Lis K. Nanver

Silicon and Column IV Semiconductor Devices, Materials, Processing and Packaging


University of Twente
Faculty of Electrical Engineering
Mathematics and Computer Science
Building 15: Carré 2635
PO Box 217
7500 AE Enschede
The Netherlands
Phone: 053 489 2754

Lis K. Nanver (M’80) received a masters degree in physics from the University of Aarhus, Denmark, in 1979, and a docteur ingenieur degree in physics applied to telecommunications from the Ecole Nationale Supérieure des Télécommunications (ENST), Paris, France, in 1982, on the subject of charge-coupled device simulations. She received a Ph.D. degree in electrical engineering from Delft University of Technology, The Netherlands, in 1987. In her doctoral work she developed a medium frequency BiFET IC-process and made it available to designer groups.

In 1987 she continued her research on silicon devices and integration processes in DIMES, TU Delft, from 2001-2015 as professor heading the Silicon Device Integration Group. Mainly in cooperation with either RF/microwave or smart sensor IC designer groups she developed several new processing techniques. Her silicon-on-glass substrate-transfer process allowed true two-sided device contacting and was a basis for investigations leading to a better understanding of the electrothermal behavior of bipolar transistors. She has pioneered several ultrashallow diode technologies involving techniques such as laser annealing, Al-mediated solid-phase epitaxy and chemical-vapor deposition (CVD). The research on pure-dopant CVD processes for creating extremely shallow diodes (PureB for Si and PureGaB for Ge devices) has resulted in several leading-edge applications such as high-linearity silicon-on-glass varactor diodes, Si photodiode detectors for low penetration-depth beams and low-leakage Ge-on-Si photodiodes. Prof. Nanver is at present continuing her research as guest professor at University Twente, Enschede, The Netherlands and Aalborg University, Aalborg, Denmark.

She has published more than 250 journal and conference articles, has authored two book chapters, and has been awarded 4 patents. Prof. Nanver has served on the committees of BCTM and ESSDERC. The work of her group has received prizes including the 2010 IEDM Roger Haken Award and the 2011 I2MTC Best Paper Award.