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Awards Committee
Awards Committee Chair
Samar K. Saha - Senior Member

Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Awards Committee Members
Narain Arora

Lecture Topics:
1) GPU based parasitic capacitance extractor for VLSI design
2) Modeling and characterization of VLSI interconnects
Constantin Bulucea - Life Fellow

Texas Instruments, Retired
Constantin Bulucea (S'69–M'70–SM'88–F'04- LF'13) was born in Romania, where he received the M.S. and Ph.D. degrees in Electronics from thePolytechnic Institute of Bucharest in 1962 and 1974, respectively. In 1969, hewas granted a one-year government scholarship at the University of California, Berkeley,where he received a M.S. degree in Electrical Engineering. His activeprofessional career spanned 50 years, equally split across the Romanian and USsemiconductor histories.
In Romania, Dr. Bulucea was the scientific director anddirector of the R&D Institute for Electronic Components (ICCE) between 1974and 1986, with assignments of national importance, such as the introduction ofsilicon transistor technology and the development of the process technology forthe Microelectronica MOS/VLSI plant. From that period, his personal legacy includes the creation of theAnnual Conference for Semiconductors (CAS), now an international IEEE event, agraduate course and a book on Linear Integrated Circuits and reference paperson surface breakdown and hot-carrier injection in silicon, originallycommunicated at IEDM and later published in the IEEE Transactions on ElectronDevices and Solid-State Electronics.
In the US, Dr. Bulucea remained on the technical side of thesemiconductors business, so enjoying the last years of Silicon Valley's "HappyScaling". In particular, at NationalSemiconductor, he was the architect of company's 0.25, 0.18, and 0.13 µm CMOSprocesses for analog and mixed-signal applications. Before that, he brought to completionSiliconix's device/process architecture for the next generation of trench powerDMOS transistors, which became an industry standard in the followingyears. He has been active on the R&Darena as a direct contributor and also as the 2003 chairman of the Advanced Devicesand Technologies thrust of the Semiconductor Research Corporation (SRC) and asa member of the Technical Committees of the Bipolar Circuits and TechnologyMeeting (BCTM) and of the VLSI Technology Symposium. Between 2004 and 2012 hewas the editor of IEEE Electron Device Letters (EDL) for analog andmixed-signals technology. Dr. Bulucea has published over 50 technical articlesin international journals and holds 67 US patents with several others pending.
In 2001 Dr. Bulucea was elected an Honorary Member of theRomanian Academy and in 2004 became an IEEE Fellow "for contributions totransistor engineering in the area pf power electronics". In 2011, he became aDistinguished Member of the Technical Staff of Texas Instruments (TI), as aresult of TI's acquisition of National Semiconductor. Dr. Bulucea retired from TI next year, on his72nd birthday, continuing to support company's patent applications that he had authored.
Lecture Topics:
1. “Physics and Technology of Sub-0.25-mm
2. “Electronic Properties of Silicon and other <Known Materials>” (
3. “TCAD Revisited – An Engineer’s Point of View” – Excellence in Computer Simulation Symposium of the Network for Computational Nanotechnology (UC Berkeley, 2007).
