Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Table of contents
- Journal of Microelectromechanical Systems
- MEMS Tunable Photonic Crystal-Cantilever Cavity
- A CMOS-Integrated MEMS Platform for Frequency Stable Resonators-Part I: Fabrication, Implementation, and Characterization
- A CMOS-Integrated MEMS Platform for Frequency Stable ResonatorsPart II: Design and Analysis
- Fabrication of Phase Change Microstring Resonators via Top Down Lithographic Techniques: Incorporation of VO2/TiO2 Into Conventional Processes
- A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer
- A High Resolution Differential Mode-Localized MEMS Accelerometer
- Theoretical Modeling, Numerical Simulations and Experimental Study of Micro Thermal Convective Accelerometers
- Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave Resonators
- A Multifunctional Smart Soft Contact Lens Device Enabled by Nanopore Thin Film for Glaucoma Diagnostics and
In Situ Drug Delivery - Batch Fabrication of Miniaturized Ag/AgCl Reference Electrode With Ion Exchanging Micro-Nano-Pores by Silicon-Base Double-Side Anisotropic Etching Process
- Thermally Reflowed Die-Attached Linear Variable Optical Filter for Mid-Infrared Volatile Organic Compounds Detection
- Mosaic-Like Micropatterned Monolayer RGO/AgNPs Film Gas Sensor With Enhanced Room-Temperature NO2 Response/Recovery Properties
- A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation
- Extended Design Space of Silicon-on-Nothing MEMS
- AlN/SiC MEMS for High-Temperature Applications
- Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures
- Shape Memory Alloy Actuators for Silicon Microgrippers
- Continuous Single-Phase Flow-Assisted Isolation for Parallel Observation of Reactions Between Deterministically Paired Particles
- On Cavitation on Chip in Microfluidic Devices With Surface and Sidewall Roughness Elements
- Permanent Stiffness Reduction by Thermal Oxidation of Silicon
- CMOS Closed-Loop Control of MEMS Varactors for Robust
Ka -Band Tunable Filters - Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics
- Transducers 2019
