing Systems at the University of Cincinnati. He obtained his Ph.D. degree in Electrical Engineering from Georgia Institute of Technology in 1993. Since joining the University of Cincinnati in 1994, he has successfully initiated and established an excellent Microfluidics and BioMEMS program (www.biomems.uc.edu). He has published over ~300 journal and peer-reviewed conference papers, and chaired numerous international conferences and steering committees. His research interests include the design, simulation, fabrication and characterization of MEMS and BioMEMS devices, microfluidic device and systems, biosensors and biochips, lab-on-a-chips, in vitro diagnostics (IVD), and point-of-care clinical diagnostics or neurosurgical monitoring. He received the Scientific Leadership Award at the 4th Annual BioMEMS and Biomedical Nanotechnology World in 2003 and received the Best Journal Paper Award of the IEEE Sensor Journal in 2009. He is currently serving as an Editor of the IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), and Editorial Advisory Boards of the Journal of Micromechanics and Microengineering (JMM), and Journal of Microfluidics and Nanofluidics. He is now a Fellow at the Institute of Physics. He was the founder of Siloam Biosciences Inc. (www.siloambio.com) in Cincinnati, Ohio, USA.

    • Juergen Brugger

      Research Areas: New materials and fabrication methods for MEMS; nanoscale MEMS

      Professional Memberships: IEEE

      Biography: Juergen Brugger is Professor at the Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland in Microengineering and Materials Science. Before joining EPFL he was at the MESA+ Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. He received his Master in Physical-Electronics and his PhD degree from Neuchatel University, Switzerland.

      Since 1995, Dr. Brugger is active in the field of interdisciplinary and experimental micro and nanotechnologies with a focus on novel manufacturing techniques for integrated and multi-functional micro/nanosystems. Dr. Brugger co-invented more than 15 patents and received two IBM patent awards. He served on the program committees of IEEE-IEDM, IEEE-MEMS, IEEE NEMS, Transducers, Eurosensors and MNE conferences. He served as General Chair for the Eurosensors XXIII, Lausanne, 2009, co-chair of MNE 2014, and chair of IEEE-MEMS 2015. Juergen Brugger is senior member of IEEE, co-founder of the start-up MicroLeman Sarl and board member of the "Prix Omega Foundation". His private pursuits include outdoor activities such as mountaineering and sailing as well as indoors sports such as the combination of Single Malts and Jazz music.

    • Lionel Buchaillot
       - Dr.
      Lionel Buchaillot portrait
      Institute for Electronics, Microelectronics and Nanotechnology IEMN
      Cite Scientifique
      Avenue H. Poincare
      Villeneuve d'Ascq Cedex 59650
      Phone 1:
      +33 3 2019 7800

      Research Areas:  Mechanical Sensors and Systems, RF MEMS / MEMS for Microwaves and Scientific Micro- and Nanoinstruments

      Professional Membership:  IEEE

      Biography:  Lionel Buchaillot is a CNRS Senior Researcher. He received the M.S degree in Material Sciences and the PhD degree in Mechanical Engineering respectively in 1991 and 1995, both from the Université de Franche-Comté, Besançon, France. Between 1995 and 1997, he has been with the Laboratory for Integrated MicroMechatronic Systems (LIMMS-CNRS-IIS, The University of Tokyo, Japan) as a JSPS post-doctoral fellow working on thin film shape memory alloys actuators for MEMS. In 1997, he worked as a R&D engineer for the SFIM Company (now SAFRAN) and AVIAC Technologies Company. In 1998, he has joined the CNRS in the ISEN Department of the Institute of Electronics, Microelectronics and Nanotechnology (IEMN). He was the Head of the "Silicon-based MEMS" research group at IEMN between 2001 and 2009. In 2010, he became director of IEMN. His research focuses on Mechanical Sensors and Systems, RF MEMS / MEMS for Microwaves and Scientific Micro- and Nanoinstruments. He has authored or co-authored more than 100 papers and several book chapters. He is recipient of the CNRS Bronze Medal.

    • Dong-il (Dan) Cho
       - PhD
      Dong-il (Dan) Cho portrait
      Department of Electrical and Computer Engineering
      Seoul National University
      Building 133
      Room 408
      Gwanak-Ro 1
      Gwanak-Gu, SeoulKorea
      Phone 1:

      Research Areas:
      MEMS/NEMS Fabrication Processes
      MEMS and Controls Applications to Biomedical and Robotics Technologies

      Professional Memberships: IEEE (EDS, RAS, IES), IFAC

      Biography: Dong-Il (Dan) Cho received the B. S. degree from the Carnegie Mellon University in 1980 and the M. S. and Ph. D. degrees from the Massachusetts Institute of Technology (MIT). In 1987, he joined the Mechanical and Aerospace Engineering Department at Princeton University as an Assistant Professor. Since 1993, he has been with the Department of Electrical and Computer Engineering at Seoul National University.

      His research interests are in MEMS and control technologies. He has served as the editor of IEEE/ASME Journal of MEMS since its first issue published in 1992, and was appointed as the Senior Editor of the journal in 2012. In addition, he served as the President of the MEMS Research Association of Korea from 2003 to 2007. In addition, he currently serves as the Vice-Chair of the Technical Board of IFAC (International Federation of Automatic Control). Professor Cho is a Senior Member of the National Academy of Engineering of Korea (NAEK).

    • Don DeVoe
      Don DeVoe portrait
      University of Maryland
      3139 Glenn L Martin Hall
      College Park, MD 20742
      Phone 1:

      Email 1:

      Research Areas: Microfluidic systems for bioanalysis; Piezoelectric MEMS

      Professional Memberships: IEEE, ACS

      Biography: Don L. DeVoe is a Professor of Mechanical Engineering at the University of Maryland, College Park. He received his Ph.D. degree in Mechanical Engineering in 1997 from the University of California, Berkeley, with a focus in piezoelectric microsystems. He is a recipient of the Presidential Early Career Award for Scientists and Engineers from the National Science Foundation for advances in microsystems technology, and is a Kavli Fellow of the National Academy of Sciences.

    • David Elata
      David Elata portrait
      Technion - Israel Institute of Technology
      Haifa 32000
      Phone 1:
      +972 4 829 3184

      Research Areas: Electrostatic micro-actuators: e.g. micromirrors and switches. Electrostatic resonators: e.g. electrostatic and electret transducers that are perfectly linear or that have a tailored nonlinear response. Modeling of micro-scale transducers: theoretical investigation and derivation of design rules for: electrostatic, piezoelectric, thermoelastic and electromagnetic transduction.

