Kin Leong Pey



Singapore University of Technology and Design
287 Ghim Moh Road 04-00 Singapore 279623
Phone: 65 679 06371

Dr. Pey Kin Leong received his Bachelor of Engineering (1989) and Ph.D (1994) in Electrical Engineering from the National University of Singapore. He has held various research positions in the Institute of Microelectronics, Chartered Semiconductor Manufacturing, Agilent Technologies and National University of Singapore. He is currently a Professor, Head of the Microelectronics Division, Director of Nanyang Nanofabrication Center and Director of the Microelectronic Center in the School of Electrical & Electronics Engineering, Nanyang Technological University, Singapore and holds a concurrent Fellowship appointment in the Singapore-MIT Alliance (SMA).

Dr. Pey is a senior member of IEEE and an IEEE EDS Distinguished Lecturer, and has been the organizing committee member of IPFA since 1995. He was the General Chair of IPFA2001, Singapore and the co-General Chair of IPFA2004, Hsinchu, Taiwan. KL Pey was the Guest Editor of IEEE Transactions on Devices and Materials Reliability in 2003-05, and the Chair of the Singapore IEEE REL/CPMT/ED Chapter in 2004/05 and 2009 and served on the 2006/07/08 IRPS technical subcommittee, IPFA’02 to IPFA’06, IPFA’08 and IPFA’09 technical subcommittee and 2007 IEDM CMOS & Interconnect Reliability and 2008 IEDM Characterization, Reliability and Yield sub-committee.

Dr. Pey has published more than 145 international refereed publications and 150 technical papers at international meetings/conferences and holds 33 US patents. Dr. Pey's research focuses are on pulsed laser annealing for channel engineering for nano-scale CMOS, advanced alloy silicide for nanostructures and nanodevices and transistor reliability in dielectric breakdown and advanced interconnects. Dr. Pey pioneers in using physical analysis techniques such as TEM and EELS in the study of breakdown mechanisms in ultrathin SiON and high-k gate stack.