4. “Devices and Processes for Mixed Signals” (UC
Joachim N. Burghartz - Fellow

Joachim N. Burghartz is an IEEE Fellow, an IEEE Distinguished Lecturer, recipient of the 2014 EDS J.J. Ebers Award, and has been an ExCom member of the IEEE Electron Devices Society. He received his MS degree from RWTH Aachen in 1982 and his PhD degree in 1987 from the University of Stuttgart, both in Germany. From 1987 thru 1998 he was with the IBM T. J. Watson Research Center in Yorktown Heights, New York, where he was engaged in early development of SiGe HBT technology and later in research on integrated passive components, particularly inductors, for application to monolithic RF circuits. From 1998 until 2005 he was with TU Delft in the Netherlands as a full professor and from 2001 as the Scientific Director of the Delft research institute DIMES. In fall 2005 he moved to Stuttgart, Germany, to head the Institute for Microelectronics Stuttgart (IMS CHIPS). In addition, he is affiliated with the University of Stuttgart as a full professor. More recently, he also became CEO of the IMS Mikro-Nano Produkte GmbH. Dr. Burghartz has published about 350 reviewed articles and holds more than 30 patents. Distinguished Lecture Titles -Hybrid Systems in Foil -Ultra-thin chip technology -GaN technologies for power and RF
Lecture Topics:
-Ultra-Thin Chips – A New Paradigm in Silicon Technology
-Hybrid Systems-in-Foil - Combining the Merits of Thin Chips and of Large-Area Electronics
-GaN-on-Si Technology for Power, RF & Specials
-Marvels of Microelectronic Engineering
Simon Deleonibus - Fellow

Silicon Technologies
Simon Deleonibus, retired from CEA-LETI on Jan 1st 2016 as Chief Scientist after 30 years of Research on Micro Nanoelectronics Devices Architectures including More Moore More than Moore and Beyond Moore domains emerging devices and architectures: MOSFET scaling technology(bulk, SOI and GeOI), Nanowires FETs ,Tunnel FETs, SET, Non Volatile memories ( Floating gate, RRAM -PCRAM,OxRAM ,CBRAM), Digital,Neuromorphic and Quantum Computing, Sequential/Monolithic and Packaging 3D integration, Interconnect, Field isolation, III-V Power devices, Photovoltaics, MEMS and NEMS, Passive devices, test and modeling/simulation,... and necessary Process steps(lithography - optical and multi ebeams-, etching, thin film deposition and thermal treatments, wafer bonding, physical characterizations,...).
Before joining CEA-LETI, he was with Thomson Semiconductors(1981-1986), where he developed and transferred to production advanced microelectronics technologies, devices and products (microprocessors, video processors, DSP, DAC and ADC, NVM...).
He gained his PhD in Applied Physics from Paris University(1982) on Photovoltaics. He is Visiting Professor at Tokyo Institute of Technology(Tokyo, Japan) since 2014 , National Chiao Tung University(Hsinchu, Taiwan) since 2015 and at Chinese Academy of Science(Beijing, PRC) since 2016 . He is distinguished CEA Research Director(since 2002), IEEE Distinguished Lecturer(since 2004), Fellow of the IEEE (since 2006), Fellow of the Electrochemical Society (since 2015). He was awarded the titles of Chevalier de l’Ordre National du Mérite(2004) and Chevalier de l’Ordre des Palmes Académiques(2011), the 2005 Grand Prix de l’Académie des Technologies. Member of the ITRS since1998, the European Research Council Panel(2007), the Nanosciences Foundation Board of Trustees( 2007).
He was Associate Editor of IEEE Trans. on Elect. Dev.(2008-2014) and Member of the IEEE Electron Devices Society Board of Governors(01/2009-12/2014) and reelected(2016-2018) ; Chair of IEEE EDS Region 8 SRC (2015-2016) ; Secretary of IEEE Electron Devices Society (2016-2017).
Subramanian Iyer - Fellow

Electrical Engineering Department
Lecture Topics: Orthogonal Scaling, embededed Memory, system scaling, 3D integration, semiconductors
Meyya Meyyappan - Fellow

Center for Nanotechnology
Lecture Topics:
- Nanoelectronics in beyond Moore's Law Era
- Nanotechnology: development of practical systems and nano-micro-macro integration.
Durga Misra - Senior Member

- Nanoelectronics to Nanotechnology: More Moore and More than Moore
- Self-Heating in FinFETs and Its Impact on Logic Circuits
Hisayo S. Momose - Fellow

Richard S. Muller - Professor in the Graduate School, Professor Emeritus Elec. Engr. and Computer Sciences Dept.

Yuan Taur

Dept. of Electrical and Computer Eng.
Ravi M. Todi

Director and Senior Technologist Foundry Technology Development
Ravi Todi received his M.S. degree in Electrical and Mechanical Engineering from University of Central Florida in 2004 and 2005 respectively, and his doctoral degree in Electrical Engineering in 2007. His graduate research work was focused on gate stack engineering, with emphasis on binary metal alloys as gate electrode and on high mobility Ge channel devices. In 2007 he started working as Advisory Engineer/Scientist at Semiconductor Research and Development Center at IBM Microelectronics Division focusing on high performance eDRAM integration on 45nm SOI logic platform. Starting in 2010 Ravi was appointed the lead Engineer for 22nm SOI eDRAM development. For his many contributions to the success of eDRAM program at IBM, Ravi was awarded IBM’s Outstanding Technical Achievement Award in 2011. Ravi Joined Qualcomm in 2012, responsible for 20nm technology and product development as part of Qualcomm’s foundry engineering team. Ravi is also responsible for early learning on 16/14 nm FinFet technology nodes. Ravi had authored or co-authored over 50 publications, has several issues US patents and over 25 pending disclosures.
