Semiconductor Manufacturing
The committee was founded to chart future directions for the Electron Devices Society in the field of semiconductor manufacturing. Transactions on Semiconductor Manufacturing, a joint publication of the IEEE Components, Packaging and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society and the IEEE Solid-State Circuits Society, has long featured papers on Semiconductor Manufacturing. It is the purpose of this committee to consider new ways to encourage and highlight this important field in the Electron Devices Society and the IEEE.
Semiconductor Manufacturing Committee Chair
Semiconductor Manufacturing Committee Members
Dr Oliver Patterson is a senior engineer with Intel Logic Technology Development and a well-respected expert in e-beam inspection for semiconductor development with over 80 publications and 25 patents in this and related areas. He has a special passion for voltage contrast inspection and test structure design. Previously, Oliver served as Principal Technologist for the HMI division of ASML where his responsibilities included developing solutions for gap defects for customers and product management for a range of inspection products including Multi-Beam Inspection. Prior to this, he was the lead e-beam engineer at GLOBALFOUNDRIES and IBM, where due to his leadership and innovation, e-beam inspection evolved to play a pivotal role in semiconductor development. He began his career in the semiconductor industry as part of Bell Labs with Lucent Technologies. Oliver has worked on a wide range of semiconductor technologies including SOI, FDSOI and bulk logic, DRAM and 3d NAND spanning from 250nm to the most recent nodes.
Professionally, Dr. Patterson is a long-time member of the Steering Committee of ASMC and was the conference Co-Chairman for ASMC 2014. He has served as a Guest Editor for the IEEE Transactions on Semiconductor Manufacturing many times from 2006 to the present, and is currently a Senior Member of IEEE. Oliver received his S.B. from the Massachusetts Institute of Technology, his M.S. from the University of Wisconsin and his Ph.D. from the University of Wisconsin all and Electrical Engineering and Computer Science.
