Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Front Cover
- Journal of Microelectromechanical Systems
- Bias Thermal Stability Improvement of Mode-Matching MEMS Gyroscope Using Mode Deflection
- High Energy Density Cellular Electrostatic In-Plane 2-Axis Actuators
- Phase Noise Optimization of MEMS Resonant Accelerometer Based on AC Polarization
- Analysis and Compensation of Bias Drift of Force-to-Rebalanced Micro-Hemispherical Resonator Gyroscope Caused by Assembly Eccentricity Error
- Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors
- Coupled Thin Film Hydrogenated Amorphous Silicon Microresonator Arrays
- Nanoporous Silicon Membrane Embedded With Dielectrophoresis (DEP) Electrodes for Ultrafiltration Improvement for Artificial Kidney
- A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging
- Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along 111 Planes Using a MEMS Device
- Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications
- Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection
- High-Q Factor, Multiferroic Resonant Magnetic Field Sensors and Limits on Strain Modulated Sensing Performance
- Circuit Simulator Compatible Model for the Ring-Dot Piezoelectric Transformer
- A Compact Reconfigurable Resonator-Based Direct Current Sensing System
- A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
- Synchronization in Pairs of Opto-Thermally Driven Mechanically Coupled Micro-Oscillators
- Development of Suspension-Free Mirror Array Device and Its Application to Large Screen Size Holographic Displays
- TechRxiv: Share Your Preprint Research with the World!
- Table of Contents