J-MEMS RightNow
Stay up to date with the latest developments in the MEMS areas with IEEE RightNow Access for J-MEMS. Enjoy temporary Open Access to selected featured papers from the latest J-MEMS edition.
Volume 30 Issue 1 (February 2021)
- A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation - Authors Xie, Jin; Ding, Hong;Wu, Changju
- Wafer-Level Low-Temperature Solid-Liquid Inter-Diffusion Bonding With Thin Au-Sn Layers for MEMS Encapsulation - Authors: Temel, Oguzhan; Kalay, Yunus; Akin, Tayfun
- Uncooled Infrared Detector Based on an Aluminum Nitride Piezoelectric Fishnet Metasurface - Authors: Kang, Sungho; Hui, Yu; Qian, Zhenyun; Rinaldi, Matteo
Volume 29 Issue 6 (December 2020)
- Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators - Authors: Jeremy Yang; Benoit Hamelin; Farrokh Ayazi
- Mitigating the Insufficient Etching Selectivity in the Wet Release Process of CMOS-MEMS Metal Resonators Via Diffusion Control - Authors: Cheng-En Hsu; Wei-Chang Li
- A Microfluidic Device With Optically-Controlled Electrodes for On-Demand Electrical Impedance Measurement of Targeted Single Cells - Authors: Na Liu; Ming Zhang; Tao Yue; Yuanyuan Liu; Yang Yang; Wen J. Li; Yu Sun
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