Lastest Issue: Table of Contents (TOC)
Below is the complete Table of Contents for the current edition of T-SM. Click an article title to view within IEEE Xplore.
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- Table of Contents
- IEEE Transactions on Semiconductor Manufacturing Publication Information
- Editorial
- Editorial
- Learning Priority Indices for Energy-Aware Scheduling of Jobs on Batch Processing Machines
- Practical Reinforcement Learning for Adaptive Photolithography Scheduler in Mass Production
- Integrated Scheduling of Jobs, Tools, Machines, and Two Different Set of Transbots
- Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing
- Machine Learning on Multiplexed Optical Metrology Pattern Shift Response Targets to Predict Electrical Properties
- A Unified Machine Learning Through Focus Resist 3-D Structure Model
- Multi-Scale and Multi-Branch Transformer Network for Remaining Useful Life Prediction in Ion Mill Etching Process
- A Model Averaging Prediction of Two-Way Functional Data in Semiconductor Manufacturing
- Single-Mask Fabrication of Sharp SiOx Nanocones
- A Novel Multiscale Residual Aggregation Network-Based Image Super-Resolution Algorithm for Semiconductor Defect Inspection
- Hotspot Prediction: SEM Image Generation With Potential Lithography Hotspots
- GAGAN: Global Attention Generative Adversarial Networks for Semiconductor Advanced Process Control
- Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples
- SnS₂ and ZnO Nanocomposite Prepared by Dispersion Method for Photodetector Application
- Joint Call for Papers for IEEE Transactions on Semiconductor Manufacturing and IEEE Transactions on Electron Devices: Special Issue on Semiconductor Design for Manufacturing (DFM)
- Call for Papers for IEEE Transactions on Materials for Electron Devices
- IEEE Transactions on Semiconductor Manufacturing Information for Authors
