Editor-in-Chief and Editors
The first issue of IEEE/JMEMS appeared in March, 1992 and the Journal was published quarterly from 1992 to 2002 when it changed to a bimonthly format.
From 1992 to 1997, Dr. William Trimmer was the first Editor-in Chief (EiC) and was succeeded by Professor Richard S. Muller of the University of California, Berkeley from 1997 to 2012 and Professor Christofer Hierold of the Swiss Federal Institute of Technology in Zurich from 2012 to 2019. Gianluca Piazza, Professor at Carnegie Mellon University, became the EiC in March of 2019.
The JMEMS Editorial Board plays a key role in assuring the archival quality of published papers. One of the Editorial Board members is responsible for the review process of each paper and that Editor is identified in a footnote on the first page of each accepted paper. Those members of the Editorial Board, who are designated as Senior Editor, are sometimes assigned the responsibilities of Editor-in-Chief for selected submitted papers to JMEMS.
Prof. Gianluca Piazza - Director of Claire and John Bertucci Nanotechnology Laboratory
Chong H. Ahn - Professor
- Microfluidics Devices and BioMEMS: Polymer smart passive microfluidic devices and BioMEMS
- Biosensors and Lab-on-a-Chips:In vitro diagnostics (IVD) with immunosensors on polymer lab-on-a-chip platform
- Point-of-Care (POC) Healthcare Systems: POCT clinical diagnostics for smart patient care systems
- Neurosurgical Monitoring Medical Devices: Monitoring traumatic brain injury (TBI) using smart microcatheter and lab-on-a-tube
Professional Memberships: IEEE/EDS, ASME, IoP
Biography: Dr. Ahn is Mitchell P. Kartalia Chair Professor of Engineering in the Department of Electrical Engineering and Computing Systems at the University of Cincinnati. He obtained his Ph.D. degree in Electrical Engineering from Georgia Institute of Technology in 1993. Since joining the University of Cincinnati in 1994, he has successfully initiated and established an excellent Microfluidics and BioMEMS program (www.biomems.uc.edu). He has published over ~300 journal and peer-reviewed conference papers, and chaired numerous international conferences and steering committees. His research interests include the design, simulation, fabrication and characterization of MEMS and BioMEMS devices, microfluidic device and systems, biosensors and biochips, lab-on-a-chips, in vitro diagnostics (IVD), and point-of-care clinical diagnostics or neurosurgical monitoring. He received the Scientific Leadership Award at the 4th Annual BioMEMS and Biomedical Nanotechnology World in 2003 and received the Best Journal Paper Award of the IEEE Sensor Journal in 2009. He is currently serving as an Editor of the IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), and Editorial Advisory Boards of the Journal of Micromechanics and Microengineering (JMM), and Journal of Microfluidics and Nanofluidics. He is now a Fellow at the Institute of Physics. He was the founder of Siloam Biosciences Inc. (www.siloambio.com) in Cincinnati, Ohio, USA.
Research Areas: New materials and fabrication methods for MEMS; nanoscale MEMS
Professional Memberships: IEEE
Biography: Juergen Brugger is Professor at the Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland in Microengineering and Materials Science. Before joining EPFL he was at the MESA+ Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. He received his Master in Physical-Electronics and his PhD degree from Neuchatel University, Switzerland.
Since 1995, Dr. Brugger is active in the field of interdisciplinary and experimental micro and nanotechnologies with a focus on novel manufacturing techniques for integrated and multi-functional micro/nanosystems. Dr. Brugger co-invented more than 15 patents and received two IBM patent awards. He served on the program committees of IEEE-IEDM, IEEE-MEMS, IEEE NEMS, Transducers, Eurosensors and MNE conferences. He served as General Chair for the Eurosensors XXIII, Lausanne, 2009, co-chair of MNE 2014, and chair of IEEE-MEMS 2015. Juergen Brugger is senior member of IEEE, co-founder of the start-up MicroLeman Sarl and board member of the "Prix Omega Foundation". His private pursuits include outdoor activities such as mountaineering and sailing as well as indoors sports such as the combination of Single Malts and Jazz music.
Lionel Buchaillot - Dr.
Research Areas: Mechanical Sensors and Systems, RF MEMS / MEMS for Microwaves and Scientific Micro- and Nanoinstruments
Professional Membership: IEEE
Biography: Lionel Buchaillot is a CNRS Senior Researcher. He received the M.S degree in Material Sciences and the PhD degree in Mechanical Engineering respectively in 1991 and 1995, both from the Université de Franche-Comté, Besançon, France. Between 1995 and 1997, he has been with the Laboratory for Integrated MicroMechatronic Systems (LIMMS-CNRS-IIS, The University of Tokyo, Japan) as a JSPS post-doctoral fellow working on thin film shape memory alloys actuators for MEMS. In 1997, he worked as a R&D engineer for the SFIM Company (now SAFRAN) and AVIAC Technologies Company. In 1998, he has joined the CNRS in the ISEN Department of the Institute of Electronics, Microelectronics and Nanotechnology (IEMN). He was the Head of the "Silicon-based MEMS" research group at IEMN between 2001 and 2009. In 2010, he became director of IEMN. His research focuses on Mechanical Sensors and Systems, RF MEMS / MEMS for Microwaves and Scientific Micro- and Nanoinstruments. He has authored or co-authored more than 100 papers and several book chapters. He is recipient of the CNRS Bronze Medal.
Rob Candler - Professor
Rob N. Candler received the B.S. in Electrical Engineering from Auburn University in 2000, and he received the M.S. and Ph.D. in Electrical Engineering from Stanford University as an NDSEG and NSF Fellow in 2002 and 2006, respectively. He is currently a Professor of Electrical and Computer Engineering at the University of California, Los Angeles with joint appointments in the Department of Mechanical and Aerospace Engineering and the California NanoSystems Institute. He also serves as the Faculty Director of the Nanoelectronics Research Facility (NRF), a multi-user nanofabrication facility. Before coming to UCLA, he spent three years in Corporate R&D at the Bosch Research and Technology Center, serving concurrently as a consulting assistant professor at Stanford University with the Departments of Electrical and Mechanical Engineering. Prof. Candler’s research expertise is in micro- and nano-electromechanical systems (MEMS/NEMS), including microscale magnetic devices for electron beam manipulation, the fundamental behavior of MEMS/NEMS resonators, sensing systems for surgical tools, and multiferroics. He was awarded the Young Investigator Award from the Army Research Office and the Northrop Grumman Excellence in Teaching Award from the UCLA Henry Samueli School of Engineering and Applied Sciences, both in 2012. He also received the NSF CAREER Award in 2014 and is currently a senior member in the National Academy of Inventors and a Fellow of the American Institute for Medical and Biological Engineering. He has authored or co-authored more than 100 papers in major conferences and journals, four book chapters, and six patents.