Lecuture Topic
- MOS Devices and Technology
Celebrated Member Award Committee Chair
Fernando Guarin - Fellow
Celebrated Member Award Committee Members
Meyya Meyyappan - Fellow
Center for Nanotechnology
Lecture Topics:
- Nanoelectronics in beyond Moore's Law Era
- Nanotechnology: development of practical systems and nano-micro-macro integration.
Samar K. Saha - Senior Member
Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Albert Z.H. Wang - Fellow - IEEE
Dept. of Electrical and Computer Engineering
Distinguished Service Award Committee
Early Career Award Committee Chair
Meyya Meyyappan - Fellow
Center for Nanotechnology
Lecture Topics:
- Nanoelectronics in beyond Moore's Law Era
- Nanotechnology: development of practical systems and nano-micro-macro integration.
Early Career Award Committee Members
Ru Huang - MOS Devices and Technology
Ru Huang (M’98–SM’06) received the B.S. (highest honors) and M.S. degrees in electronic engineering from Southeast University, Nanjing, China, in 1991 and 1994, respectively, and the Ph.D. degree in microelectronics from Peking University, Beijing, China, in 1997. In 1997, she joined the faculty of Peking University, where she is currently a Professor and the Head of the Department of Microelectronics. Since 2000, she has been the leader of several State Key Research Projects of China in device research and IC fabrication technology research, including major state basic research projects, 863 national projects, the key project from National Natural Science Foundation, as well as several collaborative projects with Samsung, Intel and Fujitsu Corporations. Her research interests include nano-scaled CMOS devices, nonvolatile memory devices and new devices for RF and harsh environment applications. She holds 21 granted patents, and has authored/co-authored 4 books and over 180 papers, including many conference invited papers. Dr. Huang is the winner of the National Science Fund for Distinguished Young Scholars and many other awards in China, including the National Youth Science Award, Science and Technology Progress Award from Ministry of Information Industry and Ministry of Education. She serves as a member of IEEE Electron Devices Society (EDS) AdCom and the associate chief editor of Science in China. She was the Technical Program Co-Chair of the 7th and 9th International Conference on Solid State and Integrated Circuit Technology (ICSICT 2004 and 2008), a Far East Committee Member of the 2004 International Solid State Circuits Conference (ISSCC), and committee members of many other international conferences and symposiums.
Lecture Topics:
Subramanian Iyer - Fellow
Electrical Engineering Department
Lecture Topics: Orthogonal Scaling, embededed Memory, system scaling, 3D integration, semiconductors
Hisayo S. Momose - Fellow
M.K. Radhakrishnan - Life Senior Member
MK Radhakrishnan (M’82, SM’94, LSM’18) is the Founder Director of NanoRel LLP -Technical Consultants providing analysis-based solutions to micro and nano electronic industries for improving reliability of devices. As a researcher in the area of semiconductor device failure physics for more than 35 years, he worked with industries (ST Microelectronic and Philips), research institutions (Institute of Microelectronics, Singapore and Indian Space Research Organization) and in academia with National University of Singapore. As a technical consultant he works with many MNCs and also provides training on device failure analysis & reliability to various Industries, Universities and Research Centres.
Lecture Topics:
- Circa 70 – Semiconductor Device Progression and Challenges towards Nanoera.