      Professional Memberships: IEEE

      Biography: David Elata is a Professor at the Faculty of Mechanical Engineering of the Technion - Israel Institute of Technology. He is the head of the MEMS laboratory and a member of the Technion Russell Berrie Nanotechnology Institute. He earned a D.Sc. from the Technion in 1993, and has previously worked in the fields of Computational Mechanics, Geophysics, and Continuum Mechanics. His current research interests are in modeling and design of micro actuators and development of test devices for material and structure characterization at the micro-scale.

    • Sami Franssila
      Sami Franssila portrait
      Aalto University
      Micronova Centre for Nanofabrication
      PO BOX 13500
      Helsinki 00076
      +358 50 536 1699


      Research Areas: Micro- and nanofabrication, thin films, MEMS, microfluidics, chemical and biological microsystems

      Biography: Sami Franssila is a professor of materials science at Aalto University, Helsinki, Finland. He received the B.Sc. and M.Sc. degrees in physics from the University of Helsinki, Helsinki, Finland, and the Ph.D. degree in 1995 from Helsinki University of Technology, with a thesis on plasma etching. He has worked at VTT and IMEC before joining Aalto University in 1998. He has authored or coauthored 140 peer-reviewed journal articles and the textbook Introduction to Microfabrication (John Wiley, 2010). He has served in Transducers executive program committee, as well as in MEMS and MicroTAS technical program committees.

      His current research interests are:
      1) Micro and nanofabrication, including silicon etching (wet and dry), bonding, hybrid materials
      2) Surfaces and coatings, atomic layer deposition, plasma coatings
      3) Microfluidics, capillarity, superhydrophobicity
      4) Chemical and biomicrosystems, separation systems, ionization, cell growth platforms

    • Hiroyuki Fujita
    • Reza Ghodssi
      Reza Ghodssi portrait
      Department of Electrical and Computer Engineering and the Institute for Systems Research
      A.V. Williams Building
      Rm 2173
      College Park, MD 20742
      Phone 1:
      (301) 405-8158

      (301) 314-9920

      Research Areas: Integrated Micro, Nano and Bio Systems, Chemical and Biological Sensing, Small-scale Energy Storage, Harvesting and Conversion

      Professional Memberships: IEEE, MRS, AVS, ASEE, AAAS

      Biography: Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR), and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.

      Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano/bio devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. Dr. Ghodssi was chair of the NSF Workshop on Micro, Nano, Bio Systems in 2012 and the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009). He also served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011, and 2012 conferences. Dr. Ghodssi has over 95 refereed journal publications and is the co-editor of the "MEMS Materials and Processes Handbook" published in 2011.

    • Andrew Holmes
      Andrew Holmes portrait
      Imperial College London, EEE Department
      Exhibiton Road
      London SW7 2AZ
      Phone 1:
      +44 20 7594 6239

      +44 20 7594 6308

      Research Areas:  Physical MEMS, energy harvesting, laser materials processing, wireless sensors

      Professional Memberships:  IEEE, IET

      Biography:  Andrew Holmes received the BA degree in natural sciences from Cambridge University in 1987, and the PhD degree in electrical engineering from Imperial College London in 1992. He is currently Professor of Micro-Electro-Mechanical Systems (MEMS) in the Department of Electrical and Electronic Engineering, Imperial College London. He has worked on a range of topics in optical signal processing, integrated optics and MEMS, and has published around 150 journal and conference papers in these areas. His current research interests include applications of laser processing in MEMS manufacturing, novel assembly technologies for MEMS and electronics, micro-power generation by energy harvesting, power conditioning electronics for energy harvesters and ultra-low power radio for wireless sensors. He is a co-founder and director of Microsaic Systems plc, an Imperial College spin-out company started in 2001 to exploit Imperial College MEMS research.

    • Roger Howe
      Roger Howe portrait
      William E. Ayer Professor
      Stanford University
      Paul G. Allen Building
      Room 114
      Stanford, CA 94305-4070
      Phone 1:

      Research Areas: N/MEMS fabrication technology and applications in resonators, actuators, inertial navigation, energy conversion, and biosensing.

      Professional Memberships: IEEE

      Biography: Roger T. Howe has been a Professor at Stanford University since 2005, after having held faculty positions at Berkeley, MIT, and CMU, where his group is researching N/MEMS applications in thermionic energy conversion and biomolecular sensing. In 2004, he co-founded Silicon Clocks, which was acquired by Silicon Laboratories in 2010. He served as Co-Chair of IEEE MEMS 1990 in Napa, California and as Technical Chair of Transducers 2003 in Boston, Massachusetts. He is an IEEE Fellow and a member of the U.S. National Academy of Engineering. Since 2011, he is the Director of the National Nanotechnology Infrastructure Network (NNIN).

    • Hongrui Jiang
      Hongrui Jiang portrait
      Vilas Distinguished Achievement Professor
      University of Wisconsin - Madison
      3440 Engineering Hall
      1415 Engineering Drive
      Madison, Wisconsin 53706
      Phone 1:


      Research Areas: Microfabrication technology, biological and chemical microsensors, microactuators, optical microelectromechanical systems, smart materials and micro-/nanostructures, lab on a chip, and biomimetics and bioinspiration.

      Professional Memberships: IEEE, OSA

      Biography: Hongrui Jiang is the Vilas Distinguished Achievement Professor in the Department of Electrical and Computer Engineering at the University of Wisconsin - Madison. He is also a Faculty Affiliate in the Department of Biomedical Engineering, a Faculty Member of the Materials Science Program, and a Member of the McPherson Eye Research Institute at UW-Madison. He received the B.S. degree in physics from Peking University, Beijing, China, and the M.S. and Ph.D. degrees in electrical engineering in 1999 and 2001, respectively, from Cornell University, Ithaca, NY. From 2001 to 2002, he was a Postdoctoral Researcher with the Berkeley Sensor and Actuator Center, University of California at Berkeley. Dr. Jiang was the recipient of the National Science Foundation CAREER Award and the Defense Advanced Research Projects Agency Young Faculty Award in 2008, the H. I. Romnes Faculty Fellowship of the University of Wisconsin in 2011, the NIH Director's New Innovator Award in 2011, and the Vilas Associate Award of the University of Wisconsin in 2013. Dr. Jiang has published over 100 peer reviewed publications and holds 6 issued US patents.