Dong-il (Dan) Cho - PhD
MEMS/NEMS Fabrication Processes
MEMS and Controls Applications to Biomedical and Robotics Technologies
Professional Memberships: IEEE (EDS, RAS, IES), IFAC
Biography: Dong-Il (Dan) Cho received the B. S. degree from the Carnegie Mellon University in 1980 and the M. S. and Ph. D. degrees from the Massachusetts Institute of Technology (MIT). In 1987, he joined the Mechanical and Aerospace Engineering Department at Princeton University as an Assistant Professor. Since 1993, he has been with the Department of Electrical and Computer Engineering at Seoul National University.
His research interests are in MEMS and control technologies. He has served as the editor of IEEE/ASME Journal of MEMS since its first issue published in 1992, and was appointed as the Senior Editor of the journal in 2012. In addition, he served as the President of the MEMS Research Association of Korea from 2003 to 2007. In addition, he currently serves as the Vice-Chair of the Technical Board of IFAC (International Federation of Automatic Control). Professor Cho is a Senior Member of the National Academy of Engineering of Korea (NAEK).
Research Areas: Microfluidic systems for bioanalysis; Piezoelectric MEMS
Professional Memberships: IEEE, ACS
Biography: Don L. DeVoe is a Professor of Mechanical Engineering at the University of Maryland, College Park. He received his Ph.D. degree in Mechanical Engineering in 1997 from the University of California, Berkeley, with a focus in piezoelectric microsystems. He is a recipient of the Presidential Early Career Award for Scientists and Engineers from the National Science Foundation for advances in microsystems technology, and is a Kavli Fellow of the National Academy of Sciences.
Univ. Bordeaux - CNRS
Isabelle Dufour graduated from the École Normale Supérieure de Cachan, Cachan, France, in 1990, and received her Ph.D. and H.D.R. degrees in engineering science from the University of Paris-Sud, Orsay, France, in 1993 and 2000, respectively. She was a CNRS Research Fellow from 1994 to 2007, first in Cachan, working on the modeling of electrostatic actuators (micromotors and micropumps) and then, after 2000, in Bordeaux, working on microcantilever-based chemical sensors. She is currently a Professor of Electrical Engineering at the University of Bordeaux, Bordeaux, France. Her research interests are in the areas of MEMS-based sensors for chemical detection, rheological measurements and material characterization. She is currently the group leader of the “Organic Electronics and Microsystems Research Group” of the IMS Laboratory, Bordeaux, France.
Research Areas: Electrostatic micro-actuators: e.g. micromirrors and switches. Electrostatic resonators: e.g. electrostatic and electret transducers that are perfectly linear or that have a tailored nonlinear response. Modeling of micro-scale transducers: theoretical investigation and derivation of design rules for: electrostatic, piezoelectric, thermoelastic and electromagnetic transduction.
Professional Memberships: IEEE
Biography:David Elata is a Professor at the Faculty of Mechanical Engineering of the Technion - Israel Institute of Technology. He is the head of the MEMS laboratory and a member of the Technion Russell Berrie Nanotechnology Institute. He earned a D.Sc. from the Technion in 1993, and has previously worked in the fields of Computational Mechanics, Geophysics, and Continuum Mechanics. His current research interests are in modeling and design of micro actuators and development of test devices for material and structure characterization at the micro-scale.
Research Areas: Micro- and nanofabrication, thin films, MEMS, microfluidics, chemical and biological microsystems
Biography: Sami Franssila is a professor of materials science at Aalto University, Helsinki, Finland. He received the B.Sc. and M.Sc. degrees in physics from the University of Helsinki, Helsinki, Finland, and the Ph.D. degree in 1995 from Helsinki University of Technology, with a thesis on plasma etching. He has worked at VTT and IMEC before joining Aalto University in 1998. He has authored or coauthored 140 peer-reviewed journal articles and the textbook Introduction to Microfabrication (John Wiley, 2010). He has served in Transducers executive program committee, as well as in MEMS and MicroTAS technical program committees.
His current research interests are:
1) Micro and nanofabrication, including silicon etching (wet and dry), bonding, hybrid materials
2) Surfaces and coatings, atomic layer deposition, plasma coatings
3) Microfluidics, capillarity, superhydrophobicity
4) Chemical and biomicrosystems, separation systems, ionization, cell growth platforms
Department of Electrical and Computer Engineering and the Institute for Systems Research
Research Areas: Integrated Micro, Nano and Bio Systems, Chemical and Biological Sensing, Small-scale Energy Storage, Harvesting and Conversion
Professional Memberships: IEEE, MRS, AVS, ASEE, AAAS
Biography: Reza Ghodssi is the Herbert Rabin Distinguished Chair in Engineering, Director of the Institute for Systems Research (ISR), and Director of the MEMS Sensors and Actuators Lab (MSAL) in the Department of Electrical and Computer Engineering (ECE) at the University of Maryland (UMD). He is also affiliated with the Fischell Department of Bioengineering (BIOE), the Maryland NanoCenter, the University of Maryland Energy Research Center (UMERC), and the Materials Science and Engineering Department (MSE) at UMD.
Dr. Ghodssi's research interests are in the design and development of microfabrication technologies and their applications to micro/nano/bio devices and systems for chemical and biological sensing, small-scale energy conversion and harvesting. Dr. Ghodssi was chair of the NSF Workshop on Micro, Nano, Bio Systems in 2012 and the 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2009). He also served as the Americas Technical Program Committee chair of IEEE SENSORS 2010, 2011, and 2012 conferences. Dr. Ghodssi has over 95 refereed journal publications and is the co-editor of the "MEMS Materials and Processes Handbook" published in 2011.
Prof. Songbin Gong (S’06–A’09–M’12–SM’17) received the Ph.D. degree in electrical engineering from the University of Virginia, Charlottesville, VA, USA, in 2010. He is currently an Associate Professor and the Intel Alumni Fellow with the Department of Electrical and Computer Engineering and the Micro and Nanotechnology Laboratory, University of Illinois at Urbana–Champaign, Urbana, IL, USA. His research primarily focuses on design and implementation of radio frequency microsystems, components, and subsystems for reconfigurable RF front ends. In addition, his research explores hybrid microsystems based on the integration of MEMS devices with photonics or circuits for signal processing and sensing. He is a recipient of the 2014 Defense Advanced Research Projects Agency Young Faculty Award, the 2017 NASA Early Career Faculty Award, and 2019 UIUC College of Engineer Dean’s Award for Excellence in Research. Along with his students and postdocs, he received the Best Paper Awards from the 2017 and 2019 IEEE International Frequency Control Symposium, the 2018 International Ultrasonics Symposium, and won 2nd place in Best Paper Competition at the 2018 IEEE International Microwave Symposium. He currently serves as the Chair of MTT TC2 and TC 21 of the IEEE Microwave Theory and Techniques Society.
