Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Table of contents
- Journal of Microelectromechanical Systems
- Editorial
- In Memoriam Harvey C. Nathanson 19362019
- A Sensitivity Tunable Accelerometer Based on Series-Parallel Electromechanically Coupled Resonators Using Mode Localization
- Investigating Cellular Response to Impact With a Microfluidic MEMS Device
- Design Considerations for Micro-Glassblown Atomic Vapor Cells
- Micromachined Thermopile Based High Heat Flux Sensor
- SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits
- Scalable Superomniphobic Surfaces
- Simple and Rapid Fabrication Process of Porous Silicon Surface Using Inductively Coupled Plasma Reactive Ion Etching
- Characterization of Constant Flow-Driven Microfluidic Oscillator
- Closed-Loop, Axial Temperature Control of Etched Silicon Microcolumn for Tunable Thermal Gradient Gas Chromatography
- On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage Generator
- Sealing of MEMS Atomic Vapor Cells Using Cu-Cu Thermocompression Bonding
- Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks
- Zero-Level Packaged RF-MEMS Switched Capacitors on Glass Substrates
- Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators
- IEEE Access