    • Chang-Jin "CJ" Kim
       - Professor
      Chang-Jin "CJ" Kim portrait
      University of California, Los Angeles
      37-134 E4 Bldg., 420 Westwood Plaza
      Los Angeles, CA 90095
      Phone 1:


      Research Areas:  MEMS

      Professional Memberships:  IEEE; ASME; APS; AAAS

      Biography:  CJ Kim received his Ph.D. in Mechanical Engineering from the University of California at Berkeley in 1991. He received his B.S. from Seoul National University and M.S. from Iowa State University along with the Graduate Research Excellence Award. Since joining the faculty at UCLA in 1993, he has established a MEMS Ph.D. major field in the Mechanical and Aerospace Engineering Department. Directing the Micro and Nano Manufacturing Laboratory, his research is in MEMS and nanotechnology, including design and fabrication of micro/nano structures, actuators and systems, with a special interest in utilizing surface tension. A fellow of ASME, Professor Kim is the recipient of TRW Outstanding Young Teacher Award, NSF CAREER Award, ALA Achievement Award, and Samueli Outstanding Teaching Award. He has served on numerous committees, including IEEE MEMS Conference and Transducers, and chaired conferences, including IEEE MEMS 2014. He is currently serving as a Senior Editor for the IEEE/ASME Journal of MEMS and on the Editorial Advisory Board for IEEJ Transactions on Electrical and Electronic Engineering. He has also been active in the commercial sector, as a board member, scientific advisor, consultant, and founder of start-ups.

    • Eun Kim
       - Professor and Chair
      Eun Kim portrait
      University of Southern California
      Department of EE-Electrophysics
      Los Angeles, CA 90275
      Phone 1:


      Research Areas:  Acoustic, Piezoelectric and Power MEMS

      Professional Membership:  IEEE

      Biography:  Eun Sok Kim (M’91–SM’01–F’11) received the B.S., M.S., and Ph.D. degrees, all in electrical engineering, from the University of California, Berkeley, in 1982, 1987, and 1990, respectively. In Fall 1999, he joined the University of Southern California, Los Angeles, CA, and is currently a Professor and the Chair in the Ming Hsieh Department of Electrical Engineering - Electrophysics. From Spring 1991 to Fall 1999, he worked at the Department of Electrical Engineering in the University of Hawaii at Manoa as a faculty member. Previously, he worked at IBM Research Laboratory, San Jose, CA, NCR Corp., San Diego, CA, and Xicor Inc., Milpitas, CA as a co-op student, design engineer, and summer-student engineer, respectively. Prof. Kim is an expert in piezoelectric and acoustic MEMS, having published more than 200 refereed papers and 10 issued patents in the field, and is a Fellow of the IEEE and the Institute of Physics (IOP). He serves as an editor for IEEE/ASME Journal of Microelectromechanical Systems and on the editorial board for Journal of Micromechanics and Microengineering. He has been awarded a NSF CAREER Award (FY 95-99) and the IEEE Transactions on Automation Science and Engineering 2006 Best New Application Paper Award.

    • Satoshi Konishi
      Satoshi Konishi portrait
      Ritsumeikan Universtiy
      1-1-1 Nojihigashi
      Kusatsu, Shiga 525-8577
      Phone 1:


      Research Areas: Fabrication technology for MEMS, Actuators for MEMS, MEMS for Biomedical Application

      Professional Memberships: IEEE/RAS

      Biography: Satoshi Konishi received the BS degree in 1991 in Electronics Engineering, the MS degree in 1993 and the PhD degree in 1996 in Electrical Engineering, from the University of Tokyo, Tokyo, Japan. He is currently Professor with Ritsumeikan University, Shiga, Japan, where he joined the faculty in 1996. He also serves as the director of bio medical devices center at Ritsumeikan University. He is also visiting Professor with Shiga University of Medical Science since 2007. He is also visitng Professor with Graduate School of Phrmaceutical Sciences, Kyoto University since 2009. He joined ULB as visiting Professor in 2011.

      He is the Editorial Board Member of Sensors and Actuators A, the Editorial Board Member of Journal of Micromechanics and Microengineering. He is also International Steering Committee Member of Transducers and IEEE International Conference of MEMS. Especially he served as general co-chair of International Conference of MEMS 2007 in KOBE.

      His study is devoted to microelectromechanical systems (MEMS) covering broad ranges from fundamental to applied fields. His current research focuses on biomedical MEMS, especially multiscale interfaces in BME.

    • Liwei Lin
      Liwei Lin portrait
      UC Berkeley
      621E Sutardja Dai Hall
      Berkeley, CA 94720-1740
      Phone 1:


      Research Areas: MEMS (Microelectromechanical Systems); NEMS (Nanoelectromechanical Systems); Nanotechnology; design and manufacturing of microsensors and microactuators; development of micromachining processes by silicon surface/bulk micromachining; micro moulding process; mechanical issues in microelectromechanical systems (MEMS) including heat transfer, solid/fluid mechanics and dynamics

      Professional Memberships: IEEE, ASME

      Biography: Liwei Lin joined UC-Berkeley in 1999 and is now Professor at the Mechanical Engineering Department and co-Director at the Berkeley Sensor and Actuator Center.  He received his PhD degree in Mechanical Engineering from the University of California at Berkeley in 1993.  His research interests are in design, modeling and fabrication of micro/nano structures, micro/nano sensors and micro/nano actuators as well as mechanical issues in micro/nano systems including heat transfer, solid/fluid mechanics and dynamics.  Dr. Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation.  He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004~2005.  He is an ASME Fellow and has 15 issued US patents in the area of MEMS/NEMS.  He served as the general co-chair of the 24th international conference on Micro Electro Mechanical Systems.  Currently, he serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators -A Physical.

    • Antonio Luque
      Antonio Luque portrait
      Associate Professor
      University of Seville
      E. S. Ingenieros - Dpto. Ingenieria Electronica - Av. Descubrimientos s/n
      Sevilla, Sevilla E-41092
      Phone 1:


      Research Areas:  Microfluidics, BioMEMS, inertial sensors, polymer fabrication

      Professional Memberships:  IEEE, IES, EDS

      Biography:  Antonio Luque received the M.Sc. and Ph.D. degrees in electrical engineering from the University of Seville, Seville, Spain, in 2000 and 2005, respectively. He currently holds the position of Associate Professor in the Department of Electronics Engineering, University of Seville. His research interests include microfluidics, inertial sensors, BioMEMS, and polymer microsystems. Dr. Luque was the Chairman of the IEEE Industrial Electronics Society Technical Committee on MEMS and Nanotechnology in 2008–2009, and member of the IEEE JMEMS Steering Committee during 2013. He was a recipient of the Burgen Scholarship from the Academia Europaea in 2007. 

