Best Paper Award
Best Paper Award 2023
Authors: Sewon Park, Kyeongwon Lee, Da-Eun Jeong, Heung-Kook Ko, and Jaeyong Lee
Honorable Mention Award 2023
Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review
Authors: Anh Tuan Ngo, Bappaditya Dey, Sandip Halder, Stefan De Gendt, and Changhai Wang
Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices based on Image Recognition
Authors: Yuxian Liu , Qiancheng Zhao, Dacheng Zhang, and Jian Cui
Best Paper Award 2023 Editorial
The IEEE Transactions on Semiconductor Manufacturing congratulates Sewon Park, Kyeongwon Lee, Da-Eun Jeong, Heung-Kook Ko, and Jaeyong Lee whose paper “Bayesian Nonparametric Classification for Incomplete Data With a High Missing Rate: an Application to Semiconductor Manufacturing Data” (Vol. 36, No. 2, May 2023) was selected as the Best Paper for 2023 by a team of Associate Editors. This paper proposes using the the Dirichlet Process - Naive Bayes model (DPNB) to simultaneously impute missing values and address classification problems in semiconductor manufacturing data. The DPNB is based on the use of infinite Gaussian mixture models to model complex data distributions and estimate missing data records and variables, which is of utmost importance in semiconductor manufacturing. The DPNB performs well for high missing rates since it uses all the information from observed components. Experiments on various real datasets including semiconductor manufacturing data show that the DPNB has better performance than state-of-the-art methods in terms of predicting missing values and target variables as percentage of missing values increases.
Two other papers were recognized with an Honorable Mention.
a) “Machine Learning-Based Edge Placement Error Analysis and Optimization: A Systematic Review” by Anh Tuan Ngo, Bappaditya Dey, Sandip Halder, Stefan De Gendt, and Changhai Wang (Vol. 36, No. 1, February 2023)
b) “Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices based on Image Recognition” by Yuxian Liu , Qiancheng Zhao, Dacheng Zhang, and Jian Cui (Vol. 36, No. 2, May 2023
The Editorial Board of IEEE Transactions on Semiconductor Manufacturing Journal continues to explore innovative all of semiconductor manufacturing with special attention to design, modeling and process control aspects. The entire editorial team for IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING welcomes authors to submit their papers for review. We also encourage all authors and readers to participate in the manuscript review process. The 2023 Best Paper selection team consisted of Dr. Jeanne P. Bickford, Dr. Dragan Djurdjanovic, and Dr. Natarajan Mahadeva Iyer.
Dr. Jeanne P. Bickford
Associate Editor
Transactions on Semiconductor Manufacturing
Dr. Dragan Djurdjanovic
Associate Editor
Transactions on Semiconductor Manufacturing
Dr. Natarajan Mahadeva Iyer
Associate Editor
Transactions on Semiconductor Manufacturing
Dr. Reha Uzsoy
Editor-in-Chief
Transactions on Semiconductor Manufacturing