- Interface Physics and Analysis Challenges in Silicon Nanodevices
- Are the Progressions towards the “Benefit of Humanity”? - A Failure Analyst’s View
Samar K. Saha - Senior Member
Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Jacobus W. Swart - Fellow
Ravi M. Todi
Director and Senior Technologist Foundry Technology Development
Ravi Todi received his M.S. degree in Electrical and Mechanical Engineering from University of Central Florida in 2004 and 2005 respectively, and his doctoral degree in Electrical Engineering in 2007. His graduate research work was focused on gate stack engineering, with emphasis on binary metal alloys as gate electrode and on high mobility Ge channel devices. In 2007 he started working as Advisory Engineer/Scientist at Semiconductor Research and Development Center at IBM Microelectronics Division focusing on high performance eDRAM integration on 45nm SOI logic platform. Starting in 2010 Ravi was appointed the lead Engineer for 22nm SOI eDRAM development. For his many contributions to the success of eDRAM program at IBM, Ravi was awarded IBM’s Outstanding Technical Achievement Award in 2011. Ravi Joined Qualcomm in 2012, responsible for 20nm technology and product development as part of Qualcomm’s foundry engineering team. Ravi is also responsible for early learning on 16/14 nm FinFet technology nodes. Ravi had authored or co-authored over 50 publications, has several issues US patents and over 25 pending disclosures.
Lecuture Topic
- MOS Devices and Technology
Education Award Committee Chair
Durga Misra - Senior Member
- Nanoelectronics to Nanotechnology: More Moore and More than Moore
- Self-Heating in FinFETs and Its Impact on Logic Circuits
Education Award Committee Members
Muhammad Alam
Samar K. Saha - Senior Member
Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Michael Shur - Fellow
Lecture Topics:
- Terahertz Plasmonic devices
- Silicon THz and sub-THz Electronics for imaging, sensing, testing, and communication
- Wide Band Gap Technology: State-of-the-Art and Problems to Solve
- Physics of III-N-based Field Effect Transistors
- Beyond Sunlight: Smart LED Lighting
- Physics of III-N Electronic and Optoelectronic Devices
- Counter Intuitive Physics of Ballistic Transport in the State-of-the-Art Electronic Devices
- State-of-the-Art Silicon VLSI: Industrial Face of Nanotechnology
Juzer Vasi
Indian Institute of Technology
Bin Zhao - Fellow
Lecture Topics:
- Analog/Mixed-Signal/RF IC and Enabling Technologies
- High Performance VLSI Interconnect
George Smith Award Committee Chair
Tsu-Jae King Liu - Editor-in-Chief
EECS
Tsu-Jae King Liu received the B.S., M.S., and Ph.D. degrees in Electrical Engineering from Stanford University. From 1992 to 1996 she was a Member of Research Staff at the Xerox Palo Alto Research Center (Palo Alto, CA). In August 1996 she joined the faculty of the University of California, Berkeley, where she is currently the TSMC Distinguished Professor in Microelectronics, and Chair of the Department of Electrical Engineering and Computer Sciences. Dr. Liu's research awards include the DARPA Significant Technical Achievement Award (2000) for development of the FinFET, the IEEE Kiyo Tomiyasu Award (2010) for contributions to nanoscale MOS transistors, memory devices, and MEMs devices, the Intel Outstanding Researcher in Nanotechnology Award (2012), and the Semiconductor Industry Association Outstanding Research Award (2014). She has authored or co-authored close to 500 publications and holds over 90 U.S. patents, and is a Fellow of the IEEE. Her research activities are presently in advanced materials, process technology and devices for energy-efficient electronics.