Research Areas: Physical MEMS, energy harvesting, laser materials processing, wireless sensors
Professional Memberships: IEEE, IET
Biography: Andrew Holmes received the BA degree in natural sciences from Cambridge University in 1987, and the PhD degree in electrical engineering from Imperial College London in 1992. He is currently Professor of Micro-Electro-Mechanical Systems (MEMS) in the Department of Electrical and Electronic Engineering, Imperial College London. He has worked on a range of topics in optical signal processing, integrated optics and MEMS, and has published around 150 journal and conference papers in these areas. His current research interests include applications of laser processing in MEMS manufacturing, novel assembly technologies for MEMS and electronics, micro-power generation by energy harvesting, power conditioning electronics for energy harvesters and ultra-low power radio for wireless sensors. He is a co-founder and director of Microsaic Systems plc, an Imperial College spin-out company started in 2001 to exploit Imperial College MEMS research.
Research Areas: N/MEMS fabrication technology and applications in resonators, actuators, inertial navigation, energy conversion, and biosensing.
Professional Memberships: IEEE
Biography:Roger T. Howe has been a Professor at Stanford University since 2005, after having held faculty positions at Berkeley, MIT, and CMU, where his group is researching N/MEMS applications in thermionic energy conversion and biomolecular sensing. In 2004, he co-founded Silicon Clocks, which was acquired by Silicon Laboratories in 2010. He served as Co-Chair of IEEE MEMS 1990 in Napa, California and as Technical Chair of Transducers 2003 in Boston, Massachusetts. He is an IEEE Fellow and a member of the U.S. National Academy of Engineering. Since 2011, he is the Director of the National Nanotechnology Infrastructure Network (NNIN).
Research Areas: Microfabrication technology, biological and chemical microsensors, microactuators, optical microelectromechanical systems, smart materials and micro-/nanostructures, lab on a chip, and biomimetics and bioinspiration.
Professional Memberships: IEEE, OSA
Biography: Hongrui Jiang is the Vilas Distinguished Achievement Professor in the Department of Electrical and Computer Engineering at the University of Wisconsin - Madison. He is also a Faculty Affiliate in the Department of Biomedical Engineering, a Faculty Member of the Materials Science Program, and a Member of the McPherson Eye Research Institute at UW-Madison. He received the B.S. degree in physics from Peking University, Beijing, China, and the M.S. and Ph.D. degrees in electrical engineering in 1999 and 2001, respectively, from Cornell University, Ithaca, NY. From 2001 to 2002, he was a Postdoctoral Researcher with the Berkeley Sensor and Actuator Center, University of California at Berkeley. Dr. Jiang was the recipient of the National Science Foundation CAREER Award and the Defense Advanced Research Projects Agency Young Faculty Award in 2008, the H. I. Romnes Faculty Fellowship of the University of Wisconsin in 2011, the NIH Director's New Innovator Award in 2011, and the Vilas Associate Award of the University of Wisconsin in 2013. Dr. Jiang has published over 100 peer reviewed publications and holds 6 issued US patents.
Chang-Jin "CJ" Kim - Professor
Research Areas: MEMS
Professional Memberships: IEEE; ASME; APS; AAAS
Biography: CJ Kim received his Ph.D. in Mechanical Engineering from the University of California at Berkeley in 1991. He received his B.S. from Seoul National University and M.S. from Iowa State University along with the Graduate Research Excellence Award. Since joining the faculty at UCLA in 1993, he has established a MEMS Ph.D. major field in the Mechanical and Aerospace Engineering Department. Directing the Micro and Nano Manufacturing Laboratory, his research is in MEMS and nanotechnology, including design and fabrication of micro/nano structures, actuators and systems, with a special interest in utilizing surface tension. A fellow of ASME, Professor Kim is the recipient of TRW Outstanding Young Teacher Award, NSF CAREER Award, ALA Achievement Award, and Samueli Outstanding Teaching Award. He has served on numerous committees, including IEEE MEMS Conference and Transducers, and chaired conferences, including IEEE MEMS 2014. He is currently serving as a Senior Editor for the IEEE/ASME Journal of MEMS and on the Editorial Advisory Board for IEEJ Transactions on Electrical and Electronic Engineering. He has also been active in the commercial sector, as a board member, scientific advisor, consultant, and founder of start-ups.
Eun Kim - Professor and Chair
Research Areas: Acoustic, Piezoelectric and Power MEMS
Professional Membership: IEEE
Biography: Eun Sok Kim (M’91–SM’01–F’11) received the B.S., M.S., and Ph.D. degrees, all in electrical engineering, from the University of California, Berkeley, in 1982, 1987, and 1990, respectively. In Fall 1999, he joined the University of Southern California, Los Angeles, CA, and is currently a Professor and the Chair in the Ming Hsieh Department of Electrical Engineering - Electrophysics. From Spring 1991 to Fall 1999, he worked at the Department of Electrical Engineering in the University of Hawaii at Manoa as a faculty member. Previously, he worked at IBM Research Laboratory, San Jose, CA, NCR Corp., San Diego, CA, and Xicor Inc., Milpitas, CA as a co-op student, design engineer, and summer-student engineer, respectively. Prof. Kim is an expert in piezoelectric and acoustic MEMS, having published more than 200 refereed papers and 10 issued patents in the field, and is a Fellow of the IEEE and the Institute of Physics (IOP). He serves as an editor for IEEE/ASME Journal of Microelectromechanical Systems and on the editorial board for Journal of Micromechanics and Microengineering. He has been awarded a NSF CAREER Award (FY 95-99) and the IEEE Transactions on Automation Science and Engineering 2006 Best New Application Paper Award.
Research Areas: Fabrication technology for MEMS, Actuators for MEMS, MEMS for Biomedical Application
Professional Memberships: IEEE/RAS
Biography: Satoshi Konishi received the BS degree in 1991 in Electronics Engineering, the MS degree in 1993 and the PhD degree in 1996 in Electrical Engineering, from the University of Tokyo, Tokyo, Japan. He is currently Professor with Ritsumeikan University, Shiga, Japan, where he joined the faculty in 1996. He also serves as the director of bio medical devices center at Ritsumeikan University. He is also visiting Professor with Shiga University of Medical Science since 2007. He is also visitng Professor with Graduate School of Phrmaceutical Sciences, Kyoto University since 2009. He joined ULB as visiting Professor in 2011.
He is the Editorial Board Member of Sensors and Actuators A, the Editorial Board Member of Journal of Micromechanics and Microengineering. He is also International Steering Committee Member of Transducers and IEEE International Conference of MEMS. Especially he served as general co-chair of International Conference of MEMS 2007 in KOBE.