    • Roya Maboudian
      Roya Maboudian portrait
      University of California at Berkeley
      Department of Chemical & Biomolecular Engineering
      Berkeley, CA 94720
      Phone 1:


      Research Areas: surface and materials science and engineering of micro-/nanosystems

      Professional Memberships: IEEE, MRS, APS, ECS, ACS, AICHE

      Biography: Roya Maboudian is professor of chemical engineering, associate director of the Center of Integrated Nanomechanical Systems (COINS), and faculty affiliate of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, DC; and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena.   Prof. Maboudian's research interest is in the surface and materials science and engineering of micro/nanosystems. The main research activities in her group currently include investigation of the tribological issues in micro/nanoelectromechanical systems; silicon carbide-based sensors for harsh environment applications; nanowire and graphene based sensors and energy technologies; development of electrochemical processes for low-cost thin-film photovoltaics; and biologically inspired materials design.  Prof. Maboudian has coauthored over 220 papers in peer-reviewed archival journals.  She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems, as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS, and as advisory board member to ACS Applied Materials and Interfaces.

    • Carlos Mastrangelo
    • Sabina Merlo
       - Professor
      Sabina Merlo portrait
      Dipartimento di Ingegneria Industriale e dell'Informazione
      University of Pavia
      Via Ferrata 1
      Pavia 27100
      Phone 1:


      Research Areas: Optical MEMS, Optical methods for MEMS testing, Optical Biosensors, Optofluidics, Photonic crystals, Interferometry, Fiberoptic sensors and components

      Professional Memberships: IEEE/LEOS

      Biography: Sabina Merlo received the Ph.D. degree in Electronic Engineering in 1992 from University of Pavia, Italy, and the MSE in Bioengineering in 1989 from the University of Washington, Seattle, USA, with a Rotary Foundation Scholarship. Assistant Professor at University of Pavia since 1993, she is Associate Professor of Electronics within Dipartimento di Ingegneria Industriale e dell Informazione of the same University since 2001.

      She has carried on scientific researches in the field of optoelectronics, in collaboration with Italian and foreign Universities and companies, with regard to the study, design and characterization of new components and measuring systems, relative to telecom, biomedical and industrial applications. She has given innovative contributions in the following fields: Silicon micromachined devices, MEMS, Micromirrors, Photonic crystals for optofluidics and biosensing; Feedback interferometry; Fiber optic  sensors and components; Optical cryptography and chaotic phenomena in laser oscillators; Noise limits in optoelectronic systems. She has been involved, as team member or  project manager, in researches funded by EU (OCCULT and PICASSO), Italian Ministry of Education, private Foundations and companies. She is co-author of 4 patents and 100 journal/conference papers and book chapters.

      She is a Senior member of IEEE/LEOS and an associate editor of JMEMS, since 2006.
    • Jianmin Miao
      Jianmin Miao portrait
      School of Mechanical and Aerospace Engineering
      Nanyang Technological University
      50 Nanyang Avenue
      Phone 1:


      Research Areas: MEMS microfabrication and packaging; Physical, microfluidic and biological sensors;  Biomimetic and bio-inspired MEMS/NEMS; Energy harvesting MEMS

      Professional Memberships: IEEE/EDS

      Biography: Jianmin Miao received his bachelor degree from the Tongji University in Shanghai, Dipl.-Ing. (Master degree) and Dr.-Ing. (PhD) from the Darmstadt University of Technology, Germany. After spending several years in industry for sensor/MEMS development, he joined the Nanyang Technological University in 1998 as faculty to establish the Micromachines (MEMS) Centre as the Founding Director.  Professor Miao has collaborated with MIT at the Singapore-MIT Alliance for Research and Technology (SMART) since 2008 and was a visiting professor at MIT in 2013. He has authored or co-authored numerous papers in international journals and conferences, several book/chapters, and holds dozen patents. He has served as Chair and Co-Chair of MEMS/nanotechnology international conferences, technical committee member of international conferences, including the IEEE-MEMS and Transducers conference. He was invited by several international MEMS/Nanotechnology conferences as plenary speaker, keynote lecturer, and invited speaker.

    • Clark Nguyen
      Clark Nguyen portrait
      University of California at Berkeley
      574 Cory Hall
      Berkeley, CA 94611
      Phone 1:

      Research Areas: Integrated micromechanical signal processors and integrated sensors, merged circuit/micromechanical technologies, RF communications, integrated circuit design and technology, short- and long-term stability in micromechanical devices

      Professional Memberships: IEEE/EDS, IEEE/SSCS, IEEE/UFFC

      Biography: Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA. Prof. Nguyen is a Fellow of the IEEE and presently serves as the Vice President for Frequency Control in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society.

    • Rudra Pratap
      Rudra Pratap portrait
      Indian Institute of Science
      Centre for Nano Science and Engineering
      Bangalore, Karnataka 560012
      Phone 1:
      +91 80 2293 3250

      +91 80 2360 4656

      Research Areas: Dynamic MEMS, e.g., inertial MEMS, Microphones, CMUTs, PMUTs, and resonators. Energy dissipation at micro and nano scales. Energy harvesting. Mechanobiology. Nonlinear dynamics

      Professional Memberships: IEEE, ISSS

      Biography: Dr Rudra Pratap is a Professor and the Chairperson of the Centre for Nano Science and Engineering (CeNSE), and an associate faculty of the Department of Mechanical Engineering at the Indian Institute of Science, Bangalore. He specializes in MEMS and NEMS design. His other research interests include nonlinear dynamics, mechano-biology, and computational mechanics. Professor Pratap holds a Ph.D. degree from Cornell University, USA, a Masters degree from the University of Arizona, USA, and a B. Tech. from the Indian Institute of Technology, Kharagpur, India. Prior to joining IISc in 1996, he taught at the Sibley School of Mechanical and Aerospace Engineering, Cornell University, for two and a half years. He was also an 'Invited Professor' at EPFL, Lausanne, Switzerland during 2004-2005. He has been at the Indian Institute of Science, Bangalore, India, since 1996. He is a member of the Vision Group on Nanotechnology of Karnataka State. He has served on the editorial board of various journals. He is also the Chairman of i2n Technolgies Pvt Ltd, a company that he co-founded in 2010 for making nanotech hardware products. Dr. Pratap is a Fellow of the National Academy of Engineering.