George Smith Award Committee Members
EDL Editors
J.J. Ebers Award Committee Chair
Joachim N. Burghartz - Fellow
Joachim N. Burghartz is an IEEE Fellow, an IEEE Distinguished Lecturer, recipient of the 2014 EDS J.J. Ebers Award, and has been an ExCom member of the IEEE Electron Devices Society. He received his MS degree from RWTH Aachen in 1982 and his PhD degree in 1987 from the University of Stuttgart, both in Germany. From 1987 thru 1998 he was with the IBM T. J. Watson Research Center in Yorktown Heights, New York, where he was engaged in early development of SiGe HBT technology and later in research on integrated passive components, particularly inductors, for application to monolithic RF circuits. From 1998 until 2005 he was with TU Delft in the Netherlands as a full professor and from 2001 as the Scientific Director of the Delft research institute DIMES. In fall 2005 he moved to Stuttgart, Germany, to head the Institute for Microelectronics Stuttgart (IMS CHIPS). In addition, he is affiliated with the University of Stuttgart as a full professor. More recently, he also became CEO of the IMS Mikro-Nano Produkte GmbH. Dr. Burghartz has published about 350 reviewed articles and holds more than 30 patents. Distinguished Lecture Titles -Hybrid Systems in Foil -Ultra-thin chip technology -GaN technologies for power and RF
Lecture Topics:
-Ultra-Thin Chips – A New Paradigm in Silicon Technology
-Hybrid Systems-in-Foil - Combining the Merits of Thin Chips and of Large-Area Electronics
-GaN-on-Si Technology for Power, RF & Specials
-Marvels of Microelectronic Engineering
J.J. Ebers Award Committee Members
Narain Arora
Lecture Topics:
1) GPU based parasitic capacitance extractor for VLSI design
2) Modeling and characterization of VLSI interconnects
Cor L. Claeys - Fellow
Cor Claeys is Professor at the KU Leuven (Belgium) since 1990. He was with imec, Leuven, Belgium from 1984 till 2016. His main interests are semiconductor technology, device physics, low frequency noise phenomena, radiation effects and defect engineering. He co-edited books on “Low Temperature Electronics” and “Germanium-Based Technologies: From Materials to Devices” and wrote monographs on “Radiation Effects in Advanced Semiconductor Materials and Devices”, “Fundamental and Technological Aspects of Extended Defects in Germanium” and “Random Telegraph Signals in Semiconductor Devices” and “Metals in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control and Electrical Impact”. He (co)authored 14 book chapters, over 1100 conference presentations and more than 1300 technical papers. He is editor/co-editor of 60 Conference Proceedings. Prof. Claeys is a Fellow of the Electrochemical Society and of IEEE. He was Founder of the IEEE Electron Devices Benelux Chapter, Chair of the IEEE Benelux Section, elected Board of Governors Member and EDS Vice President for Chapters and Regions. He was EDS President in 2008-2009 and Division Director on the IEEE Board of Directors in 2012-2013. He is a recipient of the IEEE Third Millennium Medal and received the IEEE EDS Distinguished Service Award. Within the Electrochemical Society, he was Chair of the Electronics & Photonics Division (2001-2003) . In 2004, he received the Electronics & Photonics Division Award.
Lecture Topics:
* Low Frequency Noise in state of the art and emerging semiconductor technologies
* Radiation Hardness of State-of-the-art Si and Ge-Based CMOS Technologies
* Are Extended Defects a Show Stopper for Future III-V CMOS Technologies?
* Trends and Challenges in Micro- and Nanoelectronics for the Next Decade
Jamal Deen - Fellow
Lecture Topics:
-Smart Sensors and Smart Homes for Ubiquitous-Healthcare – AI is a Key Enabler
-Smart Sensors for Environmental Applications
-Smart Sensors for Water Quality Monitoring
-Low-cost Compact Integrated Bioimagers for Healthcare Applications
-Integrating Nanoelectronics and Optoelectronics in Bioimagers for Healthcare Applications
-Smart Sensors for Ubiquitous-Healthcare
Samar K. Saha - Senior Member
Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Kang L. Wang
Paul K.L. Yu - Fellow
ECE Department, MS 0407
Lecture Topics:
- Recent Advances in Photonic Devices for RF/Wireless
- Semiconductor Wafer Bonding Technology for Device Integration
- Green Campus projects
Paul Rappaport Award Committee Chair
Tsu-Jae King Liu - Editor-in-Chief
EECS
Tsu-Jae King Liu received the B.S., M.S., and Ph.D. degrees in Electrical Engineering from Stanford University. From 1992 to 1996 she was a Member of Research Staff at the Xerox Palo Alto Research Center (Palo Alto, CA). In August 1996 she joined the faculty of the University of California, Berkeley, where she is currently the TSMC Distinguished Professor in Microelectronics, and Chair of the Department of Electrical Engineering and Computer Sciences. Dr. Liu's research awards include the DARPA Significant Technical Achievement Award (2000) for development of the FinFET, the IEEE Kiyo Tomiyasu Award (2010) for contributions to nanoscale MOS transistors, memory devices, and MEMs devices, the Intel Outstanding Researcher in Nanotechnology Award (2012), and the Semiconductor Industry Association Outstanding Research Award (2014). She has authored or co-authored close to 500 publications and holds over 90 U.S. patents, and is a Fellow of the IEEE. Her research activities are presently in advanced materials, process technology and devices for energy-efficient electronics.