His study is devoted to microelectromechanical systems (MEMS) covering broad ranges from fundamental to applied fields. His current research focuses on biomedical MEMS, especially multiscale interfaces in BME.
Giacomo Langfelder - Associate Professor and Lecturer of MEMS and Microsensors
Giacomo Langfelder received his MS in Electronics Engineering in 2005, and his PhD in Information Technology in 2009 from Politecnico di Milano, Italy, where he is currently an Associate Professor and Reader of MEMS and Microsensors. His scientific research topics include sensors, their front-end analog, digital and mixed-signal electronics, and related applications. He is now researching in the field of systems for low-noise, low-power applications, including NEMS-based sensors, FM accelerometers and gyroscopes, magnetometers, resonators and micromirrors.
In recent years, he served as a TPC member for the IEEE MEMS and the IEEE Inertial conferences, as an Associate Editor for the IEEE Sensors Letters, and as a Tutorial or Invited speaker at various conferences. Within his research, he has been tightly collaborating with industries for more than a decade with 130+ publications and 10+ patents. In 2014, he was the co-founder of ITmems s.r.l., a spin-off company dedicated to the development of Instrumentation for the characterization of MEMS inertial sensors.
Dr. Chengkuo Lee received his M. Sc. Degree from Rutgers University, New Brunswick, NJ, USA, in 1993, and Ph.D. degree from The University of Tokyo, Tokyo, Japan, in 1996. After his PhD, he has worked as JST fellow at AIST, Tsukuba, Japan in 1996. He has worked at ITRI, Hsinchu, Taiwan in 1996. From 1997 to 2000, he was the manager of MEMS division at Metrodyne Microsystems, Hsinchu, Taiwan. He cofounded Asia Pacific Microsystems, Inc. (APM) in 2001, where he was Vice President of R&D from 2001 to 2005. From 2006 to 2009, he was a Senior Member of the Technical Staff at the Institute of Microelectronics (IME), A-STAR, Singapore. Currently, he is the director of Center for Intelligent Sensors and MEMS at National University of Singapore, Singapore.
His research interests include sensors, MEMS, NEMS and flexible devices for IoT, energy harvesting, metamaterials and biomedical applications. He has trained 20+ PhD students graduated from ECE Dept., NUS. He has co-authored 300+ journal articles and 300+ conference papers. His ORCID is 0000-0002-8886-3649. He serves on steering committee and technical program committee for various conferences such as Transducers 2015, IEEE MEMS 2015, IEEE NEMS 2015, IEEE SENSORS 2018, IEEE MEMS 2019 and Transducers 2019, and IEEE MEMS2020, etc. He has also chaired many conferences including IEEE NEMS’18, OMN ’16 and ’14, and ISMM ’14, etc.
Research Areas: MEMS (Microelectromechanical Systems); NEMS (Nanoelectromechanical Systems); Nanotechnology; design and manufacturing of microsensors and microactuators; development of micromachining processes by silicon surface/bulk micromachining; micro moulding process; mechanical issues in microelectromechanical systems (MEMS) including heat transfer, solid/fluid mechanics and dynamics
Professional Memberships: IEEE, ASME
Biography: Liwei Lin joined UC-Berkeley in 1999 and is now Professor at the Mechanical Engineering Department and co-Director at the Berkeley Sensor and Actuator Center. He received his PhD degree in Mechanical Engineering from the University of California at Berkeley in 1993. His research interests are in design, modeling and fabrication of micro/nano structures, micro/nano sensors and micro/nano actuators as well as mechanical issues in micro/nano systems including heat transfer, solid/fluid mechanics and dynamics. Dr. Lin is the recipient of the 1998 NSF CAREER Award for research in MEMS Packaging and the 1999 ASME Journal of Heat Transfer best paper award for his work on micro scale bubble formation. He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004~2005. He is an ASME Fellow and has 15 issued US patents in the area of MEMS/NEMS. He served as the general co-chair of the 24th international conference on Micro Electro Mechanical Systems. Currently, he serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems and the North and South America Editor of Sensors and Actuators -A Physical.
University of Seville
Research Areas: Microfluidics, BioMEMS, inertial sensors, polymer fabrication
Professional Memberships: IEEE, IES, EDS
Biography: Antonio Luque received the M.Sc. and Ph.D. degrees in electrical engineering from the University of Seville, Seville, Spain, in 2000 and 2005, respectively. He currently holds the position of Associate Professor in the Department of Electronics Engineering, University of Seville. His research interests include microﬂuidics, inertial sensors, BioMEMS, and polymer microsystems. Dr. Luque was the Chairman of the IEEE Industrial Electronics Society Technical Committee on MEMS and Nanotechnology in 2008–2009, and member of the IEEE JMEMS Steering Committee during 2013. He was a recipient of the Burgen Scholarship from the Academia Europaea in 2007.
Research Areas: surface and materials science and engineering of micro-/nanosystems
Professional Memberships: IEEE, MRS, APS, ECS, ACS, AICHE
Biography: Roya Maboudian is professor of chemical engineering, associate director of the Center of Integrated Nanomechanical Systems (COINS), and faculty affiliate of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, DC; and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena. Prof. Maboudian's research interest is in the surface and materials science and engineering of micro/nanosystems. The main research activities in her group currently include investigation of the tribological issues in micro/nanoelectromechanical systems; silicon carbide-based sensors for harsh environment applications; nanowire and graphene based sensors and energy technologies; development of electrochemical processes for low-cost thin-film photovoltaics; and biologically inspired materials design. Prof. Maboudian has coauthored over 220 papers in peer-reviewed archival journals. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is currently serving as editor to the IEEE Journal of Microelectromechanical Systems, as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS, and as advisory board member to ACS Applied Materials and Interfaces.
Ellis Meng is Professor of Biomedical Engineering and Electrical and Computer Engineering in the Viterbi School of Engineering at the University of Southern California where she has been since 2004. She also serves as the Vice Dean of Technology Innovation and Entrepreneurship. She was Dwight C. and Hildagarde E. Baum Chair of the Department of Biomedical Engineering from 2015-2018 and inaugural holder of a Gabilan Distinguished Professorship in Science and Engineering from 2016-2019. She received the B.S. degree in engineering and applied science and the M.S. and Ph.D. degrees in electrical engineering from the California Institute of Technology (Caltech), Pasadena, in 1997, 1998, and 2003, respectively. Her research interests include biomedical microelectromechanical systems (bioMEMS), implantable biomedical microdevices, microfluidics, multimodality integrated microsystems, microsensors and actuators, biocompatible polymer microfabrication, and packaging. Her honors include the NSF CAREER award, Wallace H. Coulter Foundation Early Career Award, 2009 TR35 Young Innovator Under 35, Viterbi Early Career Chair, ASEE Curtis W. McGraw Research Award, 2018 IEEE Engineering in Medicine and Biology Society Technical Achievement Award, and 2019 IEEE Sensors Council Technical Achievement Award. She is a fellow of IEEE, ASME, BMES, AIMBE, and NAI. In addition to serving on the editorial board for IEEE JMEMS, she is also on the board of Journal of Micromechanics and Microengineering and Frontiers in Mechanical Engineering, Micro- and Nano-mechanical Systems. She was co-chair of the 2017 IEEE MEMS conference. She is also an active educator and authored a textbook on bioMEMS.
