Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Table of contents
- Journal of Microelectromechanical Systems
- Ultra-Low Stress Die Attachment Based on a Stacked Multilayer Substrate
- Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators
- A Reliable Liquid-Based CMOS MEMS Micro Thermal Convective Accelerometer With Enhanced Sensitivity and Limit of Detection
- 1.3 mm2 Nav-Grade NEMS-Based Gyroscope
- Thermal Response and TC
f of GaN/AlN Heterostructure Multimode Micro String Resonators From 10 C Up to 325 C - Determining the Nonlinear Motion of MEMS Gyroscopes Using the Harmonic Balancing Method
- On Enhancing the Sensitivity of Resonant Thermometers Based on Parametric Modulation
- A Self-Powered MEMS Inertial Switch for Potential Zero Power-Consumption Wake-Up Application
- Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures
- Fabrication of a Multilayer Implantable Cortical Microelectrode Probe to Improve Recording Potential
- Vibrating Mesh Atomizer for Spin-Spray Deposition
- A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes
- Highly Selective Guiding Springs for Large Displacements in Surface MEMS
- Feedforward Control Algorithms for MEMS Galvos and Scanners
- Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement
- Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study
- A PMUT Integrated Microfluidic System for Fluid Density Sensing
- Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications
- Analytical Deflection Profiles and Pull-In Voltage Calculations of Prestressed Electrostatic Actuated MEMS Structures
- Silicon Micro-Channel Definition via ICP-RIE Plasma Etching Process Using Different Aluminum Hardmasks
- IEEE Access
- TechRxiv: Share Your Preprint Research with the World!
- 2021 EDS Education Award Call for Nominations
