Transactions on Semiconductor Manufacturing


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The IEEE Transactions on Semiconductor Manufacturing publishes the latest advances related to the manufacture of microelectronic and photonic components and integrated systems, including photovoltaic devices and micro-electro-mechanical systems. Its principal aim is to continually enhance the knowledge base and improve manufacturing practice across the entire supply chain from fabrication to delivery of these devices.  Areas of interest include process integration, manufacturing equipment performance and modeling, yield analysis and enhancement, metrology, process control, material handling, factory systems and all areas of factory and supply chain management related to the semiconductor industry including materials synthesis, equipment manufacturing, and mask making.  Papers submitted to this journal should have a clear relevance to manufacturing practice, as opposed to device design and device characterization.   


Policy for Authors Publishing to IEEE Journals - IEEE requires an Open Researcher and Contributor ID (ORCID) for all authors publishing articles in IEEE journals.

ORCID orcid_24x24

All IEEE journals require an Open Researcher and Contributor ID (ORCID) for all authors.  ORCIDs enable accurate attribution and improved discoverability of an author’s published work.  The author will need a registered ORCID in order to submit a manuscript or review a proof in this journal.

Follow these steps to link a ScholarOne account to a registered ORCID:

  1. Login to ScholarOne and click on your name in top right corner of the screen.
  2. Click E-mail / Name in the dropdown menu.
  3. In the ORCID section at the top of the page, click the appropriate link to either register for a new ORCID or associate the account with an existing ORCID.
  4. A new page will open to create and/or validate your ORCID.  Once the validation is complete, the new page will close and you will return to ScholarOne.
  5. Save the changes to your ScholarOne user account.

Authors who do not have an ORCID in their ScholarOne user account will be prompted to provide one during submission.


To submit manuscripts using ScholarOne, please click here or login to ScholarOne using the login box.

Particularly sought for these transactions are original papers describing practical engineering techniques for solving problems involving interactions among facility, equipment, process, product, and people issues in the context of manufacturing. The transactions’ spectrum of coverage will range from fundamental to applied. Whenever possible papers should include appropriate results from manufacturing experience. Submission of a manuscript manifests the fact that it has been neither copyrighted, published, nor submitted or accepted for publication elsewhere, unless otherwise so stated by the author. 

The IEEE Transactions on Semiconductor Manufacturing is published quarterly with the first issue in February. Contributed papers may be of a tutorial or research nature, but the latter must be original and must not duplicate descriptions or derivations available elsewhere.


Peer Review The articles in this journal are peer reviewed in accordance with the requirements set forth in the IEEE Publication Services and Products Board Operations Manual ( Each published article was reviewed by a minimum of two independent reviewers using a single-anonymous peer review process, where the identities of the reviewers are not known to the authors, but the reviewers know the identities of the authors. Articles will be screened for plagiarism before acceptance.