2023 J-MEMS RightNow

 

 Volume 32 Issue 6 (December 2023) 

Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW 

Barrera Juarez, Omar Armando; Cho, Sinwoo; Matto, Lezli; Kramer, Jack; Huynh, Kenny; Chulukhadze, Vakhtang; Chang, Yen Wei; Goorsky, Mark; Lu, Ruochen

 

Volume 32 Issue 5 (October 2023)

Thermoelectric and Thermoresistive Effect in Bi 2 Se 3 : A Novel Dual-Mode Temperature and Heat Flux Sensor

Kloesel, Katrina; Roman, Cosmin; Hierold, Christofer

 

Volume 32 Issue 4 (August 2023)

High-Aspect-Ratio Thin-Film Stiffening Structures Made of Atomic-Layer-Deposited Alumina and Its Application to a Scanning Micromirror

Hane, Kazuhiro; Nguyen, Tung; Saito, Shuhei; Sasaki, Takashi; Greif, Daniel; Parsons, Maxwell; Holmes, Steve

  

Volume 32 Issue 3 (June 2023)

An Ultrathin Internal Dielectric Actuator for Extended Range Deflection Pull-in Free Actuation

Verma, Satish; Mitra, Bhaskar

 

Volume 32 Issue 2 (April 2023)

Cost-Effective Strategy for Developing Small Sized High Frequency PMUTs Toward Phased Array Imaging Applications 

Yu, Bo; Yu, Can; Zhang, Liang; Wang, Zhuocheng; Xu, Xingli; He, Anwei; Wang, Xiaohe; Niu, Pengfei; Pang, Wei

 

Volume 32 Issue 1 (February 2023)

Silicon-Based Stretchable Structure via Parylene Kirigami Interconnection

Han, Xu; meixuan, Zhang; Lang, Chen; Pan, Zhang; Jin, Yufeng; Wang, Wei