Sabina Merlo - Professor
Research Areas: Optical MEMS, Optical methods for MEMS testing, Optical Biosensors, Optofluidics, Photonic crystals, Interferometry, Fiberoptic sensors and components
Professional Memberships: IEEE/LEOS
Biography:Sabina Merlo received the Ph.D. degree in Electronic Engineering in 1992 from University of Pavia, Italy, and the MSE in Bioengineering in 1989 from the University of Washington, Seattle, USA, with a Rotary Foundation Scholarship. Assistant Professor at University of Pavia since 1993, she is Associate Professor of Electronics within Dipartimento di Ingegneria Industriale e dell Informazione of the same University since 2001.
Nanyang Technological University
Research Areas: MEMS microfabrication and packaging; Physical, microfluidic and biological sensors; Biomimetic and bio-inspired MEMS/NEMS; Energy harvesting MEMS
Professional Memberships: IEEE/EDS
Biography:Jianmin Miao received his bachelor degree from the Tongji University in Shanghai, Dipl.-Ing. (Master degree) and Dr.-Ing. (PhD) from the Darmstadt University of Technology, Germany. After spending several years in industry for sensor/MEMS development, he joined the Nanyang Technological University in 1998 as faculty to establish the Micromachines (MEMS) Centre as the Founding Director. Professor Miao has collaborated with MIT at the Singapore-MIT Alliance for Research and Technology (SMART) since 2008 and was a visiting professor at MIT in 2013. He has authored or co-authored numerous papers in international journals and conferences, several book/chapters, and holds dozen patents. He has served as Chair and Co-Chair of MEMS/nanotechnology international conferences, technical committee member of international conferences, including the IEEE-MEMS and Transducers conference. He was invited by several international MEMS/Nanotechnology conferences as plenary speaker, keynote lecturer, and invited speaker.
University of California at Berkeley
Research Areas: Integrated micromechanical signal processors and integrated sensors, merged circuit/micromechanical technologies, RF communications, integrated circuit design and technology, short- and long-term stability in micromechanical devices
Professional Memberships: IEEE/EDS, IEEE/SSCS, IEEE/UFFC
Biography: Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA. Prof. Nguyen is a Fellow of the IEEE and presently serves as the Vice President for Frequency Control in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society.
Indian Institute of Science
Research Areas: Dynamic MEMS, e.g., inertial MEMS, Microphones, CMUTs, PMUTs, and resonators. Energy dissipation at micro and nano scales. Energy harvesting. Mechanobiology. Nonlinear dynamics
Professional Memberships: IEEE, ISSS
Biography: Dr Rudra Pratap is a Professor and the Chairperson of the Centre for Nano Science and Engineering (CeNSE), and an associate faculty of the Department of Mechanical Engineering at the Indian Institute of Science, Bangalore. He specializes in MEMS and NEMS design. His other research interests include nonlinear dynamics, mechano-biology, and computational mechanics. Professor Pratap holds a Ph.D. degree from Cornell University, USA, a Masters degree from the University of Arizona, USA, and a B. Tech. from the Indian Institute of Technology, Kharagpur, India. Prior to joining IISc in 1996, he taught at the Sibley School of Mechanical and Aerospace Engineering, Cornell University, for two and a half years. He was also an 'Invited Professor' at EPFL, Lausanne, Switzerland during 2004-2005. He has been at the Indian Institute of Science, Bangalore, India, since 1996. He is a member of the Vision Group on Nanotechnology of Karnataka State. He has served on the editorial board of various journals. He is also the Chairman of i2n Technolgies Pvt Ltd, a company that he co-founded in 2010 for making nanotech hardware products. Dr. Pratap is a Fellow of the National Academy of Engineering.
Niels Quack is Assistant Professor at Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. He received the M. Sc. degree from Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland, in 2005, and the Dr. Sc. degree from Eidgenössische Technische Hochschule Zürich (ETH), Switzerland, in 2010.
Prior to joining EPFL, Niels was from 2011 to 2015 Postdoctoral Researcher and Visiting Scholar at the Berkeley Sensor and Actuator Center at University of California, Berkeley, CA, USA. From 2014 to 2015 he was Senior MEMS Engineer with sercalo Microtechnology, Neuchâtel, Switzerland.
Research interests include Photonic Micro- and Nanosystems, with an emphasis on Diamond Photonics and Silicon Photonic MEMS. He is Steering Committee Member of the IEEE International Conference on Optical MEMS and Nanophotonics (OMN), served as General Chair of the IEEE OMN 2018, General Chair of the Symposium Latsis 2019, Organizing Committee Member of Transducers 2019. He serves as Technical Program Committee Member of IEEE MEMS, ECOC and SPIE OPTO. He is senior member of IEEE, member of OSA and lifetime member of SPIE, and he has authored and co-authored more than 70 papers in leading technical journals and conferences.
Mina Rais-Zadeh - Senior Member
Research Areas: Electron devices for wireless communication and sensing applications and the related device physics, Resonant Sensors: e.g. uncooled infrared detectors, Gallium nitride MEMS and microsystems
Professional Memberships: IEEE EDS
Biography: Mina Rais-Zadeh received the B.S. degree in electrical engineering from Sharif University of Technology and M.S. and Ph.D. degrees both in Electrical and Computer Engineering from Georgia Institute of Technology in 2005 and 2008, respectively. From August 2008 to 2009, she was a Postdoctoral Research Fellow at Georgia Institute of Technology. Since January 2009, she has been with the University of Michigan, Ann Arbor, where she is currently an Associate Professor in the Department of Electrical Engineering and Computer Science.