    • Mina Rais-Zadeh
      Mina Rais-Zadeh  portrait
      Associate Professor
      University of Michigan
      1301 Beal Ave
      Ann Arbor, MI 48109

      Research Areas: Electron devices for wireless communication and sensing applications and the related device physics, Resonant Sensors: e.g. uncooled infrared detectors, Gallium nitride MEMS and microsystems

      Professional Memberships: IEEE EDS

      Biography: Mina Rais-Zadeh received the B.S. degree in electrical engineering from Sharif University of Technology and M.S. and Ph.D. degrees both in Electrical and Computer Engineering from Georgia Institute of Technology in 2005 and 2008, respectively. From August 2008 to 2009, she was a Postdoctoral Research Fellow at Georgia Institute of Technology. Since January 2009, she has been with the University of Michigan, Ann Arbor, where she is currently an Associate Professor in the Department of Electrical Engineering and Computer Science.

      Dr. Rais-Zadeh is the recipient of the NSF CAREER Award (2011), IEEE Electron Device Society Early Career Award (2011), NASA Early Career Faculty Award (2012), the Crosby Research Award from the University of Michigan (2013), National Academy of Engineering Frontiers of Engineering (2013), and ONR Young Investigator Award (2014). Together with her students, she received the best poster award at the Transducers conference (2013), the best paper award at the IEEE SiRF conference (2014), honorable mention at the IEEE IMS (2014), and was the finalist in student paper competitions at the SiRF (2007) and IMS (2011) conferences. She was the chairperson of the Display, Sensors and MEMS (DSM) sub-committee at the 2013 IEEE International Electron Devices Meeting (IEDM) and is a member of the 2014 IEDM Executive Committee and 2015 IEEE MEMS Executive Committee. She is a senior member of IEEE and has served as a member of the technical program committee of IEEE IEDM (2011-2013), IEEE Sensors Conference (2011-2014), the Hilton Head workshop (2012, 2014), the IEEE MEMS Conference (2014-2015), Transducers (2015), and IFCS (2015). She is an associate editor of the IEEE Electron Device Letters. Her research interests include electron devices for wireless communication and sensing applications and the related device physics, resonant micromechanical devices, RF MEMS, gallium nitride MEMS, and micro/nano fabrication process development.

    • Christian Rembe
       - Dr.
      Christian Rembe portrait
      ​Technical University of Clausthal

      Research Areas: optical metrology, MEMS-testing, laser-Doppler vibrometry

      Professional Memberships: IEEE, SPIE, DPG, VDI

      Biography: Christian Rembe received the diploma in Physics from the University of Hanover, Hanover, Germany, in 1994. From 1994 to 1999, he was a scientific assistant at the University of Ulm, Ulm, Germany where he earned a doctor degree in Engineering. 1999 he joined the Berkeley Sensor & Actuator Center at the University of California, Berkeley as postdoctoral, research engineer with support of a Feodor-Lynen-Scholarship of the Alexander von Humboldt-Foundation and a UC Berkeley MacKay-Lecturer Fellowship. Since 2001 he is working as Manager Development Optics at Polytec GmbH, Waldbronn, Germany. His interests are optics, optical measurement techniques, microelectromechanical systems, and dynamic-system behavior. He is member of IEEE, SPIE, Verein Deutscher Ingenieure VDI, and the Deutsche Physikalische Gesellschaft DPG. He serves as an Editor of IEEE JMEMS since 2012 and is in the scientific committees of several international conferences in the field of optical measurement techniques. In 1999 he awarded one half of Research Award for Applied Sciences (Landesforschungspreis) of the state Baden-Württemberg, Germany.

    • Antonio J. Ricco
       - Senior Editor
      Antonio J.  Ricco portrait
      NASA Ames Research Center (assignment from Stanford University)
      P.O. Box 1
      Moffett Field, CA 94035
      Phone 1:
      +1 650 604 4276

      Research Areas: Integrated microsystems, fluidics, biomedical diagnostics, bio/chemical sensors

      Professional Memberships: American Chemical Society, Electrochemical Society, IEEE

      Biography: Tony Ricco received BS and PhD degrees in Chemistry from UC Berkeley (1980) and MIT (1984), respectively. In Sandia National Laboratories' Microsensor R&D Department (1984 - 1998), he developed chemical microsensors and integrated microsystems. He was guest professor at the University of Heidelberg (winter 1996/97). From 1999 - 2003, he was ACLARA BioSciences' Director of Microtechnologies and Materials, developing consumable plastic microfluidic systems for genetic analysis, high-throughput pharmaceutical discovery, proteomics, and pathogen detection. He directed Stanford's National Center for Space Biological Technologies from 2004 - 2007; since 2007, he has served as NASA Ames Research Center's Chief Technologist for Small Spacecraft Payloads and Technologies while on leave from Stanford University. Beginning in 2003, he has participated in the founding, development, and projects of the Biomedical Diagnostics Institute (Dublin City University) as Adjunct Professor. Dr. Ricco is co-author of over 350 presentations, 200 publications, and 15 patents. He is a Fellow of The Electrochemical Society, former president of its Sensor Division, and currently Vice President of the Transducer Research Foundation. He served on the Editorial Advisory Board of Analytical Chemistry and is an Associate Editor of Sensors & Actuators B: Chemical as well as the Journal of Translational Engineering in Health and Medicine.

    • Pasqualina Sarro
       - Prof. Dr.
      Pasqualina Sarro portrait
      Delft University of Technology
      Feldmanweg 17
      Delft 2628 CT
      The Netherlands
      Phone 1:


      Research Areas:  
      - novel materials and structures for MEMS and NEMS to be applied in health, environmental applications, automotive and scientific instrumentation
      - 3D micro and nano-structuring; 3D integration schemes, including 3D interconnects

      Professional Membership:  IEEE/EDS

      Biography:  Lina Sarro is Professor of Microsystems Technology at the Delft University of Technology. Since 2009 she is also Head of the Microelectronics Department. She received the Laurea degree (cum laude) in solid-states physics from the University of Naples, Italy, in 1980. From 1981 to 1983, she was a post-doctoral fellow in the Photovoltaic Research Group of the Division of Engineering, Brown University, Rhode Island, U.S.A. In 1987, she received the Ph.D. degree in Electrical Engineering at the Delft University of Technology, the Netherlands. Since then, she has been with the Delft Institute of Microsystems and Nanoelectronics (DIMES), where she has been performing and supervising research in the field of integrated silicon sensors and MEMS technology. She has (co)-authored more than 500 publications. She is a member of the technical program committee and steering committee for several international conferences (IEEE MEMS, IEEE Sensors, Eurosensors, Transducers); Technical Program (co) chair for the IEEE Sensors 2002-2004 Conference General co-chair of IEEE MEMS 2009. Prof. Sarro is a member of the KNAW (Royal Netherlands Academy of Sciences) and an IEEE Fellow.

