2021 J-MEMS RightNow

Stay up to date with the latest developments in the MEMS areas with IEEE RightNow Access for J-MEMS. Enjoy temporary Open Access to selected featured papers from the latest J-MEMS edition.

 

Volume 30 Issue 6 (December 2021)

• Tactile sensing with scalable capacitive sensor arrays on flexible substrates
  Weichart, Johannes ; Roman, Cosmin; Hierold, Christofer
• Fabrication of 32x32 2D Capacitive Micromachined Ultrasonic Transducer (CMUT) Arrays on a Borosilicate Glass Substrate with Silicon-Through-Wafer Interconnects Using Sacrificial Release Process
  Adelegan, Oluwafemi; Coutant, Zachary; Minhaj, Tamzid; Seok, Chunkyun; Biliroglu, Ali; Yamaner, F. Yalcin; Oralkan, Omer

 

Volume 30 Issue 5 (October 2021)

• Ejected Droplet-Directed Transportation and Self-Alignment of Microfibers to Micro Trenches
  Bo Chang , Yu H. Feng, Jia L. Jin, and Quan Zhou
• A Sub-nL Chip Calorimeter and its Application to the Measurement of the Photothermal Transduction Efficiency of Plasmonic Nanoparticles 
  Sheng Ni , Yang Bu , Hangliang Zhu , Pavel Neuzil , and Levent Yobas

• Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging
  Haoran Wang , Hao Yang, Zhenfang Chen, Qincheng Zheng, Huabei Jiang , Philip X.-L. Feng and Huikai Xie

 

Volume 30 Issue 4 (August 2021)

• 1.3 mm2 Nav-Grade NEMS-based Gyroscope
  Marco Gadola;Andrea Buffoli;Marc Sansa;Audrey Berthelot;Philippe Robert;Giacomo Langfelder
• Thermal Response and TC f of GaN/AlN Heterostructure Multimode Micro String Resonators From −10 °C Up to 325 °C
  Wen Sui;Xu-Qian Zheng;Ji-Tzuoh Lin;Bruce W. Alphenaar;Philip X.-L. Feng

• Bimorph Pinned Piezoelectric Micromachined Ultrasonic Transducers for Space Imaging Applications
  Zhichun Shao;Sedat Pala;Yande Peng;Liwei Lin