Dr. Rais-Zadeh is the recipient of the NSF CAREER Award (2011), IEEE Electron Device Society Early Career Award (2011), NASA Early Career Faculty Award (2012), the Crosby Research Award from the University of Michigan (2013), National Academy of Engineering Frontiers of Engineering (2013), and ONR Young Investigator Award (2014). Together with her students, she received the best poster award at the Transducers conference (2013), the best paper award at the IEEE SiRF conference (2014), honorable mention at the IEEE IMS (2014), and was the finalist in student paper competitions at the SiRF (2007) and IMS (2011) conferences. She was the chairperson of the Display, Sensors and MEMS (DSM) sub-committee at the 2013 IEEE International Electron Devices Meeting (IEDM) and is a member of the 2014 IEDM Executive Committee and 2015 IEEE MEMS Executive Committee. She is a senior member of IEEE and has served as a member of the technical program committee of IEEE IEDM (2011-2013), IEEE Sensors Conference (2011-2014), the Hilton Head workshop (2012, 2014), the IEEE MEMS Conference (2014-2015), Transducers (2015), and IFCS (2015). She is an associate editor of the IEEE Electron Device Letters. Her research interests include electron devices for wireless communication and sensing applications and the related device physics, resonant micromechanical devices, RF MEMS, gallium nitride MEMS, and micro/nano fabrication process development.
- Electron devices for communication and sensing in Space and/or harsh environments and the related device physics
- Resonant Sensors: e.g. uncooled infrared detectors, Gallium nitride MEMS and Microsystems
- Phase change RF to optical micro-devices
Christian Rembe - Dr.
Research Areas: optical metrology, MEMS-testing, laser-Doppler vibrometry
Professional Memberships: IEEE, SPIE, DPG, VDI
Biography: Christian Rembe received the diploma in Physics from the University of Hanover, Hanover, Germany, in 1994. From 1994 to 1999, he was a scientific assistant at the University of Ulm, Ulm, Germany where he earned a doctor degree in Engineering. 1999 he joined the Berkeley Sensor & Actuator Center at the University of California, Berkeley as postdoctoral, research engineer with support of a Feodor-Lynen-Scholarship of the Alexander von Humboldt-Foundation and a UC Berkeley MacKay-Lecturer Fellowship. Since 2001 he is working as Manager Development Optics at Polytec GmbH, Waldbronn, Germany. His interests are optics, optical measurement techniques, microelectromechanical systems, and dynamic-system behavior. He is member of IEEE, SPIE, Verein Deutscher Ingenieure VDI, and the Deutsche Physikalische Gesellschaft DPG. He serves as an Editor of IEEE JMEMS since 2012 and is in the scientific committees of several international conferences in the field of optical measurement techniques. In 1999 he awarded one half of Research Award for Applied Sciences (Landesforschungspreis) of the state Baden-Württemberg, Germany.
Antonio J. Ricco - Senior Editor
Research Areas: Integrated microsystems, fluidics, biomedical diagnostics, bio/chemical sensors
Professional Memberships: American Chemical Society, Electrochemical Society, IEEE
Biography: Tony Ricco received BS and PhD degrees in Chemistry from UC Berkeley (1980) and MIT (1984), respectively. In Sandia National Laboratories' Microsensor R&D Department (1984 - 1998), he developed chemical microsensors and integrated microsystems. He was guest professor at the University of Heidelberg (winter 1996/97). From 1999 - 2003, he was ACLARA BioSciences' Director of Microtechnologies and Materials, developing consumable plastic microfluidic systems for genetic analysis, high-throughput pharmaceutical discovery, proteomics, and pathogen detection. He directed Stanford's National Center for Space Biological Technologies from 2004 - 2007; since 2007, he has served as NASA Ames Research Center's Chief Technologist for Small Spacecraft Payloads and Technologies while on leave from Stanford University. Beginning in 2003, he has participated in the founding, development, and projects of the Biomedical Diagnostics Institute (Dublin City University) as Adjunct Professor. Dr. Ricco is co-author of over 350 presentations, 200 publications, and 15 patents. He is a Fellow of The Electrochemical Society, former president of its Sensor Division, and currently Vice President of the Transducer Research Foundation. He served on the Editorial Advisory Board of Analytical Chemistry and is an Associate Editor of Sensors & Actuators B: Chemical as well as the Journal of Translational Engineering in Health and Medicine.
Pasqualina Sarro - Prof. Dr.
- novel materials and structures for MEMS and NEMS to be applied in health, environmental applications, automotive and scientific instrumentation
- 3D micro and nano-structuring; 3D integration schemes, including 3D interconnects
Professional Membership: IEEE/EDS
Biography: Lina Sarro is Professor of Microsystems Technology at the Delft University of Technology. Since 2009 she is also Head of the Microelectronics Department. She received the Laurea degree (cum laude) in solid-states physics from the University of Naples, Italy, in 1980. From 1981 to 1983, she was a post-doctoral fellow in the Photovoltaic Research Group of the Division of Engineering, Brown University, Rhode Island, U.S.A. In 1987, she received the Ph.D. degree in Electrical Engineering at the Delft University of Technology, the Netherlands. Since then, she has been with the Delft Institute of Microsystems and Nanoelectronics (DIMES), where she has been performing and supervising research in the field of integrated silicon sensors and MEMS technology. She has (co)-authored more than 500 publications. She is a member of the technical program committee and steering committee for several international conferences (IEEE MEMS, IEEE Sensors, Eurosensors, Transducers); Technical Program (co) chair for the IEEE Sensors 2002-2004 Conference General co-chair of IEEE MEMS 2009. Prof. Sarro is a member of the KNAW (Royal Netherlands Academy of Sciences) and an IEEE Fellow.
Other Website: http://ectm.et.tudelft.nl
Helmut Seidel - Prof. Dr. rer. nat.
Biography:Helmut Seidel received his Diploma in physics in 1980 from Ludwig-Maximilians-University in Munich and his Ph.D. in physical chemistry in 1986 from the Free University in Berlin, Germany.
In 1980 he joined the Fraunhofer-Institute for Solid-State Technology in Munich as a research scientist. His research focuses on MEMS ever since that time. In 1986 he joined the aerospace company Messerschmitt-Boelkow-Blohm (MBB now part of Airbus), which later was acquired by Daimler-Benz. From 1993 until 1996 he was a senior research scientist within Daimler-Benz Corporate Research. In 1996 he took responsibility for the Department for Microsensor Development at Temic (member of Daimler-group) with a focus on sensors for automotive applications, particularly airbag accelerometers, gyroscopes and pressure sensors. In 2002 he became Professor at Saarland University in Saarbruecken, Germany, holding the Chair for Micromechanics, Microfluidics/Microactuators. He served as senator (2004-2008) and Dean (2010-2012) of the Faculty for Physics and Mechatronics. Prof. Seidel was General Program Chair at Transducers 2001 and European Program Chair at Transducers 1997 and 2011. His current research interests include piezoelectric thin films, flexible substrates, energy autonomous systems, electro-spray ionization, aero-MEMS and microfluidic devices, as well as physical sensors and resonators.
