Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Table of contents
- Journal of Microelectromechanical Systems
- Low Phase Noise RF Oscillators Based on Thin-Film Lithium Niobate Acoustic Delay Lines
- Actuation Dependency of Frequency Tuning in MEMS Resonators
- High
$Q$ - A Piezo-Avalanche Accelerometer
- Aluminum Nitride Combined Overtone Resonators for the 5G High Frequency Bands
- Electron Beam Lithography Fabrication of SU-8 Polymer Structures for Cell Studies
- Design and Characterization of 3-Stack MEMS-Based Passive Flow Regulators for Implantable and Ambulatory Infusion Pumps
- A Self-Sealing Spray Nozzle for Aerosol Drug Delivery
- Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature
- On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches
- Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications
- Reactive Ion Etching of Cytop and Investigation of Residual Microstructures
- Voltage Amplification of Radio Frequency Signals With Pitch-Asymmetric Acoustic Delay Lines
- Two-Dimensional CMOS MEMS Thermal Flow Sensor With High Sensitivity and Improved Accuracy
- Non-Linear Displacement Mechanisms of Thermally Actuated MEMS Chevron
- High Dynamic Range AFM Cantilever With a Collocated Piezoelectric Actuator-Sensor Pair
- Multiphysics Analysis and Practical Implementation of a Soft -Actuator- Based Microfluidic Micromixer
- IEEE Access