      Other Website: http://ectm.et.tudelft.nl

    • Helmut Seidel
       - Prof. Dr. rer. nat.
      Helmut Seidel portrait
      Saarland University, Department of Mechatronics
      Campus A5.1
      Saarbrücken 66123
      Phone 1:

      Professional Memberships: IEEE, VDE

      Biography: Helmut Seidel received his Diploma in physics in 1980 from Ludwig-Maximilians-University in Munich and his Ph.D. in physical chemistry in 1986 from the Free University in Berlin, Germany.

      In 1980 he joined the Fraunhofer-Institute for Solid-State Technology in Munich as a research scientist. His research focuses on MEMS ever since that time. In 1986 he joined the aerospace company Messerschmitt-Boelkow-Blohm (MBB now part of Airbus), which later was acquired by Daimler-Benz. From 1993 until 1996 he was a senior research scientist within Daimler-Benz Corporate Research. In 1996 he took responsibility for the Department for Microsensor Development at Temic (member of Daimler-group) with a focus on sensors for automotive applications, particularly airbag accelerometers, gyroscopes and pressure sensors. In 2002 he became Professor at Saarland University in Saarbruecken, Germany, holding the Chair for Micromechanics, Microfluidics/Microactuators. He served as senator (2004-2008) and Dean (2010-2012) of the Faculty for Physics and Mechatronics. Prof. Seidel was General Program Chair at Transducers 2001 and European Program Chair at Transducers 1997 and 2011. His current research interests include piezoelectric thin films, flexible substrates, energy autonomous systems, electro-spray ionization, aero-MEMS and microfluidic devices, as well as physical sensors and resonators.

    • Ashwin Seshia
      Ashwin Seshia portrait
      Reader in Microsystems Technology
      University of Cambridge
      Nanoscience Centre
      11 JJ Thomson Avenue
      Cambridge CB3 0FF
      United Kingdom
      Phone 1:


      Professional Membership: IEEE 

      Biography: Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Science from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008.  During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Ashwin's research explores structural dynamics and physical acoustics at the MEMS-scale with specific contributions in the areas of sensors and sensor systems, transducers and interfaces, vibrational energy harvesting and micromechanical resonators and oscillators. He was appointed a Fellow of the ERA Foundation in 2008 and received the Royal Society Brian Mercer Feasibility Award in 2010. He serves as Editor for the IEEE/ASME Journal of Micro-Electro-Mechanical Systems and as Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

    • Andrei Shkel
       - Professor
      Andrei Shkel portrait
      University of California, Irvine
      4208 Engineering Gateway Building
      Irvine, CA 92697-3975
      Phone 1:
      +1 (949) 824-3843

      +1 (949) 824-8585

      Research Areas:  MEMS, Inertial Sensors

      Professional Memberships:  IEEE

      Biography:  Andrei Shkel has been on faculty at the University of California, Irvine since 2000, where he is currently a Professor in the Department of Mechanical & Aerospace Engineering. From 2009 to 2013, he served as a Program Manager in the Microsystems Technology Office of the Defense Advanced Research Projects Agency (DARPA). His professional interests, reflected in over 170 publications and two books, include high performance inertial sensors, sensor-based intelligence, and control theory.  He holds 24 U.S. and world-wide patents.  Dr. Shkel has served on a number of editorial boards, most recently as Editor of IEEE/ASME Journal of Microelectromechanical Systems, Founding Chair of the IEEE International Symposium on INERTIAL SENSORS and SYSTEMS (ISISS), and General Chair of the 2005 IEEE Sensors Conference. He has been awarded in 2013 the Office of the Secretary of Defense Medal for Exceptional Public Service, the 2009 IEEE Sensors Council  Technical Achievement Award, the 2006 Best Faculty Research Award, the 2005 NSF CAREER award, and the 2002 George E. Brown, Jr. Award. Dr. Shkel is the IEEE Fellow. He received the diploma degree (with excellence) in mechanics and mathematics from the Moscow State University, Russia, in 1991, and the Ph.D. degree in mechanical engineering from the University of Wisconsin, Madison, USA, in 1997.

    • Olav Solgaard
      Olav Solgaard portrait
      Stanford University
      342 Via Pueblo
      Stanford, CA 94305
      Phone 1:
      +1 650 224 7177

      Research Areas: Nanophotonics, fiber sensors, microscopy, nanofabrication 

      Professional Memberships: OSA, IEEE

      Biography: Olav Solgaard earned his Ph.D. degree from Stanford University in 1992. His doctoral dissertation: "Integrated Semiconductor Light Modulators for Fiber-optic and Display Applications" was the basis for the establishment of a Silicon Valley firm Silicon Light Machines (SLM), co-founded by Dr. Solgaard in 1994.  From 1992 to 1995 he carried out research on optical MEMS as a Postdoctoral Fellow at the University of California, Berkeley, and in 1995, he joined the Electrical Engineering faculty of the University of California, Davis.  His work at UC Davis led to the invention of the multi-wavelength, fiber-optical switch, which has been developed into commercial products by several companies.  In 1999 he joined Stanford University where he is now Professor of Electrical Engineering and the Director of the Edward L. Ginzton Laboratory.  Professor Solgaard's research interests include Optical MEMS, Photonic Crystals, Atomic Force Microscopy, and solar energy conversion.  He has authored more than 300 technical publications and holds 50 patents.  Professor Solgaard is a Fellow of the Optical Society of America, the Royal Norwegian Society of Sciences and Letters, and the Norwegian Academy of Technological Sciences.

    • Leland (Chip) Spangler
      Leland (Chip) Spangler portrait
      Aspen Microsystems

      Research Areas: MEMS packaging and assembly, materials, testing

      Professional Memberships: IEEE

      Biography: Dr. Spangler received his Ph.D. in electrical engineering from The University of Michigan in 1988. He is currently President of Advanced Microsystems a company that provides engineering services for advanced microelectronic devices, with specialties in package and assembly technologies.

      Previously Chip was the President and CTO of Aspen Technologies, a microelectronic package and assembly service supplier. He was responsible for developing package solutions for extremely high-pixel count displays, DNA analysis products and MEMS telecom switch arrays, pressure and inertial sensors as well as a variety of other MEMS devices. Before this, Chip worked at Ford Microelectronics where he had responsibility for pressure sensors, and airbag and chassis accelerometers. His work lead directly to the production of the world's first plastic surface mount airbag accelerometer.  

