Transactions on Semiconductor Manufacturing

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The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

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Particularly sought for these transactions are original papers describing practical engineering techniques for solving problems involving interactions among facility, equipment, process, product, and people issues in the context of manufacturing. The transactions’ spectrum of coverage will range from fundamental to applied. Whenever possible papers should include appropriate results from manufacturing experience. Submission of a manuscript manifests the fact that it has been neither copyrighted, published, nor submitted or accepted for publication elsewhere, unless otherwise so stated by the author. 

The IEEE Transactions on Semiconductor Manufacturing is published quarterly with the first issue in February. Contributed papers may be of a tutorial or research nature, but the latter must be original and must not duplicate descriptions or derivations available elsewhere.