Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of J-MEMS. Click an article title to view within IEEE Xplore.
- Front Cover
- Journal of Microelectromechanical Systems
- 2023 Reviewers List
- Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode
- Response Speed Characterization of a Thermally Actuated Programmable Metamaterial
- A Near-Zero Thermoelectric RF Power Sensor for High Dynamic Range Applications
- Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer
- Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors
- 3D Flexible Wind Sensor With its Optimization and Environmental Effect
- A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film
- Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias
- Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation
- Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser
- Development of PMUT-Based High Sensitivity Gas Flow Sensor
- Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures
- Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry
- Impedance Sensing in CMOS-Embedded Microfluidics Using BEOL Electrodes
- TechRxiv: Share Your Preprint Research with the World!
- Introducing IEEE Collabratec
- Member ad suite
- Table of Contents