Microelectromechanical Systems Committee

  • Microelectromechanical Systems Committee Chair

    • Zeynep Celik-Butler
       - Solid State Device Phenomena
      University of Texas at Arlington
      Nanofab Building
      PO Box 19072
      Arlington, TX 76019
      Zeynep Çelik-Butler is Professor of Electrical Engineering and Director of Nanotechnology Research and Teaching Facility at the University of Texas at Arlington. She received dual B.S. degrees in electrical engineering and physics from Bogaziçi University, Istanbul, Turkey, in 1982. She received the M.S. and Ph.D. degrees in electrical engineering in 1984 and 1987, respectively, from the University of Rochester. She was an IBM Pre-doctoral Fellow from 1983 to 1984, and an Eastman Kodak Pre-doctoral Fellow from 1985 to 1987. She joined the Department of Electrical Engineering at Southern Methodist University in 1987 as an Assistant Professor; was tenured and promoted to Associate Professor in 1993. Dr. Çelik-Butler was the holder of J. Lindsay Embrey Trustee Assistant Professorship from 1990 to 1993. She served as the Assistant Dean of Graduate Studies and Research from 1996 to 1999. She moved to University of Texas at Arlington in 2002.
      She served in various technical committees including 1988, 1989 IEEE-IEDM's and Annual Symposia on Electronic Materials, Processing and Characterization (1989 - 1992) and International Conference on Noise in Physical Systems and 1/f Fluctuations (1993, 1999, 2001-2009). She was the General Chair of TEXMEMS II Workshop. She was the co-Chair for the SPIE Conf. on Noise in Devices and Circuits in the Symp. on Fluctuation and Noise (FaN'2003) and the symposium co-chair for the same symposium in 2005 (FaN’2005). She has served as the Co-Chair for Focused Sessions at the 2016 and 2017 IEEE Sensors Conferences. She was an editor for Fluctuation and Noise Letters from 1999 to 2005. She currently serves in the editorial board of Journal of Nanoelectronics and Optoelectronics and is a topical editor for IEEE Sensors Journal.
      Prof. Çelik-Butler has received several awards including the University of Texas at Arlington Outstanding Research Achievement Award (2006), IEEE-Dallas Section Electron Devices Society Outstanding Service Awards (1995, 1997), IEEE-Electron Devices Society, Service Recognition Award (1995, 2009), IEEE-Electron Devices Society, Distinguished Lecturer Appreciation Award (2006), Outstanding Electrical Engineering Graduate Faculty Awards (1996, 1997, 2001), and SMU-Sigma Xi Research Award (1997).She was inducted into the Academy of Distinguished Scholars of University of Texas in 2017. Her research interests include microelectromechanical systems, multi-functional reconfigurable sensors, noise and reliability in nanoelectronic devices. She has seven awarded and three pending patents, seven book chapters, and over 200 journal and conference publications in these fields. Dr. Çelik -Butler’s research has been supported by NSF, NASA, AFOSR, ARO, Texas Higher Education Coordinating Board, SRC, Texas Instruments, Freescale Semiconductor, Laerdal Co., L-3 Communications, Legerity, ST-Microelectronics, Raytheon and Lockheed Martin Aeronautics.
      Dr. Çelik-Butler is a Fellow of IEEE, and life member of Eta Kappa Nu. She is a Distinguished Lecturer for the IEEE-Electron Devices Society.
  • Microelectromechanical Systems Committee Members

    • Roger Booth
    • Hector De Los Santos
       - Fellow
      NanoMEMS Research, LLC
      4000 Barranca Pkwy, Ste 250
      Irvine, CA 92606-1731
      Phone 1:


      Lecture Topics:

      1) NanoMEMS: Enabling the Internet of Things

      2) Theory of Nano-Electron-Fluidic Logic (NFL): A New Digital "Electronics"" Concept"

    • Christofer Hierold
      ETH Zurich
      Micro and Nanosystems
      Office: CLA G9/G7
      Tannenstrasse 3
      Zurich CH-8092
      Phone 1:
      +41 44 6323143

      +41 44 63 21462
      Email 1:

      J-MEMS Administrative Assistant:

      Research Areas: Functional nanomaterials in MEMS and NEMS (e.g. carbon nanotube sensors, ultra low power sensors), Polymer microsystems (e.g. magnetic polymers, biodegradable polymers), Advanced MEMS (e.g. micro thermoelectric generators, large deflection actuators by polymer springs in MEMS), Fabrication technology (integration of functional nanomaterials on larger areas)

      Professional Memberships: IEEE/EDS

      Biography: Christofer Hierold has been Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich (ETH) since April 2002. Further, he is Executive Coordinator ETH Zurich of the Binnig and Rohrer Nanotechnology Center (BRNC) at Ruschlikon. Before he joined ETH Zurich in 2002 he was with Siemens AG, Corporate Research, and Infineon Technologies AG in Germany. In 1990 he graduated from Technical University Munich (TUM) with a Dr.-Ing. Degree in Engineering Sciences.

      Christofer Hierold is Co-Chair of the Steering Committee of the EUROSENSORS conference, and a member of the Steering Committees of both MEMS and TRANSDUCERS. He served as General Co-Chair of MEMS 2009, and is Program Chair of TRANSDUCERS 2013. Professor Hierold is a member of the Swiss Academy of Engineering Sciences (SATW).

    • Amit Lal
      Cornell University
      Dept. of Elec. & Comp. Eng.
      402 Phillips Hall
      Ithaca, NY 14853-5401
      Phone 1:
      +1 607 255 9374

      +1 607 254 3508
    • Ellis Meng
    • Veena Misra
      North Carolina State University
      Dept. of Electrical Engineering
      Box 7911
      Raleigh, NC 27695-0001
      Phone 1:
      +1 919 515 7356

      +1 919 515 5055
    • Mina Rais-Zadeh
      Associate Professor
      University of Michigan
      1301 Beal Ave
      Ann Arbor, MI 48109

      Research Areas: Electron devices for wireless communication and sensing applications and the related device physics, Resonant Sensors: e.g. uncooled infrared detectors, Gallium nitride MEMS and microsystems

      Professional Memberships: IEEE EDS

      Biography: Mina Rais-Zadeh received the B.S. degree in electrical engineering from Sharif University of Technology and M.S. and Ph.D. degrees both in Electrical and Computer Engineering from Georgia Institute of Technology in 2005 and 2008, respectively. From August 2008 to 2009, she was a Postdoctoral Research Fellow at Georgia Institute of Technology. Since January 2009, she has been with the University of Michigan, Ann Arbor, where she is currently an Associate Professor in the Department of Electrical Engineering and Computer Science.

      Dr. Rais-Zadeh is the recipient of the NSF CAREER Award (2011), IEEE Electron Device Society Early Career Award (2011), NASA Early Career Faculty Award (2012), the Crosby Research Award from the University of Michigan (2013), National Academy of Engineering Frontiers of Engineering (2013), and ONR Young Investigator Award (2014). Together with her students, she received the best poster award at the Transducers conference (2013), the best paper award at the IEEE SiRF conference (2014), honorable mention at the IEEE IMS (2014), and was the finalist in student paper competitions at the SiRF (2007) and IMS (2011) conferences. She was the chairperson of the Display, Sensors and MEMS (DSM) sub-committee at the 2013 IEEE International Electron Devices Meeting (IEDM) and is a member of the 2014 IEDM Executive Committee and 2015 IEEE MEMS Executive Committee. She is a senior member of IEEE and has served as a member of the technical program committee of IEEE IEDM (2011-2013), IEEE Sensors Conference (2011-2014), the Hilton Head workshop (2012, 2014), the IEEE MEMS Conference (2014-2015), Transducers (2015), and IFCS (2015). She is an associate editor of the IEEE Electron Device Letters. Her research interests include electron devices for wireless communication and sensing applications and the related device physics, resonant micromechanical devices, RF MEMS, gallium nitride MEMS, and micro/nano fabrication process development.

    • Sumant Sood
      Suss Microtec Inc.
      228 Suss Drive
      Waterbury Center, VA 05677
      Phone 1:
      +1 802 244 5181 Ext. 391

      +1 802 244 1348