Paul Rappaport Award Committee Members
T-ED Editors
Region 9 Outstanding Student Paper Award Committee Chair
Arturo Escobosa
Depto. de Ing. Electrica
Region 9 Outstanding Student Paper Award Committee Members
Edmundo A. Gutierrez-D. - Senior Member
Dr. Edmundo A. Gutiérrez-D. got his PhD in 1993 from the Catholic University of Leuven, Belgium with the thesis entitled “Electrical performance of submicron CMOS technologies from 300 K to 4.2 K”. From 1989 to 1993, while working for his PhD, served as a research assistant at the Interuniversity Microelectronics Center (IMEC) in Leuven, Belgium. In 1996 was guest Professor at Simon Fraser University, Vancouver, Canada. In 1996 spent two months as an invited lecturer at the Sao Paulo University, Brazil. In 2000 acted as Design Manager of the Motorola Mexico Center for Semiconductor Technology. In 2002 was invited lecturer at the Technical University of Vienna, Austria. In 2005 joined the Intel Mexico Research Center as technical Director. Currently he holds a Professor position at the National Institute for Astrophysics, Optics and Electronics (INAOE), in Puebla, Mexico. Prof. Gutiérrez-D. is an IEEE senior member since 2008. Professor Gutiérrez-D. has published over 100 scientific publications and conferences in the field of semiconductor device physics, has supervised 5 M.Sc. and 10 Ph.D. thesis, and is author of the book “Low Temperature Electronics, Physics, Devices, Circuits and Applications” published by Academic Press in 2000. Prof. Gutiérrez-D. is member of the Mexico National System of Researchers and technical reviewer for the Mexico National Council for Science and Technology (CONACyT).
Lecture Topics:
-Semiconductor device physics, characterization, and modeling
-Cryogenic electron devices physics, sensors, and systems
-Electro-thermal modeling and thermo-magnetics effects
-Degradation and reliability of advanced FET technologies
M.K. Radhakrishnan - Life Senior Member
MK Radhakrishnan (M’82, SM’94, LSM’18) is the Founder Director of NanoRel LLP -Technical Consultants providing analysis-based solutions to micro and nano electronic industries for improving reliability of devices. As a researcher in the area of semiconductor device failure physics for more than 35 years, he worked with industries (ST Microelectronic and Philips), research institutions (Institute of Microelectronics, Singapore and Indian Space Research Organization) and in academia with National University of Singapore. As a technical consultant he works with many MNCs and also provides training on device failure analysis & reliability to various Industries, Universities and Research Centres.
Lecture Topics:
- Circa 70 – Semiconductor Device Progression and Challenges towards Nanoera.
- Interface Physics and Analysis Challenges in Silicon Nanodevices
- Are the Progressions towards the “Benefit of Humanity”? - A Failure Analyst’s View
Samar K. Saha - Senior Member
Lecture Topics: (1) Compact Variability Modeling; (2) Scaling Flash Memory Cell to Nanometer Regime; (3) High-performance and Ultra-low Power CMOS Device and Technology
Robert Bosch Micro and Nano Electro Mechanical Systems Award Committee Chair
Kurt E. Petersen - Serial MEMS Entrepreneur, Mentor and Investor in Early Stage Start-Up Companies
Professional Membership: Life Fellow of IEEE
Biography: Kurt Petersen received his BS degree cum laude in EE from UC Berkeley in 1970. In 1975, he received a PhD in EE from the Massachusetts Institute of Technology. Dr. Petersen established a micromachining research group at IBM from 1975 to 1982, during which he wrote the review paper “Silicon as a Mechanical Material,” published in the IEEE Proceedings (May 1982). This paper is still the most frequently referenced work in the field of micromachining and micro-electro-mechanical systems (MEMS). Since 1982, Dr. Petersen has co-founded six successful companies in MEMS technology, Transensory Devices Inc. in 1982, NovaSensor in 1985 (now owned by GE), Cepheid in 1996 (now a public company on NASDAQ: CPHD), SiTime in 2004 (still private), Profusa in 2008 (still private), and Verreon in 2009 (acquired by Qualcomm). In 2011, Dr. Petersen joined the Band of Angels in Silicon Valley. The Band is an angel investment group which mentors and invests in early stage, high-tech, start-up companies. Today, he spends most of his time helping and mentoring such companies. Dr. Petersen has published over 100 papers, and has been granted over 35 patents in the field of MEMS. In 2001 he was awarded the IEEE Simon Ramo Medal for his contributions to MEMS. Dr. Petersen is a member of the National Academy of Engineering and is a Fellow of the IEEE in recognition of his contributions to “the commercialization of MEMS technology”.