      Dr. Spangler is the author of over 30 technical publications and has 10 patents. He is currently an editor for IEEE JMEMS and has helped organize Hilton Head, Transducers, SPIE, MEMS and other technical conferences.

    • Mark Spearing
      Mark Spearing portrait
      University of Southampton
      Southampton, Hampshire SO17 1BJ
      United Kingdom
      Phone 1:
      +44 23 8059 9526

      Research Areas: Materials and processes for microsystems

      Professional Memberships: ASME, AIAA, MRS

      Biography: Prof. S. Mark Spearing is Pro Vice-Chancellor (International) at the University of Southampton, UK. His portfolio includes international relationships in research and education, internationalisation of the curriculum and the campus, and the recruitment of international students. Previously Professor Spearing was Head of School and Professor of Engineering Materials in the School of Engineering Sciences at the University of Southampton. From 1994-2004, he was a Professor of Aeronautics and Astronautics at the Massachusetts Institute of Technology. At MIT he was Head of the Materials and Structures Division and Director of the Technology Laboratory for Advanced Composites. His technical interests include structural composites and Microelectromechanical Systems. Spearing is a past chairman of the AIAA Materials Technical Committee, and he is an Associate Fellow of AIAA, a member of the American Society of Mechanical Engineers and of the Materials Research Society. In addition to his role as an editor of the ASME/IEEE Journal of Microelectromechanical Systems he was a deputy editor of Acta Materialia from 1996-2003 and is the European Editor of The Journal of Composite Materials. He has published over 170 technical publications, including 105 in refereed journals.

    • Göran Stemme
      Göran Stemme portrait
      KTH Royal Institute of Technology, Micro and Nanosystems
      Osquldas vag 10
      Stockholm SE-100 44
      Phone 1:

      Research Areas: Micro and nano device and system technology including sensors, actuators, fabrication techniques, device integration, wafer-level packaging, microfluidics, micro-optics. Specific focus on biomedical applications.

      Professional Memberships: IEEE EDS

      Biography: Goran Stemme received his M.Sc. degree in electrical engineering in 1981 and the Ph. D. degree in solid state electronics in 1987, both from the Chalmers University of Technology, Gothenburg, Sweden. In 1981, he joined the Department of Solid State Electronics, Chalmers University of Technology. There, in 1990, he became an associate professor (docent) heading the silicon sensor research group. In 1991, he was appointed professor at The Royal Institute of Technology, Stockholm, where he is currently the head of the department of  Micro and Nanosystems at the School of Electrical Engineering. He is a member of the International Steering Committee of the Conference series TRANSDUCERS. Between 1995 and 2001 he was a member of the International Steering Committee of the Conference series IEEE Microelectromechanical Systems (MEMS) and he was General Co-Chair of that conference in 1998. Prof. Stemme is Senior Editor and member of the Steering Committee the IEEE/ASME "Journal of Microelectromechnical Systems".  Prof. Stemme is a member of the Royal Swedish Academy of Sciences (KVA) and he is an IEEE Fellow.

    • Osamu Tabata
      Osamu Tabata portrait
      Kyoto University
      Nano/Micro Engineering Lab
      Department of Microengineering
      Kyotodaigaku-Katsura C3
      Kyoto 615-8540
      Phone 1:

      Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties

      Professional Memberships: IEEE

      Biography: Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981.  In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.

    • Ellen Wang
      Xiaohong (Ellen) Wang is full professor in Department of Microelectronics and Nanoelectronics, Tsinghua University, China, guest professor in ETH Zürich, Switzerland. She received her Ph.D. from Tsinghua University in Mechanical Engineering. As a visiting researcher, she worked in Stanford University from Nov. 2005 to Oct. 2006. She also had several months’ research experience in HKUST and UCLA in 2001 and 2007, respectively. Her research now is on the fields of MEMS/NEMS design and integration technologies, in particular on Power-MEMS, like micro fuel cells, micro supercapacitors, silicon-based lithium batteries, and biological microgenerators etc. She published more than one hundreds journal and international papers, like on ACS Nano, Nano Energy,
      Journal of Power Sources, JMEMS, etc. She has served several international conferences as TPC/ETPC member, like IEEE-IEDM, IEEE-MEMS, Transducers, IEEE Sensors, Power MEMS etc. She was the General Co-Chair of IEEE-MEMS2016 held in Shanghai, and will be General Chair of Power MEMS2020 will be held in Suzhou, China. She is an Associate Editor of IEEE/ASME Journal of Microelectromechanical Systems (JMEMS) and PNG Microsystems & Nanoengineering, Editorial Advisory Board member of Journal of Micromechanics and Microengineering (JMM).
    • Man Wong
       - Senior Editor
      Man Wong portrait
      The Hong Kong University of Science and Technology

      Research Areas: Fabrication technology and physical MEMS devices

      Professional Memberships: IEEE, SID

      Biography: Man Wong was born in Beijing, China. From 1979 to 1984, he studied at the Massachusetts Institute of Technology, USA, where he obtained his BS and MS degrees in Electrical Engineering. From 1985 to 1988, he was at the Center for Integrated Systems at Stanford University, USA, where he worked on tungsten-gate MOS technology and obtained his PhD degree, also in Electrical Engineering. From 1988 to 1992, he was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and development of integrated-circuit metallization systems and dry/vapor surface-conditioning processes. He is currently with the Department of Electronic and Computer Engineering at the Hong Kong University of Science and Technology, Hong Kong. His research interests include micro-fabrication technology, device structure and material; physics and technology of thin-film transistor; organic light-emitting diode display technology; modeling and implementation of integrated micro-systems; and thin-film solar cell device and process technology. He is a member of Tau Beta Pi, Eta Kappa Nu and Sigma Xi. He was appointed an Honorary Guest Professor of Nankai University, Tianjin, China, in 2003 and a Visiting Professor of Soochow University, Suzhou, China, in 2011.

    • J. Andrew Yeh
      J. Andrew Yeh portrait
      National Tsing Hua Universtiy
      No. 101, Section 2, Kuang-Fu Road
      Hsinchu 30013
      Phone 1:
      +886 3 5742912

      +886 3 5745454

      Research Areas: Optofluidics Microsystem, Breath Biosensors, Nanostructures in Bulk

      Professional Memberships: IEEE (1996 - present) / ASME (1995 - present)

      Biography: J. Andrew Yeh joined National Tsing Hua University in Taiwan in 2001 and is a Professor at the Institute of NanoEngineering and Microsystems (iNEMS). He also serves as the Director General in Instrument Technology Research Center (ITRC) located in Hsinchu Science Park, Taiwan.