University of Cambridge
Professional Membership: IEEE
Biography: Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Science from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008. During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Ashwin's research explores structural dynamics and physical acoustics at the MEMS-scale with specific contributions in the areas of sensors and sensor systems, transducers and interfaces, vibrational energy harvesting and micromechanical resonators and oscillators. He was appointed a Fellow of the ERA Foundation in 2008 and received the Royal Society Brian Mercer Feasibility Award in 2010. He serves as Editor for the IEEE/ASME Journal of Micro-Electro-Mechanical Systems and as Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
Andrei Shkel - Professor
Research Areas: MEMS, Inertial Sensors
Professional Memberships: IEEE
Biography: Andrei Shkel has been on faculty at the University of California, Irvine since 2000, where he is currently a Professor in the Department of Mechanical & Aerospace Engineering. From 2009 to 2013, he served as a Program Manager in the Microsystems Technology Office of the Defense Advanced Research Projects Agency (DARPA). His professional interests, reflected in over 170 publications and two books, include high performance inertial sensors, sensor-based intelligence, and control theory. He holds 24 U.S. and world-wide patents. Dr. Shkel has served on a number of editorial boards, most recently as Editor of IEEE/ASME Journal of Microelectromechanical Systems, Founding Chair of the IEEE International Symposium on INERTIAL SENSORS and SYSTEMS (ISISS), and General Chair of the 2005 IEEE Sensors Conference. He has been awarded in 2013 the Office of the Secretary of Defense Medal for Exceptional Public Service, the 2009 IEEE Sensors Council Technical Achievement Award, the 2006 Best Faculty Research Award, the 2005 NSF CAREER award, and the 2002 George E. Brown, Jr. Award. Dr. Shkel is the IEEE Fellow. He received the diploma degree (with excellence) in mechanics and mathematics from the Moscow State University, Russia, in 1991, and the Ph.D. degree in mechanical engineering from the University of Wisconsin, Madison, USA, in 1997.
Research Areas: Nanophotonics, fiber sensors, microscopy, nanofabrication
Professional Memberships: OSA, IEEE
Biography: Olav Solgaard earned his Ph.D. degree from Stanford University in 1992. His doctoral dissertation: "Integrated Semiconductor Light Modulators for Fiber-optic and Display Applications" was the basis for the establishment of a Silicon Valley firm Silicon Light Machines (SLM), co-founded by Dr. Solgaard in 1994. From 1992 to 1995 he carried out research on optical MEMS as a Postdoctoral Fellow at the University of California, Berkeley, and in 1995, he joined the Electrical Engineering faculty of the University of California, Davis. His work at UC Davis led to the invention of the multi-wavelength, fiber-optical switch, which has been developed into commercial products by several companies. In 1999 he joined Stanford University where he is now Professor of Electrical Engineering and the Director of the Edward L. Ginzton Laboratory. Professor Solgaard's research interests include Optical MEMS, Photonic Crystals, Atomic Force Microscopy, and solar energy conversion. He has authored more than 300 technical publications and holds 50 patents. Professor Solgaard is a Fellow of the Optical Society of America, the Royal Norwegian Society of Sciences and Letters, and the Norwegian Academy of Technological Sciences.
Leland (Chip) Spangler
Research Areas: MEMS packaging and assembly, materials, testing
Professional Memberships: IEEE
Biography: Dr. Spangler received his Ph.D. in electrical engineering from The University of Michigan in 1988. He is currently President of Advanced Microsystems a company that provides engineering services for advanced microelectronic devices, with specialties in package and assembly technologies.
Previously Chip was the President and CTO of Aspen Technologies, a microelectronic package and assembly service supplier. He was responsible for developing package solutions for extremely high-pixel count displays, DNA analysis products and MEMS telecom switch arrays, pressure and inertial sensors as well as a variety of other MEMS devices. Before this, Chip worked at Ford Microelectronics where he had responsibility for pressure sensors, and airbag and chassis accelerometers. His work lead directly to the production of the world'sfirst plastic surface mount airbag accelerometer.
Dr. Spangler is the author of over 30 technical publications and has 10 patents. He is currently an editor for IEEE JMEMS and has helped organize Hilton Head, Transducers, SPIE, MEMS and other technical conferences.
University of Southampton
Research Areas: Materials and processes for microsystems
Professional Memberships:ASME, AIAA, MRS
Biography: Prof. S. Mark Spearing is Pro Vice-Chancellor (International) at the University of Southampton, UK. His portfolio includes international relationships in research and education, internationalisation of the curriculum and the campus, and the recruitment of international students. Previously Professor Spearing was Head of School and Professor of Engineering Materials in the School of Engineering Sciences at the University of Southampton. From 1994-2004, he was a Professor of Aeronautics and Astronautics at the Massachusetts Institute of Technology. At MIT he was Head of the Materials and Structures Division and Director of the Technology Laboratory for Advanced Composites. His technical interests include structural composites and Microelectromechanical Systems. Spearing is a past chairman of the AIAA Materials Technical Committee, and he is an Associate Fellow of AIAA, a member of the American Society of Mechanical Engineers and of the Materials Research Society. In addition to his role as an editor of the ASME/IEEE Journal of Microelectromechanical Systems he was a deputy editor of Acta Materialia from 1996-2003 and is the European Editor of The Journal of Composite Materials. He has published over 170 technical publications, including 105 in refereed journals.
Research Areas: Micro and nano device and system technology including sensors, actuators, fabrication techniques, device integration, wafer-level packaging, microfluidics, micro-optics. Specific focus on biomedical applications.
Professional Memberships: IEEE EDS
Biography: Goran Stemme received his M.Sc. degree in electrical engineering in 1981 and the Ph. D. degree in solid state electronics in 1987, both from the Chalmers University of Technology, Gothenburg, Sweden. In 1981, he joined the Department of Solid State Electronics, Chalmers University of Technology. There, in 1990, he became an associate professor (docent) heading the silicon sensor research group. In 1991, he was appointed professor at The Royal Institute of Technology, Stockholm, where he is currently the head of the department of Micro and Nanosystems at the School of Electrical Engineering. He is a member of the International Steering Committee of the Conference series TRANSDUCERS. Between 1995 and 2001 he was a member of the International Steering Committee of the Conference series IEEE Microelectromechanical Systems (MEMS) and he was General Co-Chair of that conference in 1998. Prof. Stemme is Senior Editor and member of the Steering Committee the IEEE/ASME "Journal of Microelectromechnical Systems". Prof. Stemme is a member of the Royal Swedish Academy of Sciences (KVA) and he is an IEEE Fellow.
Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties
Professional Memberships: IEEE
Biography:Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981. In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.