Robert Bosch Micro and Nano Electro Mechanical Systems Award Committee Members
Christofer Hierold
Micro and Nanosystems
Research Areas:Functional nanomaterials in MEMS and NEMS (e.g. carbon nanotube sensors, ultra low power sensors), Polymer microsystems (e.g. magnetic polymers, biodegradable polymers), Advanced MEMS (e.g. micro thermoelectric generators, large deflection actuators by polymer springs in MEMS),Fabrication technology (integration of functional nanomaterials on larger areas)
Professional Memberships: IEEE/EDS
Biography: Christofer Hierold has been Professor of Micro and Nanosystems at the Swiss Federal Institute of Technology in Zurich (ETH) since April 2002. Further, he is Executive Coordinator ETH Zurich of the Binnig and Rohrer Nanotechnology Center (BRNC) atRuschlikon. Before he joined ETH Zurich in 2002 he was with Siemens AG, Corporate Research, and Infineon Technologies AG in Germany. In 1990 he graduated from Technical University Munich (TUM) with a Dr.-Ing. Degree in Engineering Sciences.
Christofer Hierold is Co-Chair of the Steering Committee of the EUROSENSORS conference, and a member of the Steering Committees of both MEMS and TRANSDUCERS. He served as General Co-Chair of MEMS 2009, and is Program Chair of TRANSDUCERS 2013. Professor Hierold is a member of the Swiss Academy of Engineering Sciences (SATW).
Clark Nguyen
University of California at Berkeley
Research Areas: Integrated micromechanical signal processors and integrated sensors, merged circuit/micromechanical technologies, RF communications, integrated circuit design and technology, short- and long-term stability in micromechanical devices
Professional Memberships: IEEE/EDS, IEEE/SSCS, IEEE/UFFC
Biography: Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sciences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is now a Professor and a co-Director of the Berkeley Sensor & Actuator Center. In 2001, Prof. Nguyen founded Discera, Inc., a company aimed at commercializing communication products, based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for 3.5 years as the Program Manager of the MEMS, Micro Power Generation (MPG), Chip-Scale Atomic Clock (CSAC), MEMS Exchange (MX), Harsh Environment Robust Micromechanical Technology (HERMIT), Micro Gas Analyzers (MGA), Radio Isotope Micropower Sources (RIMS), RF MEMS Improvement (RFMIP), Navigation-Grade Integrated Micro Gyroscopes (NGIMG), and Micro Cryogenic Coolers (MCC) programs, in the Microsystems Technology Office of DARPA. Prof. Nguyen is a Fellow of the IEEE and presently serves as the Vice President for Frequency Control in the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society.
Osamu Tabata
Nano/Micro Engineering Lab
Research Areas: (1) Micro sensors, actuators and integrated sensors, (2) Microfabrication especially etching and lithography (UV, X-ray), (3) Nanofabrication, (4) DNA nanotechnology, (5) Characterization of thin film mechanical properties
Professional Memberships: IEEE
Biography:Osamu Tabata had been with the Toyota Central Research and Development Laboratories from 1981. In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Japan. In 2003, he moved to Kyoto University, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany, from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. He had visiting Professorship for senior international scientists of the Chinese Academy of Science in 2010. He is an external senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 and a guest Professor of Huazong University of Science and Technology from 2011. He served as a General Chair of MEMS2003 and NEMS2012, and general co-chair of NMDC2012. Currently he is an associate editor of several Journals in the field of Nano/Microsystems and N/MEMS. Also he is serving as a program committee member of many International Conferences. He is interested in the research to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, DNA origami, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate.
Yu-Chong Tai
EDS Region 9 Chapter Chairs (except Student Branch Chapters)
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