      In 1992, he earned his B.S. degree in Mechanical Engineering from National Taiwan University, Taiwan, and Master degrees in Mechanical Engineering and in Electrical Engineering from Cornell University, USA, in 1996 and 1997, respectively. His Ph.D. degree in Electrical Engineering was received from Cornell University in 1999. He co-founded AIP Networks, Inc. in 2000. Dr. Yeh serves as an editorial board member of IEEE/ASME Journal of MicroElectroMechanical Systems (JMEMS) since 2010 and as the Chair of Taiwan Section at American Society of Mechanical Engineers (ASME Taiwan) since 2011. In March, 2013, he was elected to be the Chair of IEEE Instrument and Measurement Society, Taipei Chapter. He holds more than 70 patents and publishes over 70 journal papers. His current research interests include Optofluidics Microsystem, Breath Biosensors, and Nanostructures in Bulk.

    • Jun-Bo Yoon
      Jun-Bo Yoon portrait
      Dept. EE, KAIST
      291 Daehak-ro, Yuseong-gu
      Daejeon 305-701
      Republic of Korea
      Phone 1:

      Research Areas: MEMS, NEMS, contact switches, display technologies, nanowire gas sensors

      Professional Memberships: IEEE (EDS)

      Biography: Jun-Bo Yoon received Ph.D. degree in electrical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 1999.

      From 1999 to 2000, he was with the University of Michigan, Ann Arbor, MI, USA, as a Postdoctoral Research Fellow. In 2000, he returned as a Research Assistant Professor to the Department of Electrical Engineering, KAIST, where he is currently a Professor. He was with Stanford University, Stanford, CA, USA, from 2008 to 2009 on his sabbatical leave. He has been working in the MEMS fields for 20 years.

      He has made contributions to the world's smallest/lowest-voltage nanoelectromechanical switches, invention of the 3-D diffuser lithography, and many high-Q RF MEMS components. He has authored or coauthored more than 200 journal and conference papers. He is on the Editorial Boards of the IOP Journal of Micromechanics and Microengineering and an Editor-in-Chief of the Micro and Nano Systems Letters (Springer).

      Dr. Yoon received the Excellent Teaching Awards from the Department of Electrical Engineering in 2003, 2007, and 2011, and from KAIST in 2006. He has served as a Technical Program Committee Member for Transducers 2009-2011, IEEE MEMS 2009-2010, and as an Executive Program Committee Member for the Transducers 2013-2015.

    • Hans Zappe
       - Senior Editor
      Hans Zappe portrait
      Gisela and Erwin Sick Professor of Micro-optics
      Department of Microsystems Engineering, University of Freiburg
      Georges-Kohler-Allee 102
      Freiburg 79110
      Phone 1:
      +49 761 203 7560

      +49 761 203 7562

      Research Areas: Optical microsystems, tunable micro-optics, medical micro-optics, printable micro-optics

      Professional Memberships: IEEE Photonics Society, SPIE, OSA

      Biography: Hans Zappe is the Gisela and Erwin Sick Professor of Micro-optics in the Department of Microsystems Engineering at the University of Freiburg, Germany. Born in France and raised in New York, he earned his Bachelor's and Master's degrees at MIT and his PhD from the University of California, Berkeley, all in Electrical Engineering. After pursuing research activities in electronics, integrated optics and semiconductor lasers at IBM, the Fraunhofer Institute for Applied Solid State Physics and the Centre Suisse d'Electronique et de Microtechnique, he joined the University of Freiburg in 2000, where he was Dean of Engineering from 2008 to 2010. His current research interests focus on tunable micro-optics, optical micro-systems for medical applications and printable micro-optics.

    • Haixia Zhang
      Haixia Zhang portrait
      Institute of Microelectronics, Peking University
      Beijing 100871
      Phone 1:

      Research Areas: MEMS

      Professional Memberships: IEEE Senior Member

      Biography: Haixia (Alice) Zhang, has been Professor at Institute of Microelectronics at Peking Universituy since 2007.

      She received Ph.D. degree in Mechanical Engineering from the Huazhong University of Science and Technology. After finishing postdoctoral research at the Tsinghua University, she joined the faculty of the Institute of Microelectronics in 2001. From 2004 to 2006, She was a visiting professor at the University of California, Davis and the Case Western Reserve University.

      Devoted to research in micro/nanotechnology, she published 100+ papers in prominent journals and 6 books/book chapters. She served on the chair of IEEE NEMS2013 Conference, the organizing chair of Transducers'11. She is the founder of the International Contest of Applications in Nano-micro Technologies (iCAN) since 2007. She won National Invention Award of Science & Technology at 2006.

    • Yitshak Zohar
      Yitshak Zohar portrait
      Professor of Aerospace and Mechanical Engineering
      University of Arizona
      1130 N. Mountain Ave
      Tucson, Arizona 08844
      Phone 1:


      Research Areas: 
      - Biomicrofluidics: microscale manipulation of bio-species such as proteins, cells and tissues in microfluidic systems
      - Microscale fluid mechanics and heat transfer: experimental and theoretical analysis of thermo-fluidic phenomena in microsystems
      - Microsensors and microactuators: design and fabrication of integrated microsnsors and microactuators
      - Integrated microfabrication technology: development of silicon-, glass-, polymer- and protein-based techniques for device fabrication

      Professional Membership:

      Biography:  Yitshak Zohar has been Professor of Aerospace and Mechanical Engineering since 2004 and Biomedical Engineering since 2010 at the University of Arizona in Tucson, AZ, USA. Prior to that, he was on the faculty of the Mechanical Engineering Department at the Hong Kong University of Science and Technology in Hong Kong from 1992 to 2003. He obtained his Ph.D. degree in Aerospace Engineering from the University of Southern California in 1990, and received both B.S. and M.S. degrees from the Technion-Israel Institute of Technology in Aeronautical Engineering in 1981 and 1984, respectively. Yitshak Zohar is a Fellow of the American Society of Mechanical Engineers (ASME). He was a General Co-Chair of MEMS 2008 and, over the years, served on the editorial boards of Journal of MEMS, Microfluidics & nanofluidics, Sensors & Actuators A: Physical, and Journal of Physical Chemistry & Biophysics.


Hiroyuki Fujita

Carlos H. Mastrangelo