Shuji Tanaka received B.E., M.E. and Dr.E. degrees in mechanical engineering from The University of Tokyo in 1994, 1996 and 1999, respectively. He was a Research Associate at Department of Mechatronics and Precision Engineering, Tohoku University from 1999 to 2001, an Assistant Professor from 2001 to 2003, and an Associate Professor at Department of Nanomechanics from 2003 to 2013. He is currently a Professor at Department of Robotics and Microsystem Integration Center. He was also a Fellow of Center for Research and Development Strategy, Japan Science and Technology Agency from 2004 to 2006, and a Selected Fellow from 2006 to 2018. In FY2017, he serves as the President of Micro-Nano Science & Engineering Division, Japan Society of Mechanical Engineers (JSME). He was honored with many awards and prizes including The Young Scientists’ Prize, The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology (2009), German Innovation Award and Gottfried Wagener Prize (2012). His research interests include MEMS sensors, MEMS packaging and integration, acoustic wave devices, and piezoelectric devices and materials. He is an IEEE Fellow and a JSME Fellow.
Man Wong - Senior Editor
The Hong Kong University of Science and Technology
Research Areas: Fabrication technology and physical MEMS devices
Professional Memberships: IEEE, SID
Biography: Man Wong was born in Beijing, China. From 1979 to 1984, he studied at the Massachusetts Institute of Technology, USA, where he obtained his BS and MS degrees in Electrical Engineering. From 1985 to 1988, he was at the Center for Integrated Systems at Stanford University, USA, where he worked on tungsten-gate MOS technology and obtained his PhD degree, also in Electrical Engineering. From 1988 to 1992, he was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and development of integrated-circuit metallization systems and dry/vapor surface-conditioning processes. He is currently with the Department of Electronic and Computer Engineering at the Hong Kong University of Science and Technology, Hong Kong. His research interests include micro-fabrication technology, device structure and material; physics and technology of thin-film transistor; organic light-emitting diode display technology; modeling and implementation of integrated micro-systems; and thin-film solar cell device and process technology. He is a member of Tau Beta Pi, Eta Kappa Nu and Sigma Xi. He was appointed an Honorary Guest Professor of Nankai University, Tianjin, China, in 2003 and a Visiting Professor of Soochow University, Suzhou, China, in 2011.
J. Andrew Yeh
Research Areas: Optofluidics Microsystem, Breath Biosensors, Nanostructures in Bulk
Professional Memberships: IEEE (1996 - present) / ASME (1995 - present)
Biography:J. Andrew Yeh joined National Tsing Hua University in Taiwan in 2001 and is a Professor at the Institute of NanoEngineering and Microsystems (iNEMS). He also serves as the Director General in Instrument Technology Research Center (ITRC) located in Hsinchu Science Park, Taiwan.
In 1992, he earned his B.S. degree in Mechanical Engineering from National Taiwan University, Taiwan, and Master degrees in Mechanical Engineering and in Electrical Engineering from Cornell University, USA, in 1996 and 1997, respectively. His Ph.D. degree in Electrical Engineering was received from Cornell University in 1999. He co-founded AIP Networks, Inc. in 2000. Dr. Yeh serves as an editorial board member of IEEE/ASME Journal of MicroElectroMechanical Systems (JMEMS) since 2010 and as the Chair of Taiwan Section at American Society of Mechanical Engineers (ASME Taiwan) since 2011. In March, 2013, he was elected to be the Chair of IEEE Instrument and Measurement Society, Taipei Chapter. He holds more than 70 patents and publishes over 70 journal papers. His current research interests include Optofluidics Microsystem, Breath Biosensors, and Nanostructures in Bulk.
Professional Memberships: IEEE (EDS)
Biography: Jun-Bo Yoon received Ph.D. degree in electrical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 1999.
From 1999 to 2000, he was with the University of Michigan, Ann Arbor, MI, USA, as a Postdoctoral Research Fellow. In 2000, he returned as a Research Assistant Professor to the Department of Electrical Engineering, KAIST, where he is currently a Professor. He was with Stanford University, Stanford, CA, USA, from 2008 to 2009 on his sabbatical leave. He has been working in the MEMS fields for 20 years.
He has made contributions to the world's smallest/lowest-voltage nanoelectromechanical switches, invention of the 3-D diffuser lithography, and many high-Q RF MEMS components. He has authored or coauthored more than 200 journal and conference papers. He is on the Editorial Boards of the IOP Journal of Micromechanics and Microengineering and an Editor-in-Chief of the Micro and Nano Systems Letters (Springer).
Dr. Yoon received the Excellent Teaching Awards from the Department of Electrical Engineering in 2003, 2007, and 2011, and from KAIST in 2006. He has served as a Technical Program Committee Member for Transducers 2009-2011, IEEE MEMS 2009-2010, and as an Executive Program Committee Member for the Transducers 2013-2015.
Hans Zappe - Senior Editor
Research Areas:Optical microsystems, tunable micro-optics, medical micro-optics, printable micro-optics
Professional Memberships: IEEE Photonics Society, SPIE, OSA
Biography: Hans Zappe is the Gisela and Erwin Sick Professor of Micro-optics in the Department of Microsystems Engineering at the University of Freiburg, Germany. Born in France and raised in New York, he earned his Bachelor's and Master's degrees at MIT and his PhD from the University of California, Berkeley, all in Electrical Engineering. After pursuing research activities in electronics, integrated optics and semiconductor lasers at IBM, the Fraunhofer Institute for Applied Solid State Physics and the Centre Suisse d'Electronique et de Microtechnique, he joined the University of Freiburg in 2000, where he was Dean of Engineering from 2008 to 2010. His current research interests focus on tunable micro-optics, optical micro-systems for medical applications and printable micro-optics.
Research Areas: MEMS
Professional Memberships: IEEE Senior Member
Biography: Haixia (Alice) Zhang, has been Professor at Institute of Microelectronics at Peking Universituy since 2007.
She received Ph.D. degree in Mechanical Engineering from the Huazhong University of Science and Technology. After finishing postdoctoral research at the Tsinghua University, she joined the faculty of the Institute of Microelectronics in 2001. From 2004 to 2006, She was a visiting professor at the University of California, Davis and the Case Western Reserve University.
Devoted to research in micro/nanotechnology, she published 100+ papers in prominent journals and 6 books/book chapters. She served on the chair of IEEE NEMS2013 Conference, the organizing chair of Transducers'11. She is the founder of the International Contest of Applications in Nano-micro Technologies (iCAN) since 2007. She won National Invention Award of Science & Technology at 2006.
- Biomicrofluidics: microscale manipulation of bio-species such as proteins, cells and tissues in microfluidic systems
- Microscale fluid mechanics and heat transfer: experimental and theoretical analysis of thermo-fluidic phenomena in microsystems
- Microsensors and microactuators: design and fabrication of integrated microsnsors and microactuators
- Integrated microfabrication technology: development of silicon-, glass-, polymer- and protein-based techniques for device fabrication
Professional Membership: ASME
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