Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Front Cover
- Journal of Microelectromechanical Systems Publication Information
- Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N
- Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes
- Infrared-Driven Rapid Quantification of Magnetophoretically Trapped Drug
- A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length
- Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation
- A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss
- A Radiofrequency Threshold Temperature Sensor Using a Hf0.5Zr0.5O2 Device and a Microacoustic Piezoelectric Resonant Sensor
- Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization
- A Review on MEMS Silicon Resonant Accelerometers
- Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems
- Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors
- A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network
- A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology
- Electrowetting Ionic Liquid Flow Controller
- A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment
- Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor
- Silicon-Based Suspended Microchannel Resonator Developed Using Au Thermal Diffusion Bonding for Mass Sensing of Biomaterials
- Experimental and Simulative Correlations of the Influence of Solder Volume and Receptor Size on the Capillary Self-Alignment of Micro Solar Cells
- High-Quality Light Field Microscope Imaging Based on Microlens Arrays
- Introducing IEEE Collabratec
- Table of Contents